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Manufacturer
Model
Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Cassette to Cassette
Number of Platens
Platen Diameter
Automatic Slurry Mixing
Pad Conditioning
On Board Scrubber
End of Process Detection
Controller Type
Software Revision Level
Recirc Chiller Chiller Included
Recirc Chiller Chiller Model
Refurbished
Accessories
Other Information
Extended Description
Year of Manufacture
Condition
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
CE Marked
External Cooling
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Operating Air Pressure
Air Consumption
Vacuum Required
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height
Weight