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Thermal Processing Equipment


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Group Offers into sub-categories under Thermal Processing EquipmentGroup Offers into sub-categories under Thermal Processing Equipment

List all 12 product types under Thermal Processing EquipmentList all 12 product types under Thermal Processing Equipment


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  •  
     Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
    Make Model
      $  
    3502

    AG Associates  

    2101 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 F* Plano, TX
    AG Associates 2101
    Rapid Thermal Processing System for 3"-5" Wafers
    3322

    AG Associates  

    2106 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 F* Plano, TX
    AG Associates 2106
    Rapid Thermal Processing System
    189869

    AG Associates  

    610 

    List all items of this typeBenchtop RTP Tools

    in Rapid Thermal Processing Equipment

    1 N* Plano, Texas
    AG Associates 610 Rapid Thermal Processor
    AG Associates 610 Rapid Thermal Processor
    • Benchtop System for up to 6" Wafers
    • PCAT Control System
    111094

    AG Associates  

    210M 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 F* Plano, TX
    AG Associates Heatpulse 210M
    Rapid Thermal Implant Monitor
    49891

    AG Associates  

    Heatpulse 2146 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 F* Plano, TX
    AG Associates Heatpulse 2146
    Single Chamber Rapid Thermal Processor PARTS TOOL ONLY
    51726

    AG Associates  

    410 Controller Only 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 F* Plano, TX
    AG Associates Heatpulse 410
    CONTROLLER ONLY
    42890

    AG Associates  

    2146 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 F* Scotia, NY
    AG ASSOCIATES SINGLE CHAMBER RTP TOOL
    Single Chamber RTP Tool
    183417

    ASM  

    A412 Dual Reactor  

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Malta, New York
    ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
    ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
    Twin LPCVD As Doped Reactors

    TOOL ID: FVX2560

    Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

    2011 Vintage

     

    Tool ID: FVX2560

    183418

    ASM  

    A412 Dual Reactor  

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Malta, New York
    ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
    ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
    Twin LPCVD As Doped Reactors

    TOOL ID: FVX2561

    Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

    2011 Vintage

     

    Tool ID: FVX2561

    181651

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Taichung, Taichung City
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    Dual Furnace LPCVD Reactor
    Reactor A is LPCVD SiN (DCS) DF-NDP-12
    Reactor B is LPCVD SiN (DCS) DF-NDP-14

    183169

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Malta, NY
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    Twin LPCVD SiN Reactors

    TOOL ID: FVX2541

    2011 Vintage
    183170

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Malta, New York
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    Twin LPCVD SiN Reactors

    TOOL ID: FVX2540

    2011 Vintage

     

    Tool ID: FVX2541

     
    181649

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Taichung, Taichung City
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & TEOS
    Manufactured in 2005; Status: Bagged and Skidded
    A412 Smart Batch
    Dual reactor LPCVD.
    Reactor A is LPCVD TEOS Oxide deposition
    Reactor B is LPCVD Silicon Nitride
    S/N: 30245
    178276

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Taichung, Taichung City
    ASM, A412 Ovens / Furnaces, 300mm
    Manufactured in 2005; Status: Bagged and Skidded
    Dual reactor LPCVD.
    Reactor A is LPCVD Silicon Nitride
    Reactor B is Phos Doped Poly silicon
    S/N: 30236

    137544

    Aviza Technology Ltd  

    Aviza Celsior mainframe for 12" / 300 mm 

    List all items of this typeBenchtop LPVCD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    Aviza Celsior mainframe
    Aviza Celsior mainframe



    Aviza Celsior mainframe
    Equipment Code: CVD304-04

    LOCATION: Dresden
    137540

    Aviza Technology Ltd  

    Aviza Pantheon Mainframe for 12" / 300 mm 

    List all items of this typeBenchtop LPVCD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    Aviza Pantheon Mainframe
    Aviza Pantheon Mainframe
    Equipment Code: CVD304-03


    Aviza Pantheon Mainframe with 3 chambers
    Serial Number: OX0412-005
    137566

    Tokyo Electron Ltd  

    OfenTel Minibatch (NITRID) for 12" / 300 mm 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    Furnace TEL Minibatch (NITRID)
    OfenTel Minibatch (NITRID)
    Equipment Code: OFE361-01

    TEL Formula Minibatch furnace for Nitride, 4


    OfenTel Minibatch (NITRID)
    Serial Number: P00000315001
    137567

    Tokyo Electron Ltd  

    OfenTel Minibatch (OXID) for 12" / 300 mm 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    FurnaceTel Minibatch (OXID)
    OfenTel Minibatch (OXID)
    Equipment Code: OFE361-02

    TEL Formula Minibatch furnace for Oxide


    OfenTel Minibatch (OXID)
    Serial Number: P00000315002
    133149

    Kokusai  

    2950704 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 4,200.00 F* Scotia, NY
    KOKUSAI DIFFUSION FURNACE TUBE
    Horizontal Diffusion Furnace Tube
    Unused Surplus


    Kokusai 2950704
    190993

    Kokusai  

    Quixace Ultimate 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F*N* Malta, New York
    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

    Low Temp Steam Anneal - for SOD Cure

    S/N: T2DD6-18711

    190748

    Kokusai  

    DJ-1236VN-DF 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Malta, New York
    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN
    Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

    S/N T2DC6-16590

    ALD TiN

    Tool is New In Box, with New Quartz.  Never installed.
    190749

    Kokusai  

    DJ-1236VN-DF 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Malta, New York
    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN
    Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

    S/N: T2DC6-16595

    ALD TiN
    180506

    Kokusai  

    DJ-1236VN-DF 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Dresden, SN
    Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
    Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
    TiCl4, NH3 - Process for TiN - Prior Use

    Cartridge Heater - D4EX22250, RHC2 Heater
    Number of control zone, 5 zones
    Heater element material - KANTHAL APM
    Maximum heating temperature range - 1050 degC (in Furnace)
    Flat zone length - 800mm (±2.0 degC at 800 degC)
    Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
    Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
    Main Operation Unit - TM150-HKT05 
    Sub Operation Unit - D4EX40577
    Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
    Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
    Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
    Bottle (For Ti Source) - BK1200URK, Made by Schumacher
    N2 Purge Load Lock System
    O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
    FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

    S/N: T2DC6-15901
    190750

    Kokusai  

    DD-1223VN 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F*N* Malta, New York
    Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN
    Kokusai Quixace, 300mm, DD-1223VN

    ALD-TiN 

    S/N T2DC6-16441
    186717

    Kokusai  

    DJ-853V 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Singapore,
    Kokusai, 200mm, DJ-853V, LPCVD SiN S
    Kokusai, 200mm, DJ-853V, LPCVD SiN 

    187754

    Mattson Technology  

    SHS 2800 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 Singapore,
    MATTSON, RTA, SHS2800SF, 200mm, RTP Thermal Processor
    MATTSON, RTA, SHS2800SF, 200mm, RTP Thermal Processor
    In the fab.

    S/N - 96040222
    157047

    Modular Process Tech  

    RTP-600xp 

    List all items of this typeSingle Chamber RTP Tools

    in Production RTP Tools

    1 Plano, TX
    MPT (Modular Process Technology) RTP-600xp
    Rapid Thermal Processing System
    4856

    MRL Industries  

    1024 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 F* Plano, TX
    MRL Industries 1024
    3-Tube Horizontal Diffusion Furnace w/Cantilever Loaders
    133147

    MRL Industries  

    400-920047 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 4,200.00 F* Scotia, NY
    MRL INDUSTRIES DIFFUSION FURNACE TUBE
    Black Max Horizontal Diffusion Furnace Tube
    Unused Surplus


    MRL Industries 400-920047
    91036

    MRL Industries  

    400-918104 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    2 3,500.00 F* Scotia, NY
    MRL INDUSTRIES FURNACE TUBE
    Furnace Tube
    91174

    MRL Industries  

    400-902959 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 3,500.00 Scotia, NY
    MRL INDUSTRIES FURNACE TUBE
    Furnace Tube
    188431

    Aviza Technology Ltd  

    AVP 8000 AP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    Cu Anneal




    S/N 4250
    188435

    Aviza Technology Ltd  

    AVP 8000 AP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    Padox/Sacri-Ox

    S/N: 4318
    189077

    Silicon Valley Group  

    AVP 8000 AP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    SVG, AVP 8000 AP, 200mm Vertical Furnace

    Padox/Sacri-Ox

    Bagged & Skidded in Warehouse


    191257

    Silicon Valley Group  

    AVP 8000, AP, Forming Gas Anneal 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace, Forming Gas Anneal
    SVG, AVP 8000 AP, 200mm Vertical Furnace, Forming Gas Anneal

    S/N: 4437
    191913

    Silicon Valley Group  

    AVP 8000 AP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

    SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

    Bagged & Skidded in Warehouse


    189132

    Silicon Valley Group  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)

    Bagged & Skidded in warehouse
    188436

    Aviza Technology Ltd  

    AVP 8000 AP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    Padox/Sacri-Ox

    S/N: 4404
    188481

    Aviza Technology Ltd  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Poly (Plain Poly)

    S/N: 4302
    188482

    Aviza Technology Ltd  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Plain Poly

    S/N: A10092
    188483

    Aviza Technology Ltd  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD TEOS

    S/N: 4436
    188432

    Aviza Technology Ltd  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)


    S/N: 4359

    188433

    Aviza Technology Ltd  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)


    S/N: 4434

     

    188434

    Aviza Technology Ltd  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-ONO

    S/N: A10078
    191270

    Silicon Valley Group  

    AVP 8000 LP, SiN 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F*N* Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD SiN
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)

    S/N: 4321
    187658

    Tokyo Electron Ltd  

    Alpha 8 S 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride
    TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride

    S/N: 300009675379

    In the Fab in Singapore
    190746

    Tokyo Electron Ltd  

    IndyPlus 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Malta, New York
    TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2
    TEL Indy +, Vertical Furnace, 300mm

    ALD-HfO2
    190747

    Tokyo Electron Ltd  

    IndyPlus 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Malta, New York
    TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2

    TEL Indy +, Vertical Furnace, 300mm

    ALD-HfO2

    137543

    TEL Corp.  

    TEL Trias TI/TiN-ALD for 12" / 300 mm 

    List all items of this typeBenchtop LPVCD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    TEL Trias TI/TiN-ALD
    TEL Trias TI/TiN-ALD
    Equipment Code: CVD314-01


    TEL Trias TI/TiN-ALD
    Serial Number: C10503
    189682

    Tokyo Electron Ltd  

    Alpha 8S 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    TEL, Aplha 8 S, 200mm, Vertical Furnace, Doped Poly
    TEL, Aplha 8 S, 200mm, Vertical Furnace,  Doped Poly

    S/N: 300009645188
    143599

    Thermco  

    122688-001 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 Scotia, NY
    THERMCO FURNACE TUBE
    Furnace Tube

    Thermco 122688-001

    Unused surplus

    189872

    Thermco  

    TMX-9000 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 N* Plano, Texas
    Thermco TMX-9000 Furnace Control System
    Thermco TMX-9000 Furnace Control System
    • 4ea Separate Tube Controllers
    50992

    Canary Technology  

    CT 3533-130 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 F* Scotia, NY
    THERMCO/TEMPRESS TUBE FURNACE
    Six Pack Tube Furnace consisting of one three stack 4" capable and one 6" capable three stack furnace

    Two three stack Thermco furnace banks sharing one laminar flow, bulk head mount, manual pull station with Tempress Model 263 Controllers.
    Left side bank was refurbished and upgraded(Canary Tech.) to 150mm capable MRL Black Max heating elements with one year of use.

    Furnace will be sold AS IS WHERE IS

    3890

    Thermtech  

    15310SC 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 6,750.00 F* Scotia, NY
    THERMTEC DIFFUSION FURNACE
    Diffusion Furnace
    133220

    Zircar  

    FX2254 

    List all items of this typeHorizontal Diffusion Furnaces

    in Diffusion Furnaces

    1 4,200.00 F* Scotia, NY
    ZIRCAR HEATER MODULE 1300°C
    Furnace Tube

    Zircar HTMOD FX2254


    *   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Thermal Processing Equipment:
    AG Associates, ASM, Aviza Technology Ltd., Canary Technology, Kokusai, Mattson Technology, Modular Process Technology, MRL Industries, Silicon Valley Group, TEL Corp., Thermco, Thermtech, Tokyo Electronics Limited, Zircar