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Electron Beam Evaporators
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Vacuum System
Load Lock Included
E Beam Power Supply Power Supply Type
E Beam Power Supply High Voltage Minimum
E Beam Power Supply High Voltage Maximum
E Beam Power Supply Process Control Voltage Minimum
E Beam Power Supply Process Control Voltage Maximum
E Beam Power Supply Number of Guns Controlled
E Beam Power Supply Lateral/Longitudinal Beam Sweep
E Beam Power Supply Electron Source Type
E Beam Power Supply Crucible Size
RF Generator Manufacturer
RF Generator Model
RF Generator Rated Power Output
RF Generator Frequency
RF Generator Matching Network
Vacuum System
Gas Inputs
Gas Input Control
Substrate Heaters
Film Thickness Monitor
Residual Gas Analyzer
Other Information
Extended Description
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
CE Marked
Year of Manufacture
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height