Item ID: 256348

**1 Offered at Best Price**

WETV18-04 SP304

consisting of the main unit, 3 chemical cabinets and sub-equipment

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Location: Villach, Carinthia

Unit Price	Unstated
Number of Units	1
Manufacturer	LAM Research Corp.
Model	WETV18-04
Description	SEZ 304
Wafer Size Range
Minimum	150 mm
Maximum	300 mm
Set Size	300 mm
Number of Robots	1
Position 1
Tank Material	PVDF
Position 2
Tank Material	PVDF
Position 3
Tank Material	PVDF
Position 4
Tank Material	PVDF
Automatic Wafer Transfer	YES
Controller Type	Microprocessor Controller Type
Other Information	the system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!). Inline heater for media and DI Main unit: 12-inch system with handler/gripper with flip option; Pinchuck Intermediate tanks with Trebor pumps Levitronix flow meters for heater flow sometimes cause problems FFU was converted to a different controller/fan (see photos) Chemistry cabinets: Cabinet 1: Main tank (40L) with buffer tank and buffer function Cabinet 2: Main tank (40L) with buffer tank and buffer function Cabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer function The chemistry computer motherboard was replaced with a different one A weld on the drain in Chemistry Cabinet 3 was repaired
Extended Description	Details at SP304_Chem_Flowplan.pdf
Year of Manufacture	2016
Condition	Good
Power Requirements	Other V 80.0 A
CE Marked	YES