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 Etchers - Other  in Single Chamber Plasma Tools  (4)

 Metal Etchers  in Single Chamber Plasma Tools  (8)

 Oxide Etchers  in Single Chamber Plasma Tools  (2)

 Poly/Nitride Etchers  in Single Chamber Plasma Tools  (2)

 Silicon Etchers  in Single Chamber Plasma Tools  (2)

 Tungsten Etchers  in Single Chamber Plasma Tools  (no items)

Items from the following manufacturers are offered under Single Chamber Plasma Tools:
Applied Materials, Inc., LAM Research Corp., Plasma-Therm, PlasmaQuest, Surface Technology Systems, Technics