YIELD ENGINEERING SYSTEMS VACUUM BAKE DUAL CHEMICAL DEPOSITION
YES 5 Vacuum Bake Dual Chemical Deposition System
System utilizes two heated flasks with heated plumbing lines to the chamber. The heated lines ensure that condensation does not occur in the chemical depostion lines. After dehydration cycles a vacuum is drawn upon the main chamber. An isolation valve on one of the flasks is opened, drawing vapors from the flask to the inside of the main chamber where depostion occurs.