Item ID: 260582

**1 Offered at Best Price**

Trikon Sigma FxP200 RevA mit MX800 Platform

It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete),

1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. The

Platform is upgradet from T5 Controller (MX800) to GTM with PC104 Controller. All DEP Chambers HSE and Transport has CTI Onboard 8F Cryos and 2 9600 Cryo Compressor. No Forline Pumps

Trikon Sigma FxP200 RevA mit MX800 Platform

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Location: Villach, Kärnten

Unit Price	Unstated
Number of Units	1
Manufacturer	Trikon Tech Ltd.
Model	Sigma FxP200 RevA
Description	Trikon/SPTS PVD Tool
Wafer Size Range
Minimum	200 mm
Maximum	200 mm
Set Size	200 mm
Accessories	Brooks MX800 Platform with 2 VCE6 Loadlocks, 4 Std. RevA DEP, 1 RevA HSE, 1 MKII Heat. 2CTI 9600 HV Cryo Compressor
Other Information	Brooks MKII Platform upgradet to SPTS GTM PC104
Extended Description	Details at Konfiguration SPUT39.xlsx
Condition	Good
Year of Manufacture	1999
Power Requirements	380 V 50 Hz 3 Phase

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

Payment:

100% downpayment

FULL DESCRIPTION of Item 260582

1 Offered at Best Price

Trikon Sigma FxP200 RevA mit MX800 Platform

**1 Offered at Best Price**