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Item ID  Photo Short Description Product Type / Details # Price Notes Location Make Model   $   247845 KLA-Tencor   KLA-Tencor   Auto RS-55tc  4 & 6 Point Probes in Resistivity Testers KLA-Tencor Auto RS-55tc Resistivity Test Tool: KLA-TENCOR Auto RS-55tc Resistivity Mapping System Accommodates all Wafer Sizes from 50mm – 200mm 5 Megaohm/sq Measurement Range Typical Measurement Time: 5 – 4.5 Seconds per Test Site <0.2% (1 sigma) Measurement Repeatability Thermal Chuck Temperature Measurement Accuracy: ±0.5ºC PC Based System Controller 25 MHz 486 Based MPU 44 MB Removable Hard Disk 110 MB Fixed Hard Disk Drive 5” Floppy Disk Drive X-Y Map: Up to 1200 Sites Programmable Probe Qualification: 20 sites 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included) 1 80,021.44 N* Austin, Texas 247844 KLA-Tencor   KLA-Tencor   RS-55tc  4 & 6 Point Probes in Resistivity Testers KLA-Tencor RS-55tc Resistivity Test Tool: KLA-Tencor RS-55tc Resistivity Test Tool Accommodates all Wafer Sizes from 50mm – 200mm Sheet Resistance Measurement of 5 mohm/sq to 5 Mohm/sq Typical Measurement Time: 5 – 4.5 Seconds per Test Site <0.2% (1 sigma) Measurement Repeatability X-Y Map: Programmable Up to 1200 Sites Probe Qualification: 20 sites 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included) PC Based System Controller with Color Monitor 1 35,009.38 N* Austin, Texas

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

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Items from the following manufacturers are offered under Resistivity Testers: KLA-Tencor