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FULL DESCRIPTION of Item 267500

in High Current Implanters
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 267500

Offered 1 Offered at Best Price


Axcelis GSD 180E2 (#817)

Disk-Drive:Direct-Drive
Dose-Type:Regular
Source-Type:ELS4 IHC-Source without Vaporizer
Highvoltage-Transformer:both Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSUN Solaris AXI 3HE (special case)
Second-WorkstationSUN Sparc5 on cart with printer
Software-Version:6.4.3 (no license included)
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:177 Cell Type
Options:Accel-Higvoltage Probe installed
Conditiontool run fully productive (24/7) between 15 and 160kv Energy until we switched it off on 03/2026
AvailabilityImmediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. depending on the availability of external service providers
Notes:slight corrosion spots(rusty) on the frame, just a visual matter
 Clean-Room Table on frontside missing
 0,5L Xe-Plasma-Bottle Holder missing + Terminal Water Cover missing
 HPES-Upgrade installed, but Upgrades were stoped after HPES-Upgrade!
 Rough-Pumps and Disk-Chiller not included
 modified Gasbox-Frame for 6L-Bottles
 modified Plasma-Gun Power-Supply installed(TDK)
 Minor modifications on tool: like interlocks,...
 No Manual-Set/ no Spares
 If required, tool can be inspected on site
Axcelis GSD 180E2 (#817)
  Click to see additional image(s)... other images

Location: Regensburg, Bavaria
Unit Price Unstated
Number of Units 1
Manufacturer Axcelis/Eaton
Model GSD 180E2
Description Highcurrent Implanter (AsH3, BF3)
Accessories 

see discription above

Other Information 

see description above

Condition Good
Year of Manufacture 1995
Refurbished YES
Power Requirements 208 V     50.0 A     50/60 Hz     3 Phase
CE Marked YES
Exterior Dimensions 
  Width 125.984  in  (320.0 cm)
  Depth 236.220  in  (600.0 cm)
  Height 102.362  in  (260.0 cm)
Weight 29,762  lb  (13,500 kg)
Shipping  Weight lb  kg 

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria