Manufacturer Model Description Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Illumination Source Type Multi-Layer Film Capacity Micro Spot Optics Scanning Stage Wafer Mapping In-Situ Capability Controller Type
Software Revision Level External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Accessories Other Information Extended Description Condition Year of Manufacture
Refurbished Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase CE Marked Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight