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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
Trion Technology  

Trion Technology  


List all items of this typeCluster Plasma Tools - Oxide

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Dielectric Cluster Tool

Trion Technology Oracle

1   F* Scotia, New York


NE 7800 Ferroelectric Etcher 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools


Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application

The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.


1   F* Scotia, New York

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

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   reference document attached
  F* if the item is specially featured
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Items from the following manufacturers are offered under Cluster Plasma Tools:
Trion Technology, Ulvac