› Original Equipment Manufacturer: |
Yes |
› Exact Model Type: |
E500 EHPI |
› OEM Serial ID: |
ES193716 |
› Completeness: Total/partial/Donor tool? Please list missing parts. |
Partial |
› Date of first usage? |
NA |
› Technic special customized for Infineon: |
NA |
› Correct maintained: |
Yes |
› Any damages/deficits known: |
No |
› Manuals existing: |
No |
› Crated: If yes…/ professional with protocol / partly / simple: |
No |
› Any upgrades / extensions: |
BDM (beam drift monitor) |
› Useable for which products: |
8" wafers |
› Wafer size (if applicable): |
200mm |
› Any consumables at end of lifetime: |
Yes (source, electrode, |
› Procured from OEM or from second hand: |
From Infineon Villach |
› Any refurbishments done: |
No |
|
|
› Was there a significant system failure in the last three years: |
No |
› Any contaminations known: |
BF3,ASH3,PH3 |
› IFX Inventory number: MCIEHP503 |