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Item ID |
Photo |
Short Description |
Product Type / Details |
#
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Price |
Notes |
Location |
Make |
Model |
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$ |
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143041
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National Electronic
|
National Electronic |
MH3.OW-SL |
in Power Supplies
NATIONAL ELECTRONICS/RICHARDSON MICROWAVE MAGNETRON HEAD:Microwave Magnetron Head
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2
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Scotia, New York |
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249043
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Nexx Systems
|
Nexx Systems |
STRATUS S300 |
in Plasma Processing Equipment
NEXX STRATUS S300, 300mm, s/n: S00000131:PLT03 NEXX STRATUS S300-FX ELECTROPLATING TOOL with ANCOSYS AUTOMATED ANALYSIS AND DOSING Unit
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1
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N* |
East Fishkill, New York |
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249044
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Nexx Systems
|
Nexx Systems |
APOLLO HP |
in Plasma Processing Equipment
NEXX APOLLO HP, 300mm, s/n: 379:TEL NEXX APOLLO HP PVD SYSTEM SPT03
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1
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N* |
East Fishkill, New York |
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239647
|
Novellus Systems
|
Novellus Systems |
INOVA NEXT |
in Plasma Processing Equipment
NOVELLUS, INOVA NEXT, s/n M23321A, 300mm:NOVELLUS, INOVA NEXT, s/n M23321A, 300mm
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1
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|
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Malta, New York |
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203278
|
MKS Instruments, Inc
|
MKS Instruments, Inc |
3750-01145 |
in Plasma Processing Equipment
OEM Water-Cooled Dummy Load:- One used, microwave-tested unit in Cline Innovations' Massachusetts inventory as of 8/20/2021.
| |
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1
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Leominster, Massachusetts |
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244285
|
Oxford Instruments
|
Oxford Instruments |
OPAL |
in Plasma Processing Equipment
OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool:OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool
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1
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Malta, New York |
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208462
|
Plasma-finish
|
Plasma-finish |
V15G |
in Plasma Etch Equipment
PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT:Plasma Box Etcher System PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish
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1
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|
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Scotia, New York |
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225948
|
Plasma-Therm
|
Plasma-Therm |
790 |
in Single Chamber Plasma Tools
Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F - Manually Loaded Process Chamber with 8” (dia.) Cathode
- Gas Distribution Panel with 4ea Gas Channels
- MKS 1479 Metal Sealed Mass Flow Controllers
- 4ea Additional Gas Channels Available
- RFPP RF5S RF Generator: 500W @ 13.56MHz
- RFPP AMN-5 Auto Matching Network
- RFPP AMNPS-2A Auto Matching Network Controller
- Leybold TMP 361 Turbomolecular Pump
- Leybold NT 150/360 Turbomolecular Pump Controller
- EquipmentWorks 2.6 Application SW
- Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
- All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
- All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
- All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
- All SMC Pneumatic Valves Available from SMC USA
- Standard 21” Flat Panel Monitor, Keyboard & Mouse
- Edwards QDP40 Dry Roughing Pump
- NESLAB HX-75 Chiller
- Electrical Disconnect Box - 208V, 60Hz, 3 Ph
- System Fully Refurbished & Ready for Demonstration
- Guaranteed to Meet or Exceed OEM Specifications
- Price……$ 80,000.00 USD
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1
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|
80,021.44 |
|
Plano, Texas |
|
|
3011
|
Plasma-Therm
|
Plasma-Therm |
Wafer Batch 740/740 |
in Single Chamber Plasma Tools
PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:Dual Plasma Etch and Reactive Ion Etch Processing Systems
System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.
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1
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Scotia, New York |
|
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4054
|
Plasma-Therm
|
Plasma-Therm |
73/74 |
in Single Chamber Plasma Tools
PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:Combination PECVD and Dual Plasma Etch/Reactive Ion Etch Processing Systems
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1
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|
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Scotia, New York |
|
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50854
|
Plasma-Therm
|
Plasma-Therm |
VII 734 |
in Single Chamber Plasma Tools
PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:Combination Plasma Deposition System/RIE
|
1
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|
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F* |
Scotia, New York |
|
|
11919
|
Plasma-Therm
|
Plasma-Therm |
VII 734MF |
in Single Chamber Plasma Tools
PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:Plasmatherm RIE/Plasma Etch System
|
1
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|
|
F* |
Scotia, New York |
|
|
165893
|
PlasmaQuest
|
PlasmaQuest |
6" Load-Lock |
in Single Chamber Plasma Tools
PlasmaQuest Microwave-ECR Plasma etch system:- PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
- Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
- ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
- Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
- Originally equipped with 1000W Astex microwave delivery system (AX2110 or equivalent), but higher input power may be viable.
- System can be offered "as is" to experienced buyers.
- Full refurbishment for etch and/or PECVD processing can be considered.
- Configured with 2 modules including power & controls rack and vacuum module.
- Computer controller may function, but upgrade is recommended and should be possible.
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1
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|
|
|
Leominster, Massachusetts |
|
|
206582
|
Plasma-Therm
|
Plasma-Therm |
BT 6" RIE MF |
in Single Chamber Plasma Tools
PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":Reactive Ion Etch System BatchTop VII
|
1
|
|
|
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Scotia, New York |
|
|
45428
|
Plasma-Therm
|
Plasma-Therm |
790 ICP |
in Single Chamber Plasma Tools
PLASMATHERM ICP PLASMA ETCHER:Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
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1
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|
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F* |
Scotia, New York |
|
|
124315
|
Plasma-Therm
|
Plasma-Therm |
790 11" RIE |
in Single Chamber Plasma Tools
PLASMATHERM REACTIVE ION ETCH SYSTEM 11":Reactive Ion Etch System - 11" Electrode
|
1
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|
|
F* |
Scotia, New York |
|
|
45430
|
Plasma-Therm
|
Plasma-Therm |
790 11 RIE |
in Single Chamber Plasma Tools
PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:Reactive Ion Etch System 11" Electrode
|
1
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|
|
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Scotia, New York |
|
|
201152
|
Plasma-Therm
|
Plasma-Therm |
790 RIE PECVD 11" |
in Single Chamber Plasma Tools
PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.
Both top and bottom electrodes can be powered sequentially.
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1
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|
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Scotia, New York |
|
|
142821
|
Plasma-Therm
|
Plasma-Therm |
Unaxis 790 |
in Single Chamber Plasma Tools
PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:Shuttle Load Lock System
|
1
|
|
|
|
Scotia, New York |
|
|
230353
|
Advanced Energy
|
Advanced Energy |
B0111-DPXX-105-XX |
in Power Supplies
Profibus communication board for Advanced Energy CESAR generators:Profibus communication board for Advanced Energy CESAR generators
|
5
|
|
|
|
Scotia, New York |
|
|
197844
|
Sairem
|
Sairem |
6kW |
in Plasma Processing Equipment
Sairem 6kW water-cooled isolator:- 3-way microwave circulator and dummy load combination intended for 2.45GHz use.
- WR340 rectangular waveguide connections.
- Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
|
2
|
|
|
|
Leominster, Massachusetts |
|
|
249042
|
SEMIgear
|
SEMIgear |
Geneva |
in Plasma Processing Equipment
SEMIgear Geneva, 300mm, s/n: S16100101:RFL02 SemiGEAR Reflow Tool
|
1
|
|
|
N* |
East Fishkill, New York |
|
|
179021
|
Seren
|
Seren |
CEX-6 |
in Power Supplies
SEREN IPS COMMON EXCITER:Common Exciter - Part number 9500170000
|
2
|
|
|
|
Scotia, New York |
|
|
126554
|
Seren
|
Seren |
IPS-R300 |
in Power Supplies
SEREN RF GENERATOR POWER SUPPLY 300W 13.56 MHz:RF Generator
|
1
|
|
3,100.83 |
|
Scotia, New York |
|
|
179019
|
Seren
|
Seren |
R601 |
in Power Supplies
|
6
|
|
|
|
Scotia, New York |
|
|
240477
|
SOLVISION
|
SOLVISION |
PRECIS 3D |
in Plasma Processing Equipment
SOLVISION, PRECIS 3D, s/n: C1W010150609:SOLVISION, PRECIS 3D, s/n: C1W010150609
|
1
|
|
|
F* |
Dresden, Saxony |
|
|
231656
|
SPI Supplies
|
SPI Supplies |
Plasma Prep III |
in Plasma Resist Strippers
SPI BENCHTOP PLASMA ETCHER 100 WATT:Solid State Plasma Etcher/Asher
|
1
|
|
6,501.74 |
|
Scotia, New York |
|
|
84296
|
Surface Tech Sys
|
Surface Tech Sys |
308 PC |
in Plasma Etch Equipment
STS SURFACE TECHNOLOGY SYSTEMS BARREL PLASA ETCHER 600 WATT:Barrel Plasma Etcher
|
1
|
|
|
|
Scotia, NY |
|
|
147500
|
Surface Tech Sys
|
Surface Tech Sys |
MXP Multiplex ICP HR |
in Single Chamber Plasma Tools
SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:Chlorine Etcher - Year 2003
|
1
|
|
|
|
Scotia, New York |
|
|
102178
|
Surface Tech Sys
|
Surface Tech Sys |
MXP Multiplex ICP ASE HR |
in Single Chamber Plasma Tools
SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:Silicon Etcher - Year 2003
|
1
|
|
|
|
Scotia, New York |
|
|
184779
|
Technics
|
Technics |
Micro Stripper -- Series 200 |
in Single Chamber Plasma Tools
TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:Technics Micro Stripper Series 200 Plasma System
|
1
|
|
|
F* |
Scotia, New York |
|
|
245287
|
Tokyo Electron Limit
|
Tokyo Electron Limit |
TE8500 |
in Plasma Processing Equipment
TEL, TE8500, 200mm. S/N K85500:TEL, TE8500, 200mm. S/N K85500
|
1
|
|
|
|
Singapore |
|
|
181401
|
Tepla
|
Tepla |
4011 |
in Plasma Etch Equipment
TEPLA PLASMA ETCHER 4000 WATT:Planar Plasma Etcher
|
1
|
|
|
F* |
Scotia, New York |
|
|
119294
|
Trion Technology
|
Trion Technology |
Oracle |
in Cluster Plasma Tools
TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:Dielectric Cluster Tool
Trion Technology Oracle
|
1
|
|
|
F* |
Scotia, New York |
|
|
126704
|
Ulvac
|
Ulvac |
NE 7800 Ferroelectric Etcher |
in Cluster Plasma Tools
ULVAC FERROELECTRIC ETCHER:Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application
The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field). The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications. Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.
|
1
|
|
|
F* |
Scotia, New York |
|
|
214757
|
Applied Materials
|
Applied Materials |
FI20132 0040-36436 |
in Plasma Processing Equipment
Waveguide Elbow with mounting bolts / springs:- WR284 90-degree, Waveguide Elbow with Mounts.
- Only one unit on-hand. Please inquire for details, photos, etc
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
202813
|
Applied Materials
|
Applied Materials |
0190-00362 |
in Plasma Processing Equipment
WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :- Microwave waveguide elbow with black painted orange peel finish.
- WR284 rectangular waveguide with rectangular flanges.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
202812
|
Applied Materials
|
Applied Materials |
0190-00363 |
in Plasma Processing Equipment
WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:- Microwave waveguide elbow with black painted orange peel finish.
- Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
197422
|
Waveline
|
Waveline |
225-01 |
in Plasma Processing Equipment
Waveline Water-cooled 3-way Circulator :- Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
- 3kW CW rating.
- Ceramic magnets look fine.
- UG-584/U round-flange connections.
- Photos provided upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
215283
|
WR430 to WR340 Rectangular Waveguide Adaptor
|
WR430 to WR340 Rectangular Waveguide Adaptor |
in Plasma Processing Equipment
WR430 to WR340 Rectangular Waveguide Adaptor:- Aluminum microwave waveguide transition painted with black "orangepeel" finish.
- Photos can be provided upon request.
|
1
|
|
|
|
Leominster, Massachusetts |
|
|
124316
|
Yield Engineerng Sys
|
Yield Engineerng Sys |
CV100PZ |
in Plasma Processing Equipment
YIELD ENGINEERING DOWNSTREAM MICROWAVE PLASMA RESIST STRIPPER:Plasma Resist Stripper Cassette to Cassette or Manual Operation
Yield Engineering YES-CV100PZ
|
1
|
|
|
|
Scotia, New York |
|
|
170454
|
National Electronics
|
National Electronics |
YJ1191-A, YJ-1191A, YJ 1191A |
in Power Supplies
YJ1191A 6kW magnetron tube:- Choose from a new YJ1191-A unit with full microwave power output or a used, lower output unit depending on your budget and application needs.
- Test results can be provided upon request prior to purchase.
|
1
|
|
|
|
Leominster, Massachusetts |
|
Displaying 101-142 of 142 Page 1 2 |