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Single Chamber PECVD Tools


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Item IDItem DescriptionSize RangeCass to CassLoadlock#PriceNotes Location
MakeModelSet SizeLoadlock Y/N
$
184607 Astex AX5000, AX6000, AX6350 or similar 1 F* Leominster, Massachusetts
189843 Astex AX6500 "Clamshell" MPCVD 1 Leominster, Massachusetts
137483 Astex ECR-MOCVD-PECVD 1 Leominster, Massachusetts
11074 Nexx Systems Cirrus 300YES 1 F* Scotia, New York
181540 Oxford Instruments Plasmalab System 100YES 1 F* Scotia, New York
147470 Plasma-Therm 790 PECVD 11" 1 F* Scotia, NY

NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.
Items from the following manufacturers are offered under Single Chamber PECVD Tools:
Astex, Nexx Systems, Oxford Instruments, Plasma-Therm