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FULL DESCRIPTION of Item 259153

in Other Wafer Production Equipment
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 259153

Offered 1 Offered at Best Price


CAI519 Canon FPA 3000 i5+

Canon FPA 3000 i5+

General Configuration:

  • FPA 3000 - i5(+)
  • Manufactured in  June / 1997
  • 8“ Wafer Chuck, Notch PA unit
  • 6“ Nikon-type Reticle Changer
  • Reticle Barcode-Reader =   yes
  • Cassette Barcode Reader = yes
  • Pellicle Particle Checker =   yes
  • Online - ESPA =   yes
  • Interface type:   right
  • Standard flys eye lens
  • Chamber type: CD80
CAI519 Canon FPA 3000 i5+
  Click to see additional image(s)... other images

Location: Villach, Kärnten
Unit Price Unstated
Number of Units 1
Manufacturer Canon
Model CAI519
Description Canon FPA 3000 i5+
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 200 mm
Cassette to Cassette YES
Other Information 

Currently exchanged items ( 2023-2025)  :

 

  • Illumination Shutter
  • Stage Laser
  • Cooling Coil Chamber
  • Wafer Feeder Roboter
  • UPS for Workstation

 

 

Uniformity  /  Illumination Data at Lamp hrs 712 h :

 

 

uc0:6308  

li0:7299  

iucVal:2.804 

maxVal:105.760

minVal:99.992

areaX:22.0000

areaY:26.0000

pitchX:2.2000

pitchY:2.6000

count:100

 

Special Illumination  Mode 1

         Lens NA   0.54    Multiple Stopper       sigma   0.77

         1st zoom  22.30 [%] input lens none 

         2nd Zoom          Compensator 2 Value     Direction

           0.0 [%]                      44.0 [%]  -97.5 [degree]

 

Condition Good
Year of Manufacture 1997
Power Requirements      50/60 Hz     3 Phase
Weight 3,406  lb  (1,545 kg)

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
IFAT FE PV PCS MNT LS
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria