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Group Offers into sub-categories under Lithography EquipmentGroup Offers into sub-categories under Lithography Equipment

List all 20 product types under Lithography EquipmentList all 20 product types under Lithography Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
13097
AB-M Inc.  

AB-M Inc.  

IR Wafer Aligner 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Scotia, NY
AB-M INC. IR WAFER ALIGNER STATION:
IR Wafer Aligner Station
183108
Accent Optical  

Accent Optical  

Caliper Q300 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   F* Fishkill, New York
Accent Optical, Caliper Q300, Biorad, 300mm, Overlay Measurement:
Accent Optical, Caliper Q300, Biorad, 300mm, Overlay Measurement

Robotic pick and place wafer transport with two FOUPs

Optics module with variable magnification

High Resolution X,Y,Z & Theta Stage sortware controlled incorporating DSF Autofocus

Programmable Bandwidth Illumination system

Automated Pattern Recognition

Vibration Isolation Table

Fully I300I && GEM/MSEM compliant

GUI and Analysis package running under Lenux

File sharing by LAN

Facilities required:

NPS-208/3ph/60hz @ 20 amps, Facilities connect 3-phase, 5 wire star (3 phases, neu, gnd) rigid isolation base required with 200 mm pass through hole; requires twist-lock outlet and cord cap
Bulk Gases -
Compressed Air - 0.1 scfm @ 84 psi, thru 1/4" push fit, rear connection.  Provide regulator, isolation valve, and guage.
Process Vacuum - 2.1 scfm @ 800 mbar, thru 5/16" push fit, rear connection.  Provide isolation valve and guage
89964
AIO Microservice  

AIO Microservice  

8826 

List all items of this typeRobotic PR Coater Tracks

in Photoresist Coater Tracks

1   F* Scotia, NY
AIO MICROSERVICE DUAL TRACK COAT SYSTEM:
Dual Track Coat System
180601
ASML  

ASML  

/300 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Temecula, California
ASML /300 DUV Stepper - 6":
ASML /300 - DUV Wafer Stepper - 6" Wafer
Refurbished condition, Lens data taken before decommissioning shows good lens quality.
Currently decomissioned, not available for testing.
Lens under N2 Purge, unit stored in cleanroom.
194738
ASML  

ASML  

XT-1400E 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Taichung, Taichung City
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, :
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

SN : M5215


194739
ASML  

ASML  

XT-1400F 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Taichung, Taichung City
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, :
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

S/N : M5417
194740
ASML  

ASML  

XT-1400F 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Taichung, Taichung City
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, :
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

S/N : M9794
191094
Dainippon Screen  

Dainippon Screen  

SC-W60A-AV 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

2   N* Villach, Carinthia
B604 SCREEN DNS SCW60B:
Coater with 4 horizontal load ports
2 coater cups
6 resist lines with 3 pumps
8 hot plates (2 of them ADH HP)
2 cool plates
1 temperature controller / unit
137795
BLE-SussMicrotec  

BLE-SussMicrotec  

Delta 20-W8 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   F* Scotia, NY
BLE MANUAL PHOTORESIST COATER:
Manual Photoresist Coater

BLE Delta 20-W8

BLE was acquired by Suss MicroTec

44185
Suss MicroTec  

Suss MicroTec  

RESPECT 600 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   F* Scotia, NY
BLE RESPECT AUTOMATIC PHOTORESIST COATER:
Automatic Photoresist Coater
 


System is designed exclusively to coat and bake substrates
using spinning and heating techniques.

BLE was acquired by Suss Microtec

44184
Suss MicroTec  

Suss MicroTec  

Respect 600 

List all items of this typeManual Photoresist Developers

in Photoresist Developers

1   F* Scotia, NY
BLE RESPECT AUTOMATIC PHOTORESIST DEVELOPER:

System is designed exclusively to develop and bake substrates
using spinning and heating techniques

BLE was acquired by Suss Microtec

77000
Brewer Science  

Brewer Science  

CEE 4000 

List all items of this typeRobotic PR Coater Tracks

in Photoresist Coater Tracks

2   F* Scotia, NY
BREWER SCIENCE INC. PROGRAMMABLE AUTOMATED COAT/BAKE TRACK SYSTEM:
Programmable Automated Coat/Bake Track System
192501
Brewer Science  

Brewer Science  

300x 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Malta, New York
Brewer Science, 300 X, Resist Coater, 300mm:
Brewer Science,  300 X, Resist Coater, 300mm

Resist Coater
192586
Brewer Science  

Brewer Science  

300XD 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   N* Malta, New York
Brewer Science, 300XD, Resist Developer, 300mm:
Brewer Science,  300XD, Resist Developer, 300mm
192500
Brewer Science  

Brewer Science  

CEE 2000 FX 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Malta, New York
Brewer Science, CEE 200 FX, Resist Coater, 300mm:
Brewer Science, CEE 200 FX, Resist Coater, 300mm

photoresist coater

192585
Brewer Science  

Brewer Science  

CEE 200 FX 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Malta, New York
Brewer Science, CEE 200 FX, Resist Developer, 300mm:
Brewer Science,  CEE 200 FX, Resist Developer, 300mm

Configured for 300mm Square substrates


23625
C&D Semiconductor  

C&D Semiconductor  

8126 

List all items of this typeProgrammable Robotic Track Systems

in Photoresist Coater/Developers

2   F* Scotia, NY
C&D SEMICONDUCTOR Photoresist Tracks 5" Wafer:
Photoresist Coat/Developer Tracks
157438
Dainippon Screen  

Dainippon Screen  

SDW60 AVP 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

1   F* Regensburg, BY
Developer DNS SDW-60-AVP:
6 inch developer from dai nippon screen SDW-60-AVP, 2 developing units, full functional
180517
Dainippon Screen  

Dainippon Screen  

SDW-60-AVP 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

1   F* Regensburg, BY
Developer DNS SDW-60-AVP:
6 inch developer from dai nippon screen SDW-60-AVP, 2 developing units, full functional
Location: Regensburg, Bavaria
4880
DainipponScreen  

DainipponScreen  

SK-W80A-BVP 

List all items of this typeProgrammable Robotic Track Systems

in Photoresist Coater/Developers

1   F* Plano, TX
DNS SK-W80A-BVP:
Dual Photoresist Coater/Developer
178887
Fusion Systems Inc.  

Fusion Systems Inc.  

M150PC 

List all items of this typePhotoresist Curing Tools

in Photoresist Tools

1   F* Plano, TX
Fusion M150PC Photoresist Stabilization Tool:
Fusion M150PC Photoresist Stabilization Tool
  • Part # 070304; Serial # P8E800CG
  • Configured for 75-150mm Wafers
  • 150mm Heated/Water Cooled Wafer Chuck
  • FUSION M150 Irradiator; Part # 099995;  Serial # 8F879BC
    • Dual Magnetron Generated Microwave @ 2.45GHz
    • Model H High Pressure Hg Lamp; Part # 068229
    • 5ea Lamp Cooling Air Jets                                    
  • FUSION UNI High Voltage Power Supply; Part # 079422; Serial # 8E2218AD
  • 2ea FUSION Cassette Elevators; Part # 078331; Serial #s 8D1497AC & 7L1493AB
  • 2ea FUSION Wafer Transporters; Part # 085421; Serial #s 8E1322AF & 8E1323AF
  • FUSION System Control Cabinet;  Part # 078981; Serial # 8E1680Z
  • FUSION RF-4 RF Detector; Part # 91581; Serial # 21631
  • Input Power: 208VAC, 60Hz, 3 Ph., 30A/Ph.


132025
Fusion Systems Inc.  

Fusion Systems Inc.  

M200PCU 

List all items of this typePhotoresist Curing Tools

in Photoresist Tools

1   Plano, TX
Fusion M200PCU:
Photoresist Stabilization Tool
132027
Fusion Systems Inc.  

Fusion Systems Inc.  

M200PCU 

List all items of this typePhotoresist Curing Tools

in Photoresist Tools

1   Plano, TX
Fusion M200PCU:
Photoresist Stabilization Tool
41529
Headway  

Headway  

CB15 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   F* Scotia, NY
HEADWAY RESEARCH MANUAL PHOTORESIST SPIN COATER:
Manual Photoresist Spin Coater
163700
Headway  

Headway  

PWM202-BD5-CB15 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   F* Scotia, New York
HEADWAY RESEARCH MANUAL PHOTORESIST SPIN COATER:
Manual Photoresist Spin Coater
9971
Headway  

Headway  

P8X20-30 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Plano, TX
Headway Research P8X20-30:
AC Spindle Motor for AC-101 Photoresist Spinner, New
135336
Interserv Technologi  

Interserv Technologi  

1400 

List all items of this typeLithography Exposure Tools - Other

in Exposure Tools

1   Scotia, NY
INTERSERV TECHNOLOGIES LARGE AREA LITHOGRAPHY SYSTEM:
Large Area Lithography System
Zeiss 5X 29 mm diameter 0.20na lens.



112607
Karl Suss  

Karl Suss  

MA 150M 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

1   F* Scotia, NY
KARL SUSS MANUAL MASK ALIGNER 150 MM:
Manual Mask Aligner

The Karl Suss MA 150M Manual Mask Aligner is a mask alignment and exposure system which offers
unsurpassed precision and versatility when handling wafers up to 150 mm in diameter.
163752
Laurell  

Laurell  

WS-200-8NPP RV 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1 4,000.00 Scotia, New York
LAURELL MANUAL PHOTORESIST SPIN COATER:
Manual Photoresist Spin Coater
192677
MIVA  

MIVA  

20128 Mask Writer 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   N* Malta, New York
MIVA, 20128, MASK WRIGHTER:
MIVA, 20128, MASK WRIGHTER
Maskless Exposure tool
191539
Nanometrics  

Nanometrics  

Q22I 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore,
Nanometrics, Q200I, 200mm,:
Nanometrics, Q200I, 200mm,
Biorad Overlay Tool

S/N: 200-00-11-02
186832
Nikon  

Nikon  

NSR-2205Ex12B 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Singapore,
Nikon, Lithography, NSR-2205EX12B 200mm:

Nikon, Lithography, NSR-2205EX12B 200mm

96611
Optical Associates  

Optical Associates  

311-041 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

2   F* Scotia, NY
OAI 311-041:
Intensity Profiler Probe
160264
Quintel  

Quintel  

Q-804 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

1   F* Scotia, NY
QUINTEL MASK ALIGNER/EXPOSURE SYSTEM:
Mask Aligner/Exposure System
192499
Quintel  

Quintel  

7000 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   N* Malta, New York
QUINTEL, 7000, Mask Aligner, 300mm:
QUINTEL, 7000, Mask Aligner, 300mm

contact mask aligner
24564
Quintel  

Quintel  

UL 7000 IR 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

1   F* Scotia, NY
QUINTEL-NEUTRONIX MASK ALIGNER 200 MM:
Mask Aligner with IR Backside Alignment

Quintel acquired by Neutronix
178722
Sokudo  

Sokudo  

RF-300A 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Taichung, Taichung City
178335
Sokudo  

Sokudo  

RF-300A 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Taichung, Taichung City
Sokudo, RF-300A Photoresist, 300mm:
Manufactured in 2007; Status: Bagged and Skidded
4005
Solitec  

Solitec  

820-CB 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

1   F* Scotia, NY
SOLITEC AUTOMATIC TWO-STATION PHOTORESIST COAT & BAKE:
Automatic Two-station
Photoresist Coat & Bake


Designed to coat and soft
bake semiconductor wafers.
5026
Solitec  

Solitec  

5110SJC 

List all items of this typeManual Photoresist Developers

in Photoresist Developers

1   F* Scotia, NY
SOLITEC SCRUBBER/HI PRESSURE SPRAY:
Scrubber/Hi Pressure Spray
4007
Solitec  

Solitec  

820-PTDB 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

1   F* Scotia, NY
SOLITEC TEMPERATURE CONTROLLED POSITIVE DEVELOPER:
Temperature Controlled Positive
Developer with Hot Plate Bake


Designed to develop and hard
bake semiconductor wafers.
164260
Spintrac Systems Inc  

Spintrac Systems Inc  

Spinball Combo 

List all items of this typeProgrammable Robotic Track Systems

in Photoresist Coater/Developers

1   F* Scotia, NY
SPINTRAC SITE SERVICES COATER DEVELOPER SYSTEM:
Development Tool - Has Seen Little Use
42108
Suss MicroTec  

Suss MicroTec  

FALCON - ACS 200 

List all items of this typeAutomated Coating and Developing Cluster System

in Photoresist Coater/Developers

1   F* Scotia, NY
SUSS MICROTEC FALCON ACS 200:
Fully Automated High Throughput Coating, Developing Cluster System

 

System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.

42129
Suss MicroTec  

Suss MicroTec  

GAMMA 60 

List all items of this typeAutomated Coating and Developing Cluster System

in Photoresist Coater/Developers

1   Scotia, NY
SUSS MICROTEC GAMMA 60:
SUSS Gamma 60 Coating and Developing Cluster Tool

170222
Suss MicroTec  

Suss MicroTec  

CIC1200/157308LS 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Scotia, New York
SUSS MICROTEC UV LAMP POWER SUPPLY 1500 WATT:
UV Lamp Power Supply, 1500 Watt

New in the box.

Suss Microtec CIC1200/157308LS
154092
Silicon Valley Group  

Silicon Valley Group  

8136 

List all items of this typePhotoresist Curing Tools

in Photoresist Tools

1 5,200.00 Scotia, NY
SVG SILICON VALLEY GROUP SINGLE TRACK HOT PLATE OVEN:
Single Track Hot Plate Oven

Silicon Valley Group 8136
178337
SVG  

SVG  

90SE 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore,
SVG, Photoresist, 200mm 90SE :
Manufactured in 2000; Status: Bagged and Skidded
178336
SVG  

SVG  

90SE 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Singapore,
SVG, Photoresist, 200mm 90SE Polyimide:
Manufactured in 2000; Status: Cold shutdown
131377
Tamarack Scientific  

Tamarack Scientific  

Contact Mask Exposure 

List all items of this typeContact/Proximity Mask Aligners

in Mask Aligners

1   F* Plano, TX
Tamarack Scientific Mask Aligner:
Contact Mask Exposure System
178720
Tokyo Electron Limit  

Tokyo Electron Limit  

Lithius iLine 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Taichung, Taichung City
TEL Lithius iLine, 300mm Resist Coat/Develop , 300mm:
300mm Track
bagged & skidded - warehouse
169139
Tel  

Tel  

Lithius ProV 

List all items of this typeAutomated Coating and Developing Cluster System

in Photoresist Coater/Developers

1   Scotia, NY
TEL LITHIUS PRO V RESIST CABINET:
Resist Cabinet
194543
Tel  

Tel  

Clean Track Mark8 2C3D 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   F*N* Singapore,
TEL MARK 8 Track, 200mm Photoresist Coater:

TEL MARK 8 Track, 200mm Photoresist Coater

2C3D

S/N : MD8271404

194575
Tel  

Tel  

Mark8  

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   N* Singapore,
TEL MARK 8 Track, 200mm Photoresist Coater:

TEL MARK 8 Track, 200mm Photoresist Coater

Tool is Missing parts.

194744
Tokyo Electron Ltd  

Tokyo Electron Ltd  

ACT12 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   N* Taichung, Taichung City
TEL, ACT 12 SOD, HSQ, Photoresist, 300mm:
TEL, ACT 12 SOD, HSQ, Photoresist, 300mm

S/N : J171294

178341
Tel  

Tel  

Lithius KrF 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Taichung, Taichung City
TEL, Lithius KrF Photoresist, 300mm:
Manufactured in 2007; Status: Bagged and Skidded
190440
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Lithius iLine 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Taichung, Taichung City
TEL, Lithius Standard I-Line Photoresist, 300mm:
TEL, Lithius Standard I-Line Photoresist, 300mm
190441
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Lithius iLine 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Taichung, Taichung City
TEL, Lithius Standard I-Line Photoresist, 300mm:
TEL, Lithius Standard I-Line Photoresist, 300mm
4LP / 2 D / 5 D

178340
Tel  

Tel  

Lithius I-Line 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Taichung, Taichung City
TEL, Lithius Standard I-Line Photoresist, 300mm:
Manufactured in 2007; Status: Bagged and Skidded
Multiple Units available.  Inquire if you need more than one.
LP*4/2C5D, for coating and developing wafer.
180602
Ultratech, Inc.  

Ultratech, Inc.  

1500 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   F* Regensburg, BY
Ultratech 1500 - Wafer Stepper - 6":
Used Ultratech 1500 - 6" Wafer Stepper
192503
WENESCO  

WENESCO  

HP 1616 UDVG 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   F* Malta, New York
WENESCO, HP1616UDVG, Hot Plate for P/R Bake, 300mm:
WENESCO, HP1616UDVG, Hot Plate for P/R Bake, 300mm

Used for Soft Bake

192504
WENESCO  

WENESCO  

HP 1616 UDVG 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

1   Malta, New York
WENESCO, HP1616UDVG, Hot Plate for P/R Bake, 300mm:
WENESCO, HP1616UDVG, Hot Plate for P/R Bake, 300mm

Used for Hard Bake


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Lithography Equipment:
AB-M Inc., Accent Optical, AIO Microservice, ASML, BLE-SussMicrotec, Brewer Science, C&D Semiconductor, Dainippon Screen Mfg. Co., Ltd., Fusion Systems Inc., Headway, Interserv Technologies, Karl Suss, Laurell, MIVA, Nanometrics, Nikon, Optical Associates, Quintel, Silicon Valley Group, Sokudo, Solitec, Spintrac Systems Inc, Suss MicroTec, Tamarack Scientific, Tel, Tokyo Electron Limited, Tokyo Electronics Limited, Ultratech, Inc., WENESCO