How to post on WWX
Latest Listings!
 Fast¬†¬†FIND      full search   tips    
in  ALL  ONLY Parallel Pl Tools
Serving  Our Guest Log in    RegisterHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Semiconductor Mfg   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   View   Search-by-Specs    Input    Edit    
View All Offers Under

Parallel Plasma Tools


» Switch Major Category
Click an item's ID# below for its full specifications and source, or:

Group Offers into sub-categories under Parallel Plasma ToolsGroup Offers into sub-categories under Parallel Plasma Tools

List all 12 product types under Parallel Plasma ToolsList all 12 product types under Parallel Plasma Tools


  • To sort on a column, click the column head; click it again to reverse the sort.
  • Click the links under the Product Type column head to see other like items of that type.
  •  
     Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
    Make Model
      $  
    Offer 187744

    Applied Materials  

    AMAT Axiom strip chamber  

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Regensburg, BY
    AMAT Axiom strip chamber
    AMAT Axiom strip chamber
    Offer 137484

    Applied Materials  

    AMAT Centura Rev.4 for 12 " / 300 mm 

    List all items of this typeCluster Plasma Tools - Silicon

    in Cluster Plasma Tools

    1 F* Regensburg, Bavaria
    AMAT Centura Rev.4
    AMAT Centura Rev.4
    Serial Number: 32 13 90


    AMAT Centura Rev.4
    Serial Number: 32 13 90
    Equipment Code: ETC320-01
    AMAT Centura Rev.4;
    300mm AMAT Centura Rev.4;
    with 2 Load Locks and 2 Load Ports

    LOCATION: unspecified
    Offer 187742

    Applied Materials  

    AMAT Centura Rev.4 for 12 " 

    List all items of this typeCluster Plasma Tools - Silicon

    in Cluster Plasma Tools

    1 F* Regensburg, BY
    AMAT Centura Rev.4
    AMAT Centura Rev.4
    Serial Number: 40 99 39 


    AMAT Centura Rev.4 
    Serial Number: 40 99 39 
    Equipment Code: ETC320-05
    AMAT Centura Rev.4;
    300mm AMAT Centura Rev.4;
    with 2 Load Locks and 2 Load Ports
    Offer 187743

    Applied Materials  

    AMAT eMax CT chamber  

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Regensburg, BY
    AMAT eMax CT chamber
    AMAT eMax CT chamber
    Offer 187747

    Applied Materials  

    AMAT eMax CT plus chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Regensburg, BY
    AMAT eMax CT plus chamber
    AMAT eMax CT plus chamber manufactured 2005
    Offer 187745

    Applied Materials  

    AMAT eMax CT3 chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Regensburg, BY
    AMAT eMax CT3 chamber
    AMAT eMax CT3 chamber manufactured 2007
    Offer 187746

    Applied Materials  

    AMAT Enabler chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    2 Regensburg, BY
    AMAT Enabler chamber
    AMAT Enabler chamber manufactured 2007
    Offer 87948

    Applied Materials  

    8300 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    APPLIED MATERIALS CONTROLLER
    Controller
    Offer 87949

    Applied Materials  

    8300 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    APPLIED MATERIALS SYSTEM ELECTRONICS RACK
    System Electronics Rack
    Offer 91265

    PlasmaQuest  

    357 ECR 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    ASTEX PLASMAQUEST ECR PLASMA ETCHER
    ECR Plasma Etcher

    Nexx Systems LLC. has acquired PlasmaQuest
    Offer 33250

    Drytek  

    384T 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Plano, TX
    Drytek 384T
    Plasma Metal Etcher
    Offer 191093

    LAM  

    4520i 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 N* Villach, Carinthia
    Lam Rainbow 4520i
    Standalone single wafer oxide etch system
    Isotopic chamber
    Envision Software
    Gases Main Chamber => CF4,CHF3,Ar,He,O2,N2
    Gases ISO Chamber => NF3,O2,N2
    Offer 90316

    LAM Research Corp.  

    4420 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    2 F* Scotia, NY
    LAM RESEARCH 8" POLYSILICON ETCH TOOL
    8" Polysilicon Etch Tool
    Offer 34890

    LAM Research Co  

    490 AUTO ETCH 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    1 Scotia, New York
    LAM RESEARCH SIX INCH NITRIDE ETCHER
    Six Inch Nitride Etcher

    Automated Cassette to Cassette single wafer etching.
    Offer 181705

    March Instruments  

    Jupiter III 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    MARCH INSTRUMENTS REACTIVE ION ETCHER
    Table Top Reactive Ion Etch System

    March Jupiter 3
    Offer 93394

    Oxford Instruments  

    Plasmalab 80 Plus 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    OXFORD INSTRUMENTS REACTIVE ION ETCH SYSTEM 200MM
    Reactive Ion Etch System
    Offer 55400

    Plasma-Therm  

    WAF'R BATCH 74 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Plano, TX
    PLASMA THERM WAF'R BATCH 74
    Parrell Plasma Etcher
    Offer 11919

    Plasma-Therm  

    VII 734MF 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM
    Plasmatherm RIE/Plasma Etch System
    Offer 3011

    Plasma-Therm  

    Wafer Batch 740/740 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM
    Dual Plasma Etch and Reactive
    Ion Etch Processing Systems


    System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

    Offer 4054

    Plasma-Therm  

    73/74 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM
    Combination PECVD and Dual
    Plasma Etch/Reactive Ion Etch
    Processing Systems
    Offer 50854

    Plasma-Therm  

    VII 734 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE
    Combination Plasma Deposition System/RIE
    Offer 165893

    PlasmaQuest  

    6" Load-Lock 

    List all items of this typeSilicon Etchers

    in Single Chamber Plasma Tools

    1 F* Sterling, MA
    PlasmaQuest Microwave-ECR Plasma etch system
    • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
    • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancment of microwave plasma.
    • ECR operation in mTorr pressure range yields large area plasma processing capabilty for planar and low profile parts.
    • Currently equipped with 1000W Astex microwave delivery system (AX2110 or equivalent).
    • Configured with 2 modules including power & controls rack and vacuum module.
    • System to be rebuilt to meet specific customer for needs for etch and/or PECVD processing.
    • Computer controller may function, but upgrade likely to be best option.
    Offer 45428

    Plasma-Therm  

    790 ICP 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMATHERM ICP PLASMA ETCHER
    Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
    Offer 124315

    Plasma-Therm  

    790 11" RIE 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMATHERM REACTIVE ION ETCH SYSTEM 11"
    Reactive Ion Etch System - 11" Electrode
    Offer 45430

    Plasma-Therm  

    790 11 RIE 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM
    Reactive Ion Etch System
    11" Electrode
    Year 1998
    Offer 142821

    Plasma-Therm  

    Unaxis 790 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM
    Shuttle Load Lock System
    Offer 64739

    STS Systems  

    320PC 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Plano, TX
    STS 320PC RIE Etcher
    Reactive Ion Etch System
    Offer 147500

    Surface Tech Sys  

    MXP Multiplex ICP HR 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Scotia, NY
    SURFACE TECHNOLOGY SYSTEMS MXP ICP HR
    Chlorine Etcher - Year 2003
    Offer 102178

    Surface Tech Sys  

    MXP Multiplex ICP ASE HR 

    List all items of this typeSilicon Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER
    Silicon Etcher - Year 2003
    Offer 184779

    Technics  

    Micro Stripper -- Series 200 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz
    Technics Micro Stripper Series 200 Plasma System

    Offer 137536

    Tokyo Electron Ltd  

    TEL Certas WING for 12" / 300 mm 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 F* Regensburg, BY
    TEL Certas WING
    TEL Certas WING
    300mm TEL Certas WING mainframe with 3 load ports
    Equipment Code: ETC380-41


    300mm TEL Certas WING mainframe with 3 load ports
    Serial Number: WM0002
    Offer 28517

    Trion Technology  

    Minilock 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Plano, TX
    Trion Minilock RIE Plasma Etcher
    RIE Single Wafer Plasma Metal Etcher
    Offer 119294

    Trion Technology  

    Oracle 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 F* Scotia, NY
    TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL
    Dielectric Cluster Tool


    Trion Technology Oracle
    Offer 126704

    Ulvac  

    NE 7800 Ferroelectric Etcher 

    List all items of this typeCluster Plasma Tools - Metal

    in Cluster Plasma Tools

    1 F* Scotia, NY
    ULVAC FERROELECTRIC ETCHER
    Like New Condition
    System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


    The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
    The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
    Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.



    *   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Parallel Plasma Tools:
    Applied Materials, Inc., Drytek, LAM, LAM Research Corp., March Instruments, Oxford Instruments, Plasma-Therm, PlasmaQuest, STS Systems, Surface Technology Systems, Technics, Tokyo Electronics Limited, Trion Technology, Ulvac