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FULL DESCRIPTION of Item 268056

in Cluster Plasma Tools - Poly/Nitride
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 268056

Offered 1 Offered at Best Price


AMAT P5000 XT (Poly - Trench) #267

Pictures are from parallel tool!

 

Applied Material P5000XT

-top mount elektronics and He backing

-2 Chamber Narrow Gap tool

-installed pos. Chamber A/B

-Standard Phase 3 Robot

-15 slot storage elevator

-ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS)

-Cassette loadport with 2 stages

-2 Monitor

-System SSD

-CF card Floppy emulator

 

-MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB

-Controller Seiki SCU-350D

-MKS Manometer

-7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators

-AC Box at RF Rack

AMAT P5000 XT (Poly - Trench) #267
  Click to see additional image(s)... other image

Location: Regensburg, Bavaria
Unit Price Unstated
Number of Units 1
Manufacturer Applied Materials
Model P5000 XT
Wafer Size Range 
  Minimum 200 mm
  Set Size 200 mm
Number of Chambers 2
Process Capabilities 2x MXP Narrow Gap Pos. A/B
Process Gases Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4
Power Requirements 208 V     50.0 A     50/60 Hz     3 Phase
Year of Manufacture 1999
Condition Good

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria