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AET TECHNOLOGIES Rapid Annealing Furnace
AET TECHNOLOGIES Rapid Annealing Furnace - 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
- EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
- EUROTHERM 7300A Three Phase Power Controller
- LEYBOLD TTR 91 S Thermovac Vacuum Sensor
- LEYBOLD Display One Single Channel Vacuum Gauge Display
- VAT 24428-KA31 Pneumatic HV Right Angle Valve
- TELSTAR RD-9 Vacuum Pump
- HORIBA SEC-E40 Mass Flow Meter
- HORIBA ROD-1 MB Modular Readout
- Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
- Heating power: 50kW
- Input Power: 380-400VAC; 3Ph; 50Hz 125A
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