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Item ID  Photo Short Description Product Type / Details # Price Notes Location Make Model   $   242019 ATV Technologie GmbH   ATV Technologie GmbH   PEO 602  Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 602 tube furnace: This furnace can handle wafers up to 150mm Configuration: N2 -  1500 l/min N2 -    660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg 1   Warstein, North Rhine-Westphalia 242018 ATV Technologie GmbH   ATV Technologie GmbH   PEO 603  Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 603 tube furnace : This furnace can handle wafers up to 150mm Configuration: N2 -  1500 l/min N2 -    660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg 1   Warstein, North Rhine-Westphalia 202834 Kokusai   Kokusai   DJ-1236VN-DF  Vertical LPCVD Furnaces in LPCVD Furnaces HITACHI KOKUSAI, DJ-1236VN-DF, 300mm: HITACHI KOKUSAI, DJ-1236VN-DF, 300mm 1   Malta, New York 243313 Hitachi Kokusai Elec   Hitachi Kokusai Elec   DJ-1236VN-DF  Vertical LPCVD Furnaces in LPCVD Furnaces HITACHI KOKUSAI, DJ-1236VN-DF, 300mm, s/n: DN23300, FVX2488: HITACHI KOKUSAI, DJ-1236VN-DF, 300mm, FVX2488 Vertical LPCVD Furnace 1   Malta, New York

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

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Items from the following manufacturers are offered under LPCVD Tools: ATV Technologie GmbH, Hitachi Kokusai Elec, Kokusai