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List all 4 product types under Wafer SteppersList all 4 product types under Wafer Steppers


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
180601
ASML  

ASML  

/300 

List all items of this typeDeep UV Wafer Stepper

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1   F* Temecula, California
ASML /300 DUV Stepper - 6"
ASML /300 - DUV Wafer Stepper - 6" Wafer
Refurbished condition, Lens data taken before decommissioning shows good lens quality.
Currently decomissioned, not available for testing.
Lens under N2 Purge, unit stored in cleanroom.
192346
ASML  

ASML  

Twinscan XT-1400F 

List all items of this typeDeep UV Wafer Stepper

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1   Taichung, Taichung City
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm,
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

S/N : m5615

DOM : 5/1/2005
184033
ASML  

ASML  

Twinscan XT-1400F 

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1   Taichung, Taichung City
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm,
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

Serial Number: M7156

Parts Missing:
qty. 1 SPARE ASSY, AUTO SHUTTER
qty. 1 SPARE ASSY, BEAM REVERSER
qty. 1 POWER SUPPLY ASSEMBLY, DC
qty. 1 POWER SUPPLY, SWITCHING, 480V 3PHASE IN, 24V@125A
qty. 1 SPARE, LAM 54,471, MODULE ASSY, 193nm w/EIS, w/ LF, AWR
qty. 1 (ARF,SAM)SPARE, SAM MODULE, 193nm,w/EIS, SAM
qty. 1 SPARE,LINE NARROWING MODULE,LNM ,45X
qty. 1 WS TYPE1,2,3 SS1 XY MOTOR ASSY
qty. 1 BLOWER MOTOR ASSY
qty. 1 ACC MK4 CLEAN AIR FAN
qty. 1 SPM RS ENCODER HEAD TOP MNT Y1
qty. 2 SPARE, BLOWER MOTOR CONTROLLER, XL, 56-TURN
qty. 1 ASSY, RESONANT CHARGER, XLA-100, 7 JOULE
qty. 2 COMMUTATOR
qty. 1 OC ( ArF)
qty. 1 SPARE. ASSY. ArF 45W laser. Long Life PA Chamber.
qty. 1 SPARE.ASSY. ArF 45W Laser. Long Life MO Chamber.
qty. 1 WH SHB II ASSY
qty. 1 MPCR (MEAS.POS.CONTROL RACK)
qty. 1 ASSY,CAN CONTROLLER MODULE , LOWER LEFT OPTICS
qty. 2 POWER AMP CONTROLLER PPCA
qty. 1 WS TYPE 3+4 OXB COUPL FRAME&CLAMPS (XT1400)
qty. 1 WS TYPE 3+4 OPEN X-BEAM ASSY
qty. 1 SPARE ASSEMBLY,MO WEB
qty. 1 SPARE ASSEMBLY,PA WEB
qty. 1 SPARE, MECHANICAL ASSY, ISS

192333
ASML  

ASML  

PAS5500 /200 

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1   Singapore,
ASML, PAS5500/200, iLine Stepper, 200mm
ASML, PAS5500/200, iLine Stepper, 200mm

S/N: 9452
192334
ASML  

ASML  

PAS5500 /300 

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1   Singapore,
ASML, PAS5500/300, iLine Stepper, 200mm
ASML, PAS5500/300, iLine Stepper, 200mm

S/N : 3705
192501
Brewer Science  

Brewer Science  

300x 

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1   N* Sunnyvale, California
Brewer Science, 300 X, Resist Coater, 300mm
Brewer Science,  300 X, Resist Coater, 300mm

Resist Coater
192500
Brewer Science  

Brewer Science  

CEE 2000 FX 

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1   N* Sunnyvale, California
Brewer Science, CEE 200 FX, Resist Coater, 300mm
Brewer Science, CEE 200 FX, Resist Coater, 300mm

photoresist coater

178448
Canon  

Canon  

FPA-5500iZa 

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1   F* Taichung, Taichung City
Canon, Lithography, FPA-5500iZa 300mm
Manufactured in 2007; Status: Bagged and Skidded
178719
Canon  

Canon  

FPA-5500iZa 

List all items of this typeI-Line Wafer Stepper

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1   Taichung, Taichung City
191546
Nikon  

Nikon  

NSR 2205i14E 

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1   F* Singapore,
Nikon, Lithography, NSR 2205i14E, 200mm
Nikon, Lithography, NSR 2205i14E,  200mm

S/N: 1409087
186832
Nikon  

Nikon  

NSR-2205Ex12B 

List all items of this typeDeep UV Wafer Stepper

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1   Singapore,
Nikon, Lithography, NSR-2205EX12B 200mm

Nikon, Lithography, NSR-2205EX12B 200mm

192492
Nikon  

Nikon  

VMR3020 

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1   N* Sunnyvale, California
Nikon, VMR3020, CD & Overlay Measurement System, 300mm
Nikon, VMR3020, CD & Overlay Measurement System, 300mm

2001
192499
Quintel  

Quintel  

7000 

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1   N* Sunnyvale, California
QUINTEL, 7000, Mask Aligner, 300mm
QUINTEL, 7000, Mask Aligner, 300mm

contact mask aligner
185756
Silicon Valley Group  

Silicon Valley Group  

Micrascan II+ 

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1   Burlington, VT
SVG Micrascan II+, 200mm, Wafer Stepper
SVG Micrascan II+, 200mm, Wafer Stepper

Multiple Units Available
180602
Ultratech, Inc.  

Ultratech, Inc.  

1500 

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1   F* Regensburg, BY
Ultratech 1500 - Wafer Stepper - 6"
Used Ultratech 1500 - 6" Wafer Stepper


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Steppers:
ASML, Brewer Science, Canon, Nikon, Quintel, Silicon Valley Group, Ultratech, Inc.