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Cluster PECVD Tools


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Item IDPhotoItem DescriptionSize RangeChambersProc Capablitis#PriceNotes Location
MakeModelSet Size
$
257348 AMAT DXZ/CXZ Chamber200 mm3Silan 1 Villach, Kärnten
250827 Applied Materials Centura TCPP200 mm2 1 Austin, Texas
30246 Plasma-Therm VLR 700 VLR-PM1-ICRB-PM100 mm1Nitride Depostion 1 F* Scotia, New York

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  F* if the item is specially featured
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Items from the following manufacturers are offered under Cluster PECVD Tools:
AMAT, Applied Materials, Inc., Plasma-Therm