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Manufacturer
Model
Description
Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Illumination Source Type
Multi-Layer Film Capacity
Micro Spot Optics
Scanning Stage
Wafer Mapping
In-Situ Capability
Controller Type
Software Revision Level
External Cooling
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Operating Air Pressure
Air Consumption
Vacuum Required
Accessories
Other Information
Extended Description
Condition
Year of Manufacture
Refurbished
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
CE Marked
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height
Weight