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• Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
• Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
• New, surplus goods may be available.

• WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.

Chemical Downstream Plasma Source

Applied Materials part number: 3750-0112

• Used goods.
• Aluminum waveguide with black orange-peel painted exterior.
• Threaded holes on both flanges (Helicoil inserts).

• Painted aluminum, air-cooled microwave circulator commonly used with Astex 5000W microwave generators.
• Equipped with a reflected power coupler at Port 3 (dummy load location).

• Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
• Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
• Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
• Goods can be sold with a limited warranty.

• The complete tested, refurbished 2.5kw microwave generator set includes:
  • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
  • Water-cooled 2.5kW magnetron head with variable output.
  • Water-cooled 3-way circulator.
  • All interconnecting cables for the above components.
• Operational and ready to ship with relatively short lead-time. 
• Limited warranty can be considered depending on the application.

• For use with compatible Astex switching microwave power supplies.

• For use with compatible Astex switching microwave power supplies.

• Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
• System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
• Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
• This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
• 1.5kW to 5kW microwave power input.
• 3 stage options: Cooled, Heated, or Thermally Floating.
• Integration with computer controls is strongly recommended.
• Chamber designs vary by vintage, but can be confirmed at the time of quotation.

• This in-stock equipment is offered for domestic sale within the USA only. 
• Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
• Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
• System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
  • Chamber cleaning,
  • Computer control updates,
  • Higher throughput water cooling subsystem,
  • Replacement of selected o-ring components with metal seals, and
  • Enhanced process control/monitoring devices.
• The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
• Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
• Photo Note: System photo shown include a similar quality, similar vintage system sold in the past.  Actual photos or inspection available to qualified customers only.