How to post on WWX
Latest Listings!
 Fast¬†¬†FIND      full search   tips    
in  ALL  ONLY Cluster Plasma Tools
Serving  Our Guest Log in    RegisterHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Semiconductor Mfg   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   View   Search-by-Specs    Input    Edit    
View All Offers Under

Cluster Plasma Tools


» Switch Major Category
Click an item's ID# below for its full specifications and source, or:

Group Offers into sub-categories under Cluster Plasma ToolsGroup Offers into sub-categories under Cluster Plasma Tools

List all 6 product types under Cluster Plasma ToolsList all 6 product types under Cluster Plasma Tools


  • To sort on a column, click the column head; click it again to reverse the sort.
  • Click the links under the Product Type column head to see other like items of that type.
  •  
     Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
    Make Model
      $  
    187746

    Applied Materials  

    AMAT Enabler chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    2 Dresden, Saxony
    2x AMAT Enabler chamber

    ETC380-02-B und ETC380-05-D
    AMAT Enabler chamber manufactured 12/2002 und 03/2007

    187744

    Applied Materials  

    AMAT Axiom strip chamber  

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT Axiom strip chamber
    AMAT Axiom strip chamber
    187742

    Applied Materials  

    AMAT Centura Rev.4 for 12 " 

    List all items of this typeCluster Plasma Tools - Silicon

    in Cluster Plasma Tools

    1 F* Regensburg, BY
    AMAT Centura Rev.4
    AMAT Centura Rev.4
    Serial Number: 40 99 39 


    AMAT Centura Rev.4 
    Serial Number: 40 99 39 
    Equipment Code: ETC320-05
    AMAT Centura Rev.4;
    300mm AMAT Centura Rev.4;
    with 2 Load Locks and 2 Load Ports
    137484

    Applied Materials  

    AMAT Centura Rev.4 for 12 " / 300 mm 

    List all items of this typeCluster Plasma Tools - Silicon

    in Cluster Plasma Tools

    1 F* Regensburg, Bavaria
    AMAT Centura Rev.4
    AMAT Centura Rev.4
    Serial Number: 32 13 90


    AMAT Centura Rev.4
    Serial Number: 32 13 90
    Equipment Code: ETC320-01
    AMAT Centura Rev.4;
    300mm AMAT Centura Rev.4;
    with 2 Load Locks and 2 Load Ports

    LOCATION: unspecified
    187743

    Applied Materials  

    AMAT eMax CT chamber  

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT eMax CT chamber
    AMAT eMax CT chamber
    187745

    Applied Materials  

    AMAT eMax CT plus chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT eMax CT plus chamber
    AMAT eMax CT plus chamber manufactured 12/2002
    187747

    Applied Materials  

    AMAT eMax CT plus chamber 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 Dresden, Saxony
    AMAT eMax CT plus chamber
    AMAT eMax CT plus chamber manufactured 12/2002
    137536

    Tokyo Electron Ltd  

    TEL Certas WING for 12" / 300 mm 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 F* Regensburg, BY
    TEL Certas WING
    TEL Certas WING
    300mm TEL Certas WING mainframe with 3 load ports
    Equipment Code: ETC380-41


    300mm TEL Certas WING mainframe with 3 load ports
    Serial Number: WM0002
    119294

    Trion Technology  

    Oracle 

    List all items of this typeCluster Plasma Tools - Oxide

    in Cluster Plasma Tools

    1 F* Scotia, NY
    TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL
    Dielectric Cluster Tool


    Trion Technology Oracle
    126704

    Ulvac  

    NE 7800 Ferroelectric Etcher 

    List all items of this typeCluster Plasma Tools - Metal

    in Cluster Plasma Tools

    1 F* Scotia, NY
    ULVAC FERROELECTRIC ETCHER
    Like New Condition
    System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


    The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
    The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
    Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.



    *   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Cluster Plasma Tools:
    Applied Materials, Inc., Tokyo Electronics Limited, Trion Technology, Ulvac