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Group Offers into sub-categories under Single Chamber Plasma ToolsGroup Offers into sub-categories under Single Chamber Plasma Tools

List all 6 product types under Single Chamber Plasma ToolsList all 6 product types under Single Chamber Plasma Tools


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     Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
    Make Model
      $  
    87948

    Applied Materials  

    8300 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    APPLIED MATERIALS CONTROLLER
    Controller
    87949

    Applied Materials  

    8300 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    APPLIED MATERIALS SYSTEM ELECTRONICS RACK
    System Electronics Rack
    91265

    PlasmaQuest  

    357 ECR 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    ASTEX PLASMAQUEST ECR PLASMA ETCHER
    ECR Plasma Etcher

    Nexx Systems LLC. has acquired PlasmaQuest
    33250

    Drytek  

    384T 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Plano, TX
    Drytek 384T
    Plasma Metal Etcher
    191093

    LAM  

    4520i 

    List all items of this typeOxide Etchers

    in Single Chamber Plasma Tools

    1 N* Villach, Carinthia
    Lam Rainbow 4520i
    Standalone single wafer oxide etch system
    Isotopic chamber
    Envision Software
    Gases Main Chamber => CF4,CHF3,Ar,He,O2,N2
    Gases ISO Chamber => NF3,O2,N2
    90316

    LAM Research Corp.  

    4420 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    2 F* Scotia, NY
    LAM RESEARCH 8" POLYSILICON ETCH TOOL
    8" Polysilicon Etch Tool
    34890

    LAM Research Co  

    490 AUTO ETCH 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    1 Scotia, New York
    LAM RESEARCH SIX INCH NITRIDE ETCHER
    Six Inch Nitride Etcher

    Automated Cassette to Cassette single wafer etching.
    181705

    March Instruments  

    Jupiter III 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    MARCH INSTRUMENTS REACTIVE ION ETCHER
    Table Top Reactive Ion Etch System

    March Jupiter 3
    93394

    Oxford Instruments  

    Plasmalab 80 Plus 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    OXFORD INSTRUMENTS REACTIVE ION ETCH SYSTEM 200MM
    Reactive Ion Etch System
    55400

    Plasma-Therm  

    WAF'R BATCH 74 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Plano, TX
    PLASMA THERM WAF'R BATCH 74
    Parrell Plasma Etcher
    11919

    Plasma-Therm  

    VII 734MF 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM
    Plasmatherm RIE/Plasma Etch System
    3011

    Plasma-Therm  

    Wafer Batch 740/740 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM
    Dual Plasma Etch and Reactive
    Ion Etch Processing Systems


    System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

    4054

    Plasma-Therm  

    73/74 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM
    Combination PECVD and Dual
    Plasma Etch/Reactive Ion Etch
    Processing Systems
    50854

    Plasma-Therm  

    VII 734 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE
    Combination Plasma Deposition System/RIE
    165893

    PlasmaQuest  

    6" Load-Lock 

    List all items of this typeSilicon Etchers

    in Single Chamber Plasma Tools

    1 F* Sterling, MA
    PlasmaQuest Microwave-ECR Plasma etch system
    • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
    • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancment of microwave plasma.
    • ECR operation in mTorr pressure range yields large area plasma processing capabilty for planar and low profile parts.
    • Currently equipped with 1000W Astex microwave delivery system (AX2110 or equivalent).
    • Configured with 2 modules including power & controls rack and vacuum module.
    • System to be rebuilt to meet specific customer for needs for etch and/or PECVD processing.
    • Computer controller may function, but upgrade likely to be best option.
    45428

    Plasma-Therm  

    790 ICP 

    List all items of this typePoly/Nitride Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMATHERM ICP PLASMA ETCHER
    Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
    124315

    Plasma-Therm  

    790 11" RIE 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    PLASMATHERM REACTIVE ION ETCH SYSTEM 11"
    Reactive Ion Etch System - 11" Electrode
    45430

    Plasma-Therm  

    790 11 RIE 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM
    Reactive Ion Etch System
    11" Electrode
    Year 1998
    142821

    Plasma-Therm  

    Unaxis 790 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Scotia, NY
    PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM
    Shuttle Load Lock System
    64739

    STS Systems  

    320PC 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Plano, TX
    STS 320PC RIE Etcher
    Reactive Ion Etch System
    147500

    Surface Tech Sys  

    MXP Multiplex ICP HR 

    List all items of this typeEtchers - Other

    in Single Chamber Plasma Tools

    1 Scotia, NY
    SURFACE TECHNOLOGY SYSTEMS MXP ICP HR
    Chlorine Etcher - Year 2003
    102178

    Surface Tech Sys  

    MXP Multiplex ICP ASE HR 

    List all items of this typeSilicon Etchers

    in Single Chamber Plasma Tools

    1 Scotia, NY
    SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER
    Silicon Etcher - Year 2003
    184779

    Technics  

    Micro Stripper -- Series 200 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Scotia, NY
    TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz
    Technics Micro Stripper Series 200 Plasma System

    28517

    Trion Technology  

    Minilock 

    List all items of this typeMetal Etchers

    in Single Chamber Plasma Tools

    1 F* Plano, TX
    Trion Minilock RIE Plasma Etcher
    RIE Single Wafer Plasma Metal Etcher


    *   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Single Chamber Plasma Tools:
    Applied Materials, Inc., Drytek, LAM, LAM Research Corp., March Instruments, Oxford Instruments, Plasma-Therm, PlasmaQuest, STS Systems, Surface Technology Systems, Technics, Trion Technology