ALL CATEGORIES

KLA-TENCOR Auto RS-55tc Resistivity Mapping System

• Accommodates all Wafer Sizes from 50mm – 200mm
• 5 Megaohm/sq Measurement Range
• Typical Measurement Time: 5 – 4.5 Seconds per Test Site
• <0.2% (1 sigma) Measurement Repeatability
• Thermal Chuck Temperature Measurement Accuracy: ±0.5ºC
• PC Based System Controller
• 25 MHz 486 Based MPU
• 44 MB Removable Hard Disk
• 110 MB Fixed Hard Disk Drive
• 5” Floppy Disk Drive
• X-Y Map: Up to 1200 Sites Programmable
• Probe Qualification: 20 sites
• 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)

KLA-Tencor UV-1050 Thin Film Measurement Tool

• Cassette to Cassette Wafer Handling
• Wafer sizes: 100mm, 150mm & 200mm
• Broadband UV Optics
• Dual Beam Spectrophotometry
• Applications: Polysilicon, UV Reflectivity & Simultaneous Oxide and TiN Thickness for CMP
• System Control PC with Windows NT OS
• Summit Application Software
• GEM / SECS Communication
• System Installation at Destination Included

Patterned Wafer Contamination Analyzer

• Detects defects as small as 0.15 µm, while defects below 0.2 µm can be detected on many process levels, including nitride, oxide, polysilicon and TEOS films
• Capable of measuring defects on unpatterned wafers
• Capable of measuring wafers from 4” to 8”
• High sensitivity on after-etch and high topography applications
• Circular input polarization enhances sensitivity and defect capture on post-CMP and other post-deposited layers

TENCOR Surfscan 4500 Unpatterned Wafer Surface Inspection Tool

• Cassette to Cassette Handling of 3” – 6” Wafers
• New HeNe 2mW Laser, 632.8 nm Wavelength
• New HeNe Laser Power Supply
• 2 µ Particle Size Sensitivity
• Automatic Calibration
• Flatscreen Monitor
• System Calibrated & Demonstrated
• Calibration Standard Wafer Included