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SELECT SPECS to SEARCH for Items to View in Programmable Robotic Photoresist Develop Tracks

1. Check up to 5 item descriptors to add to price, number and other standard data for entering search and selection criteria. 2. Click SUBMIT below to enter search criteria for the standard and selected data fields.

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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Photoresist Type Number of Robots Number of Cassette Elevators Number of Photoresist Develop Stations Number of Developer Dispensers Number of Developer Rinse Dispensers Wafer Backside Rinse Bowl Rinse Number of Hot Plates Number of Chill Plates	Stepper Interface Interface Type Mini-Environment Controller Type Software Revision Level Refurbished Accessories Other Information Extended Description Year of Manufacture Condition Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency	Power Requirements Phase CE Marked External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight