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AMAT P5000 XT (Poly - Trench) #267
Pictures are from parallel tool! Applied Material P5000XT -top mount elektronics and He backing -2 Chamber Narrow Gap tool -installed pos. Chamber A/B -Standard Phase 3 Robot -15 slot storage elevator -ZA Slit Valves pos. A/B -Wafer Positioning Sensor (WPS) -Cassette loadport with 2 stages -2 Monitor -System SSD -CF card Floppy emulator -MXP Unibody chamber with Narrow Gap lid -Turbo Seiki STP-301CVB -Controller Seiki SCU-350D -MKS Manometer -7 Gas Sticks / Brooks GF 100 MFCs -Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4 -2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft) -2x ENI OEM 12B RF generators -AC Box at RF Rack
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