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• 3-stub automated tuner produced by Astex (MKS Instruments) for use with SmartPower microwave generators. 
• This is a WR284 waveguide component.

• WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.

• Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
• Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.

• Commonly used with Astex generators with up to 1.5kW forward power capabilities.

• Astex circulator intended for use with 1.8kW and 3.0kW SmartPower microwave generators.
• Direct compatibility with Astex WR284 goods.
• This unit looks to be in excellent physical condition and can be tested prior to shipment.

• Painted aluminum, air-cooled microwave circulator commonly used with Astex 5000W microwave generators.
• Equipped with a reflected power coupler at Port 3 (dummy load location).

• Rack-mounted S1000i Power Supply, Magnetron Head, Cable and Waveguide components.
• This is an older vintage power supply which is only recommended to customers who are already supporting related Astex microwave goods.
• This unit has been tested in the past.  Re-testing can be expedited upon request. 
• Repair or replacement of the A/C cord needs to be coordinated before shipment.

• For use with compatible Astex switching microwave power supplies.

• For use with compatible Astex switching microwave power supplies.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.

• Multiple stainless steel, Astex microwave plasma CVD chambers and plasma couplers currently available as the basis for refurbishment and reintegration.
• Systems can be reintegrated based on customer's application needs using a combination of reliable, new and used/refurbished components.
• This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
• 1.5kW to 5kW microwave power input.
• 3 stage options: Cooled, Heated, or Thermally Floating.
• Computer controls.