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in 4 & 6 Point Probes
Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas
Item ID: 247845

Offered 1 Offered at $ 80,000.00

KLA-Tencor Auto RS-55tc Resistivity Test Tool

KLA-TENCOR Auto RS-55tc Resistivity Mapping System

  • Accommodates all Wafer Sizes from 50mm – 200mm
  • 5 Megaohm/sq Measurement Range
  • Typical Measurement Time: 5 – 4.5 Seconds per Test Site
  • <0.2% (1 sigma) Measurement Repeatability
  • Thermal Chuck Temperature Measurement Accuracy: ±0.5ºC
  • PC Based System Controller
  • 25 MHz 486 Based MPU
  • 44 MB Removable Hard Disk
  • 110 MB Fixed Hard Disk Drive
  • 5” Floppy Disk Drive
  • X-Y Map: Up to 1200 Sites Programmable
  • Probe Qualification: 20 sites
  • 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)

Location: Austin, Texas
Unit Price $ 80,000.00
Number of Units 1
Manufacturer KLA-Tencor
Model Auto RS-55tc
Wafer Size Range 
  Minimum 50 mm
  Maximum 200 mm
  Set Size 200 mm
Cassette to Cassette YES
Wafer Handling Standard Robot
Resistivity Testing YES
Sheet Resistance Testing YES
Thickness Testing YES
Dopant Typing YES
Wafer Mapping YES
Controller Type PC/VME
Refurbished YES
Condition Excellent

(click name below to visit its website directly)
Catalyst Equipment Corporation
Plano , Texas

Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas