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Plasma Etch Equipment


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Group Offers into sub-categories under Plasma Etch EquipmentGroup Offers into sub-categories under Plasma Etch Equipment

List all 13 product types under Plasma Etch EquipmentList all 13 product types under Plasma Etch Equipment


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     Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
    Make Model
      $  
    187746

    Applied Materials  

    AMAT Enabler chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    2 Dresden, Saxony
    2x AMAT Enabler chamber

    ETC380-02-B und ETC380-05-D
    AMAT Enabler chamber manufactured 12/2002 und 03/2007

    187744

    Applied Materials  

    AMAT Axiom strip chamber  

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT Axiom strip chamber
    AMAT Axiom strip chamber
    187742

    Applied Materials  

    AMAT Centura Rev.4 for 12 " 

    List all items of this typeCluster Plasma Tools - Silicon

    in Cluster Plasma Tools

    1 F* Regensburg, BY
    AMAT Centura Rev.4
    AMAT Centura Rev.4
    Serial Number: 40 99 39 


    AMAT Centura Rev.4 
    Serial Number: 40 99 39 
    Equipment Code: ETC320-05
    AMAT Centura Rev.4;
    300mm AMAT Centura Rev.4;
    with 2 Load Locks and 2 Load Ports
    187743

    Applied Materials  

    AMAT eMax CT chamber  

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT eMax CT chamber
    AMAT eMax CT chamber
    187745

    Applied Materials  

    AMAT eMax CT plus chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT eMax CT plus chamber
    AMAT eMax CT plus chamber manufactured 12/2002
    187747

    Applied Materials  

    AMAT eMax CT plus chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT eMax CT plus chamber
    AMAT eMax CT plus chamber manufactured 12/2002
    87948

    Applied Materials  

    8300 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    APPLIED MATERIALS CONTROLLER
    Controller
    87949

    Applied Materials  

    8300 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    APPLIED MATERIALS SYSTEM ELECTRONICS RACK
    System Electronics Rack
    114961

    Advanced Plasma Syst  

    B Series-4 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 F* Scotia, NY
    APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM.
    Plasma Treatment System
    Desmear/Etchback


    Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson.
    Both companies merged and are an entity of Nordson - now called Nordson MARCH.
    91265

    PlasmaQuest  

    357 ECR 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    ASTEX PLASMAQUEST ECR PLASMA ETCHER
    ECR Plasma Etcher

    Nexx Systems LLC. has acquired PlasmaQuest
    189241

    Branson/IPC  

    7102 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 22,000.00 F*N* Scotia, New York
    BRANSON TEPLA PVA PLASMA ETCHER 1000 WATT
    Plasma Etcher
    33250

    Drytek  

    384T 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Plano, TX
    Drytek 384T
    Plasma Metal Etcher
    191093

    LAM  

    4520i 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 N* Villach, Carinthia
    Lam Rainbow 4520i
    Standalone single wafer oxide etch system
    Isotopic chamber
    Envision Software
    Gases Main Chamber => CF4,CHF3,Ar,He,O2,N2
    Gases ISO Chamber => NF3,O2,N2
    90316

    LAM Research Corp.  

    4420 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    2 F* Scotia, NY
    LAM RESEARCH 8" POLYSILICON ETCH TOOL
    8" Polysilicon Etch Tool
    34890

    LAM Research Co  

    490 AUTO ETCH 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    1 Scotia, New York
    LAM RESEARCH SIX INCH NITRIDE ETCHER
    Six Inch Nitride Etcher

    Automated Cassette to Cassette single wafer etching.
    4901

    LFE Corp  

    PDS-504 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 Plano, TX
    LFE PDS-504
    Plasma Barrel Etcher
    108528

    March Instruments  

    PM-600 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 Scotia, New York
    MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT
    Barrel Plasma Etcher with Vacuum Pump
    March Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH.
    181705

    March Instruments  

    Jupiter III 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    MARCH INSTRUMENTS REACTIVE ION ETCHER
    Table Top Reactive Ion Etch System

    March Jupiter 3
    177136

    March Instruments  

    PX-2400 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 F* Scotia, NY
    MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz
    Box Plasma Etcher

    Applications
    "Gas plasma treatment provides a fast, efficient method for
    surface treatment and cleaning prior to wire bonding, die
    attach, encapsulation, conformal coating and other processes.
    Plasma processing enhances lamination bondstrength, improves
    wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

    187749

    March Instruments  

    PX-1000 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 F* Scotia, NY
    MARCH NORDSON BOX PLASMA ETCHER 600 WATT 13.56 MHz
    Box Plasma Etcher

    Applications
    "Gas plasma treatment provides a fast, efficient method for
    surface treatment and cleaning prior to wire bonding, die
    attach, encapsulation, conformal coating and other processes.
    Plasma processing enhances lamination bondstrength, improves
    wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

    93394

    Oxford Instruments  

    Plasmalab 80 Plus 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    OXFORD INSTRUMENTS REACTIVE ION ETCH SYSTEM 200MM
    Reactive Ion Etch System
    55400

    Plasma-Therm  

    WAF'R BATCH 74 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Plano, TX
    PLASMA THERM WAF'R BATCH 74
    Parrell Plasma Etcher
    1220

    Plasma-finish  

    V15G 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 Scotia, New York
    PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT

    Plasma Box Etcher System

    PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish
    11919

    Plasma-Therm  

    VII 734MF 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM
    Plasmatherm RIE/Plasma Etch System
    3011

    Plasma-Therm  

    Wafer Batch 740/740 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM
    Dual Plasma Etch and Reactive
    Ion Etch Processing Systems


    System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

    4054

    Plasma-Therm  

    73/74 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM
    Combination PECVD and Dual
    Plasma Etch/Reactive Ion Etch
    Processing Systems
    50854

    Plasma-Therm  

    VII 734 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE
    Combination Plasma Deposition System/RIE
    165893

    PlasmaQuest  

    6" Load-Lock 

    List all items of this typeSilicon Etchers

    in Single Chamber Plasma Tools

    1 F* Sterling, MA
    PlasmaQuest Microwave-ECR Plasma etch system
    • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
    • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancment of microwave plasma.
    • ECR operation in mTorr pressure range yields large area plasma processing capabilty for planar and low profile parts.
    • Currently equipped with 1000W Astex microwave delivery system (AX2110 or equivalent).
    • Configured with 2 modules including power & controls rack and vacuum module.
    • System to be rebuilt to meet specific customer for needs for etch and/or PECVD processing.
    • Computer controller may function, but upgrade likely to be best option.
    45428

    Plasma-Therm  

    790 ICP 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMATHERM ICP PLASMA ETCHER
    Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
    124315

    Plasma-Therm  

    790 11" RIE 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMATHERM REACTIVE ION ETCH SYSTEM 11"
    Reactive Ion Etch System - 11" Electrode
    45430

    Plasma-Therm  

    790 11 RIE 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM
    Reactive Ion Etch System
    11" Electrode
    Year 1998
    142821

    Plasma-Therm  

    Unaxis 790 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM
    Shuttle Load Lock System
    64739

    STS Systems  

    320PC 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Plano, TX
    STS 320PC RIE Etcher
    Reactive Ion Etch System
    84296

    Surface Tech Sys  

    308 PC 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 Scotia, NY
    STS SURFACE TECHNOLOGY SYSTEMS BARREL PLASA ETCHER 600 WATT
    Barrel Plasma Etcher
    147500

    Surface Tech Sys  

    MXP Multiplex ICP HR 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Scotia, NY
    SURFACE TECHNOLOGY SYSTEMS MXP ICP HR
    Chlorine Etcher - Year 2003
    102178

    Surface Tech Sys  

    MXP Multiplex ICP ASE HR 

    List all items of this typeSilicon Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER
    Silicon Etcher - Year 2003
    184779

    Technics  

    Micro Stripper -- Series 200 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz
    Technics Micro Stripper Series 200 Plasma System

    23991

    Tegal  

    411 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 Plano, TX
    Tegal 411
    Plasma Barrel Stripper
    88338

    Tegal  

    211 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    2 F* Scotia, New York
    TEGAL PLASMA ETCHER 300 WATT
    Plasma Etcher
    137536

    Tokyo Electron Ltd  

    TEL Certas WING for 12" / 300 mm 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 F* Regensburg, BY
    TEL Certas WING
    TEL Certas WING
    300mm TEL Certas WING mainframe with 3 load ports
    Equipment Code: ETC380-41


    300mm TEL Certas WING mainframe with 3 load ports
    Serial Number: WM0002
    181401

    Tepla  

    4011 

    List all items of this typeBarrel/Box Plasma Etchers

    in Plasma Etch Equipment

    1 F* Scotia, NY
    TEPLA PLASMA ETCHER 4000 WATT
    Planar Plasma Etcher
    28517

    Trion Technology  

    Minilock 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Plano, TX
    Trion Minilock RIE Plasma Etcher
    RIE Single Wafer Plasma Metal Etcher
    119294

    Trion Technology  

    Oracle 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 F* Scotia, NY
    TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL
    Dielectric Cluster Tool


    Trion Technology Oracle
    126704

    Ulvac  

    NE 7800 Ferroelectric Etcher 

    List all items of this typeCluster Plasma Tools - Metal

    in Cluster Plasma Tools

    1 F* Scotia, NY
    ULVAC FERROELECTRIC ETCHER
    Like New Condition
    System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


    The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
    The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
    Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.



    *   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Plasma Etch Equipment:
    Advanced Plasma System, Inc., Applied Materials, Inc., Branson/IPC, Drytek, LAM, LAM Research Corp., LFE Corp, March Instruments, Oxford Instruments, Plasma-finish Enterprise, Plasma-Therm, PlasmaQuest, STS Systems, Surface Technology Systems, Technics, Tegal, Tepla, Tokyo Electronics Limited, Trion Technology, Ulvac