Item ID: 124315

**1 Offered at Best Price**

PLASMATHERM REACTIVE ION ETCH SYSTEM 11"

Reactive Ion Etch System - 11" Electrode

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Location: Scotia, New York

Unit Price	Unstated
Number of Units	1
Manufacturer	Plasma-Therm
Model	790 11" RIE
Wafer Size Range
Minimum	50 mm
Maximum	200 mm
Process	Reactive Ion Etch System
Controller Type	PC Controller Type
High Vacuum Pump	Leybold 361C
Roughing Pump	D40BCS
RF Generator Model	RFPP 5S
Number of Gas Inputs	Four Gas
Process Gases	SF6, O2,CF4,Ar
Chillers
Number of Chillers	1
Accessories	(4)MKS Model 1160 MFCs, (3)100sccm,(1)50sccm 290 MKS ion gauge controller
Other Information	Chamber baseline pressure 5E-5 Torr or better Process Baratron 1 Torr, process pressure range 100-1000 mTorr Process Baratron can be changed to 100 mTorr, pressure range will be 10-100 mTorr Refurbishment to Include: Wet Clean of gas shower and chamber Service of throttle valve Replacement of viewing windows
Power Requirements	208 V 60 Hz 3 Phase
Year of Manufacture	1993
Exterior Dimensions
Width	24.000 in (61.0 cm)
Depth	40.000 in (101.6 cm)
Height	69.000 in (175.3 cm)
Weight	604 lb (274 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 124315

1 Offered at Best Price

PLASMATHERM REACTIVE ION ETCH SYSTEM 11"

**1 Offered at Best Price**