|
Item ID |
Photo |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
Location |
Make |
Model |
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$ |
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103237
|
Eaton OEM*
|
Eaton OEM* |
|
in Electrical and Electronic Components
Eaton:15A Circuit Breaker
|
3
|
|
|
|
Plano, TX |
|
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104230
|
Eaton Part Number 0871-0003-0003
|
Eaton Part Number 0871-0003-0003 |
in Hardware
|
12
|
|
2.00 |
|
Hudson, NY |
|
|
251212
|
Eaton
|
Eaton |
GSD200E/80 |
in Ion Implantation Equipment
Eaton GSD200E/80 Highcurrent:Energy Config: | 0 - 80Kv Highcurrent | Serialnumber: | 80517 | Build Year: | 2000 | Date of first usage: | begin of year 2001 | Current Condition: | Good | CE-Conformity: | Yes | Cryo-Pumps: | CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!! | Cryo-Kompressor: | CTI 9650 Low-Voltage | Turbo-Pumps: | Seiko STP A2203 fully refurbed included!! | Terminal-Rough-Pump: | without (Edwards Config) | Endstation Rough-Pump: | without (Edwards Config) | Wafersize: | 200mm | Disk-Type: | Si-coated Disk fully refurbed included!! | Wafer-Cooling: | no Disk-Chiller included ! | Gasbox: | 5-String, 4x Toxic-Low-Pressure | String1: | PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 | String2: | BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 | String3: | AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3 | String4: | SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3 | String5: | Argon Carriergas; MFC Brooks GF120 10sccm-N2 | Disk-Drive: | Direct-Drive | Dose-Type: | Regular | Source-Type: | ELS4 IHC-Source without Vaporizer | Hghvoltage-Transformer: | dry | Light-Tower: | red/yellow/green; no buzzer | Main-Workstation | SUN Solaris AXI 3HE | Second-Workstation | without | Software-Version: | 6.13.5.1 (no license included) | Network: | 24port 100MB Ethernet with Cisco Router-Kit | Cell-Controller: | V6 Type | Condition | tool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024 | Availability | Immediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers | Notes: | slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg | | Clean-Room Table on frontside not included | | Original Lower Machine Front Panels not included (below the Table) | | Rough-Pumps not included | | Endstation Flowhood not included | | Disk-Chiller not included | | modified Plasma-Gun Power-Supply installed(TDK) | | Minor modifications on tool | | No Manual-Set/ no Spares | | If required, tool can be inspected on site |
|
1
|
|
|
|
Regensburg, Bavaria |
|
|
102854
|
Eaton OEM*
|
Eaton OEM* |
17059440 |
in Chamber Components
Eaton Part Number 17059440:Blank off faraday flag
|
1
|
|
|
|
Hudson, NY |
|
|
102856
|
Eaton OEM*
|
Eaton OEM* |
17046020 |
in Chamber Components
Eaton Part Number 17046020:Blank off SCE Manip
|
1
|
|
|
|
Hudson, NY |
|
|
102857
|
Eaton OEM*
|
Eaton OEM* |
17045990 |
in Chamber Components
Eaton Part Number 17045990:Blank off
|
1
|
|
|
|
Hudson, NY |
|
|
102858
|
Eaton OEM*
|
Eaton OEM* |
1173390 |
in Chamber Components
Eaton Part Number 1173390:Electron Shower
|
1
|
|
|
|
Hudson, NY |
|
|
102859
|
Eaton OEM*
|
Eaton OEM* |
1168810 |
in Chamber Components
Eaton Part# 1168810:Air Actuator Asm
|
1
|
|
|
|
Hudson, NY |
|
|
102860
|
Eaton OEM*
|
Eaton OEM* |
1156610 |
in Chamber Components
Eaton Part Number 1156610:Actuator asm (for V22)
|
1
|
|
|
|
Hudson, NY |
|
|
102861
|
Eaton OEM*
|
Eaton OEM* |
1141470 |
in Chamber Components
Eaton Part Number 1141470:Injector Faryday w/actuator
|
2
|
|
|
|
Hudson, NY |
|
|
102862
|
Eaton OEM*
|
Eaton OEM* |
1141430 |
in Chamber Components
Eaton Part Number 1141430:Extraction Actuator
|
1
|
|
|
|
Hudson, NY |
|
|
102863
|
Eaton OEM*
|
Eaton OEM* |
1141420 |
in Chamber Components
Eaton Part Number 1141420:Injector Faryday w/actuator
|
2
|
|
|
|
Hudson, NY |
|
|
107154
|
Eaton OEM*
|
Eaton OEM* |
0295-0006-2001 |
in Process Kit Components
Eaton Part Number 0295-0006-2001:Implant Kit Compon in Process Kit ComponentsAperture Chamber Entrance
|
1
|
|
48.01 |
|
Hudson, NY |
|
|
107712
|
Eaton OEM*
|
Eaton OEM* |
5990-0009-00 |
in Electrical and Electronic Components
Eaton Part Number 5990-0009-00:PCB HVPS TC Interface
|
1
|
|
|
|
Hudson, NY |
|
|
59441
|
Eaton Mfr*
|
Eaton Mfr* |
5990-0150-0001 |
in Electrical and Electronic Components
Eaton Part Number 5990-0150-0001:Printed CircuitBoard in Electrical and Electronic ComponentsPC BOARD FOCUS AND DEFLECTION
|
2
|
|
|
|
Hudson, NY |
|
|
101094
|
Eaton OEM*
|
Eaton OEM* |
5990-0020 |
in Electrical and Electronic Components
Eaton Part Number 5990-0020:PCB Ass'y AC Line Monitor
|
1
|
|
|
|
Hudson, NY |
|
|
101096
|
Eaton OEM*
|
Eaton OEM* |
5990-0025-0001 |
in Electrical and Electronic Components
Eaton Part Number 5990-0025-0001:PCB Ass'y Refrigeration Relay
|
2
|
|
|
|
Hudson, NY |
|
|
101100
|
Eaton OEM*
|
Eaton OEM* |
5990-0028-0001 |
in Electrical and Electronic Components
Eaton Part Number 5990-0028-0001:PCB Ass'y 3 Cryo Remote
|
1
|
|
|
|
Hudson, NY |
|
|
101101
|
Eaton OEM*
|
Eaton OEM* |
5990-0029-0001 |
in Electrical and Electronic Components
Eaton Part Number 5990-0029-0001:PCB Ass'y Serial Interface
|
1
|
|
|
|
Hudson, NY |
|
|
101102
|
Eaton OEM*
|
Eaton OEM* |
5990-0012-0001 |
in Electrical and Electronic Components
Eaton Part Number 5990-0012-0001:PCB Ass'y Beam Monitor Scan Clock Card
|
2
|
|
|
|
Hudson, NY |
|
|
101103
|
Eaton OEM*
|
Eaton OEM* |
5990-0021-0001 |
in Electrical and Electronic Components
Eaton Part Number 5990-0021-0001:PCB Ass'y Relay Driver Stat
|
1
|
|
|
|
Hudson, NY |
|
|
101634
|
Eaton OEM*
|
Eaton OEM* |
0261-0003-0002C |
in Semiconductor Parts
Eaton Part Number 0261-0003-0002C:AMPLIFIER, Beam Current, Unit 5600
|
1
|
|
|
|
Hudson, NY |
|
|
101878
|
Eaton OEM*
|
Eaton OEM* |
5880-0108-3001 |
in Semiconductor Parts
Eaton Part Number 5880-0108-3001:Plate, Lens Mounting
|
1
|
|
|
|
Hudson, NY |
|
|
103047
|
Eaton OEM*
|
Eaton OEM* |
1550-0014-3001 |
in Semiconductor Parts
Eaton Part Number 1550-0014-3001:Electrode, Extractor Can
|
3
|
|
|
|
Hudson, NY |
|
|
103049
|
Eaton OEM*
|
Eaton OEM* |
1550-0013-3001 |
in Semiconductor Parts
Eaton Part Number 1550-0013-3001:Electrode, Decel Extraction
|
3
|
|
|
|
Hudson, NY |
|
|
103050
|
Eaton OEM*
|
Eaton OEM* |
7098-0011-1001 |
in Semiconductor Parts
Eaton Part Number 7098-0011-1001:Shaft, Leak Valve
|
2
|
|
|
|
Hudson, NY |
|
|
108065
|
Eaton OEM*
|
Eaton OEM* |
3469-0001-0002 |
in Semiconductor Parts
Eaton Part Number 3469-0001-0002:Joystick Beam Monitor
|
1
|
|
|
|
Hudson, NY |
|
|
108079
|
Eaton OEM*
|
Eaton OEM* |
5880-0667-0002 |
in Semiconductor Parts
Eaton Part Number 5880-0667-0002:Plate Base HT Source
|
3
|
|
|
|
Hudson, NY |
|
|
108104
|
Eaton OEM*
|
Eaton OEM* |
8530-0122-00 |
in Semiconductor Parts
Eaton Part Number 8530-0122-00:Wire Buss 22 AWG
|
80
|
|
|
|
Hudson, NY |
|
|
144907
|
Eaton MFR*
|
Eaton MFR* |
102278 |
in Semiconductor Parts
Eaton Part Number 102278:Screw,MCH,PAN,Philips Hd.SS,2"
|
6
|
|
|
|
Hudson, NY |
|
|
149272
|
Eaton Mfr*
|
Eaton Mfr* |
1155520 |
in Semiconductor Parts
Eaton Part Number 1155520:Oth Semi Eq Parts in ALL CATEGORIESEATON POWER SUPPLY
|
1
|
|
|
|
Hudson, NY |
|
|
149273
|
Eaton Mfr*
|
Eaton Mfr* |
1900600 |
in Semiconductor Parts
Eaton Part Number 1900600:Oth Semi Eq Parts in ALL CATEGORIESEATON POWER SUPPLY
|
1
|
|
|
|
Hudson, NY |
|
|
163796
|
Eaton OEM*
|
Eaton OEM* |
0298-0124-0001 |
in Semiconductor Parts
Eaton 0298-0124-0001:Chamber Load Arm
|
2
|
|
|
|
Plano, TX |
|
|
106686
|
Eaton Mfr*
|
Eaton Mfr* |
0342-0261-4001 |
in Semiconductor Parts
Eaton Part Number 0342-0261-4001:Extraction Ass'y Hot F
|
2
|
|
|
|
Hudson, NY |
|
|
105653
|
Eaton OEM*
|
Eaton OEM* |
0843-0007-2001 |
in Semiconductor Parts
Eaton Part Number 0843-0007-2001:Arc Chamber End Cap
|
6
|
|
72.52 |
|
Hudson, NY |
|
|
105642
|
Eaton OEM*
|
Eaton OEM* |
0342-0311-1001 |
in Semiconductor Parts
Eaton Part Number 0342-0311-1001:Feed thru Accel/Decel
|
1
|
|
310.08 |
|
Hudson, NY |
|