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Item ID  Photo Short Description Product Type / Details # Price Notes Location Make Model   $   266379 AMAT   AMAT   CENTURA-TECTRA-TXZ  Cluster Plasma Tools - Other in Cluster Plasma Tools AMAT - CENTURA-TECTRA-TXZ: CVD - TITIN 8'' Completeness: Partial  Function: need repair Development_CVD_TiTIN 1   N* Dresden, Saxony 268056 Applied Materials   Applied Materials   P5000 XT  Cluster Plasma Tools - Poly/Nitride in Cluster Plasma Tools AMAT P5000 XT (Poly - Trench) #267: Pictures are from parallel tool!   Applied Material P5000XT -top mount elektronics and He backing -2 Chamber Narrow Gap tool -installed pos. Chamber A/B -Standard Phase 3 Robot -15 slot storage elevator -ZA Slit Valves pos. A/B -Wafer Positioning Sensor (WPS) -Cassette loadport with 2 stages -2 Monitor -System SSD -CF card Floppy emulator   -MXP Unibody chamber with Narrow Gap lid -Turbo Seiki STP-301CVB -Controller Seiki SCU-350D -MKS Manometer -7 Gas Sticks / Brooks GF 100 MFCs -Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4 -2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft) -2x ENI OEM 12B RF generators -AC Box at RF Rack 1   N* Regensburg, Bavaria 265095 Applied Materials   Applied Materials   P5000 XT  Cluster Plasma Tools - Poly/Nitride in Cluster Plasma Tools AMAT P5000 XT (Poly - Trench) #268: The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.   Tool facts: Applied Material P5000XT -top mount elektronics and He backing -2 Chamber Narrow Gap tool -installed pos. Chamber A/B -Standard Phase 3 Robot -15 slot storage elevator -ZA Slit Valves pos. A/B -Wafer Positioning Sensor (WPS) -Cassette loadport with 2 stages -2 Monitor -System SSD -CF card Floppy emulator   -MXP Unibody chamber with Narrow Gap lid -Turbo Seiki STP-301CVB -Controller Seiki SCU-350D -MKS Manometer -7 Gas Sticks / Brooks GF 100 MFCs -Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4   -2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft) -2x ENI OEM 12B RF generators -AC Box at RF Rack 1   Regensburg, Bavaria 268339 AMAT   AMAT   Producer-VME200  Cluster Plasma Tools - Other in Cluster Plasma Tools AMAT Producer-VME200 8": 3 Chambers, the tool is working and is located in cleanroom Procedure: FCG-TEOS LF Generator 3x 1   N* Dresden, Saxony 267628 LAM   LAM   Rainbow 4520 Oxide  Cluster Plasma Tools - Oxide in Cluster Plasma Tools LAM Rainbow 4520 (512-136): without UI computer, cooler, generator rack and vacuum pump   process gases: Argon, CF4, CHF3, O2, CO, SF6, N2 1   N* Regensburg, Bavaria 119294 Trion Technology   Trion Technology   Oracle  Cluster Plasma Tools - Oxide in Cluster Plasma Tools TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL: Dielectric Cluster Tool Trion Technology Oracle 1   F* Scotia, New York 126704 Ulvac   Ulvac   NE 7800 Ferroelectric Etcher  Cluster Plasma Tools - Metal in Cluster Plasma Tools ULVAC DRY ETCHING SYSTEM: Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field). The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications. Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.   1   F* Scotia, New York

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
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  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Cluster Plasma Tools: AMAT, Applied Materials, Inc., LAM, Trion Technology, Ulvac