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Ion Implantation Equipment


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List all 2 product types under Ion Implantation EquipmentList all 2 product types under Ion Implantation Equipment


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     Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
    Make Model
      $  
    180088

    Applied Materials  

    Quantum X Plus 

    List all items of this typeMedium Current Implanters

    in Ion Implantation Equipment

    1 F* Dresden, SN
    Applied Materials 300mm Ion Implanter Quantum X Plus +
    Applied Materials Quantum X Plus
    2006 Vintage, Retired from Production June 10, 2015
    Was converted to 300mm from 200mm.
    Bottom Entry Utilities
    Low Backside Particle End Effector
    Quantum X Plus Ultralife Source with INtegral G1/G2 Electrode
    3rd/4th Cryo Pump - 2nd compressor on QX+
    Species: Ar, AsH3, PH3, BF3, N2, Xe, GeF4
    Serial Number: QX1084
    Tool ID:  IMP108

    NOTE:  Vacuum Robot is damaged.  Parts Tool applicable.

    180087

    Applied Materials  

    Quantum X Plus 

    List all items of this typeMedium Current Implanters

    in Ion Implantation Equipment

    1 F* Dresden, SN
    Applied Materials, 300mm, Ion Implanter Quantum X Plus +
    Applied Materials 300mm Ion Implanter Quantum X Plus +

    Tool ID:  IMP105
    Serial Number QX1107
    Last date of operation August 5, 2015
    Species: Ar, AsH3, PH3, BF3, N2, Xe, GeF4
    SW Rev 2.13
    Bottom Entry Utilities
    Low Backside Particle End Effector
    Quantum X Plus Ultralife Source with Integral G1/G2 Electrode
    3rd/4th Cryo Pump - 2nd compressor on QX+
    Species: Ar, AsH3, PH3, BF3, N2, Xe, GeF4

    NOTE:  Vacuum Robot damaged!  Tool is ideal for Spare Parts.
    USEFUL SPARE PARTS LIST IS ATTACHED!!!


    178268

    AMAT  

    XR80 

    List all items of this typeMedium Current Implanters

    in Ion Implantation Equipment

    1 Singapore,
    Applied Materials, 9500, xR80, Ion Implanters, 200mm
    Manufactured in 1997; Status: Bagged and Skidded
    178965

    Axcelis Technologies  

    Optima HDxT 

    List all items of this typeMedium Current Implanters

    in Ion Implantation Equipment

    1 F* Malta, NY
    Axcelis Optima HDxT, Ion Implanter, 300mm,
    300mm ion implanter, spare beam tunnel, SRA, PFG, source, manipulator, bushing source flange adapter, source turbo exhaust line, and . chamber liners.

    Axcelis Optima HDxT
     
    Roughing Pumps:
    Edwards IGX100L
    Edwards iGX100M
    Edwards iGX600M
     
    Cryo Pumps:
    Qty (2) Brooks: 320FE
    Qty (1) Brooks: 250FE
     
    Turbo Pump
    TP1: Edwards STP-XA2703CV
    TP2: Edwards STP-A1303CV
     
    Chillers: 
    Affinity J Chiller Model: GWN-ZRMK-BE55CBS6
    Affinity F-Series Model: FWA-032K-DD19CBD4
     
    Cryo Compressors:
    Qty (2) Brooks: IS-1000
    181815

    Varian  

    VIISta-810 

    List all items of this typeMedium Current Implanters

    in Ion Implantation Equipment

    1 N* Singapore,
    VARIAN, VIISta-810, 200mm Ion Implanter, Medium Current

    VARIAN, VIISta-810, 200mm Ion Implanter,

    VARIAN, VIISta-810, 200mm Ion Implanter, 
    TOOL ID: MIMP-A07
    S/N: ES138022

    Tool ID: MIMP-A07


    *   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Ion Implantation Equipment:
    Applied Materials, Inc., Axcelis Technologies GmbH, Varian