Item ID: 45428

**1 Offered at Best Price**

PLASMATHERM ICP PLASMA ETCHER

Inductively Coupled Plasma Etcher with 9.5 Inch Electrode

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Location: Scotia, New York

Unit Price	Unstated
Number of Units	1
Manufacturer	Plasma-Therm
Model	790 ICP
Wafer Size Range
Minimum	50 mm
Maximum	200 mm
Controller Type	PC Controller Type
High Vacuum Pump	Leybold 361C
Roughing Pump	Leybold D40BCS
RF Generator Model	RFPP RF20M & RF5S
Automatch Text	RFPP AM-20 & AM-5
Number of Gas Inputs	Three Gas
Process Gases	TBD
Other Information	The top coil is supplied 2 MHz RF at 1000 watt max. RFPP Model RF20M The bottom electrode is supplied 13.56 MHz RF at 500 Watts. RFPP Model RF5S Refurbishment to Include: Cleaning and recalibration of mass flow controllers. Rebuilding of Leybold D40BCS prepped only with fomblin oil. Rebuilding of Leybold 361C Turbo pump. Cleaning of chamber and gas shower.
Power Requirements	208 V 60.0 A 60 Hz 3 Phase
Year of Manufacture	1998
Refurbished	YES

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 45428

1 Offered at Best Price

PLASMATHERM ICP PLASMA ETCHER

**1 Offered at Best Price**