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Group Offers into sub-categories under Single Chamber Plasma ToolsGroup Offers into sub-categories under Single Chamber Plasma Tools

List all 6 product types under Single Chamber Plasma ToolsList all 6 product types under Single Chamber Plasma Tools


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
87948
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
APPLIED MATERIALS CONTROLLER:
Controller
87949
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
APPLIED MATERIALS SYSTEM ELECTRONICS RACK:
System Electronics Rack
91265
PlasmaQuest  

PlasmaQuest  

357 ECR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   F* Scotia, NY
ASTEX PLASMAQUEST ECR PLASMA ETCHER:
ECR Plasma Etcher

Nexx Systems LLC. has acquired PlasmaQuest
33250
Drytek  

Drytek  

384T 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Plano, TX
Drytek 384T:
Plasma Metal Etcher
90316
LAM Research Corp.  

LAM Research Corp.  

4420 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

2   F* Scotia, NY
LAM RESEARCH 8" POLYSILICON ETCH TOOL :
8" Polysilicon Etch Tool
34890
LAM Research Co  

LAM Research Co  

490 AUTO ETCH 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

1   Scotia, New York
LAM RESEARCH SIX INCH NITRIDE ETCHER:
Six Inch Nitride Etcher

Automated Cassette to Cassette single wafer etching.
181705
March Instruments  

March Instruments  

Jupiter III 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
MARCH INSTRUMENTS REACTIVE ION ETCHER:
Table Top Reactive Ion Etch System

March Jupiter 3
93394
Oxford Instruments  

Oxford Instruments  

Plasmalab 80 Plus 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
OXFORD INSTRUMENTS REACTIVE ION ETCH SYSTEM 200MM:
Reactive Ion Etch System
55400
Plasma-Therm  

Plasma-Therm  

WAF'R BATCH 74 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   Plano, TX
PLASMA THERM WAF'R BATCH 74:
Parrell Plasma Etcher
11919
Plasma-Therm  

Plasma-Therm  

VII 734MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:
Plasmatherm RIE/Plasma Etch System
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:
Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

4054
Plasma-Therm  

Plasma-Therm  

73/74 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:
Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems
50854
Plasma-Therm  

Plasma-Therm  

VII 734 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:
Combination Plasma Deposition System/RIE
165893
PlasmaQuest  

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

1   F* Sterling, MA
PlasmaQuest Microwave-ECR Plasma etch system:
  • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancment of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capabilty for planar and low profile parts.
  • Currently equipped with 1000W Astex microwave delivery system (AX2110 or equivalent).
  • Configured with 2 modules including power & controls rack and vacuum module.
  • System to be rebuilt to meet specific customer for needs for etch and/or PECVD processing.
  • Computer controller may function, but upgrade likely to be best option.
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
PLASMATHERM ICP PLASMA ETCHER:
Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
124315
Plasma-Therm  

Plasma-Therm  

790 11" RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
PLASMATHERM REACTIVE ION ETCH SYSTEM 11":
Reactive Ion Etch System - 11" Electrode
45430
Plasma-Therm  

Plasma-Therm  

790 11 RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:
Reactive Ion Etch System
11" Electrode
Year 1998
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   Scotia, NY
PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:
Shuttle Load Lock System
64739
STS Systems  

STS Systems  

320PC 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Plano, TX
STS 320PC RIE Etcher:
Reactive Ion Etch System
147500
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP HR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

1   Scotia, NY
SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:
Chlorine Etcher - Year 2003
102178
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP ASE HR 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

1   Scotia, NY
SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:
Silicon Etcher - Year 2003
184779
Technics  

Technics  

Micro Stripper -- Series 200 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Scotia, NY
TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:
Technics Micro Stripper Series 200 Plasma System

28517
Trion Technology  

Trion Technology  

Minilock 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   F* Plano, TX
Trion Minilock RIE Plasma Etcher:
RIE Single Wafer Plasma Metal Etcher


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Single Chamber Plasma Tools:
Applied Materials, Inc., Drytek, LAM Research Corp., March Instruments, Oxford Instruments, Plasma-Therm, PlasmaQuest, STS Systems, Surface Technology Systems, Technics, Trion Technology