Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Cassette to Cassette Number of Platens Platen Diameter Automatic Slurry Mixing Pad Conditioning On Board Scrubber End of Process Detection Controller Type
Software Revision Level Recirc Chiller Chiller Included Recirc Chiller Chiller Model Refurbished Accessories Other Information Extended Description Year of Manufacture Condition Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency
Power Requirements Phase CE Marked External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight