 |
Item ID |
Photo |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
Location |
Make |
Model |
|
|
$ |
|
 |
165710
|
Astex
|
Astex |
Model LS or Equivalent/Substitute |
in Plasma Processing Equipment
Astex Water-Cooled Dummy Load for use with 1.5kW systems:- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
- Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
- New, surplus goods may be available.
|
1
|
|
|
 |
Sterling, Massachusetts |
|
 |
165748
|
Astex
|
Astex |
AX3153-1 |
in Plasma Processing Equipment
Astex AX3153-1 Dummy Load:- WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
- One used, microwave-tested unit is in Cline Innovations' physical inventory as of 8/20/2021.
|
1
|
|
|
|
Sterling, Massachusetts |
|
 |
165749
|
Astex
|
Astex |
AX3153 |
in Plasma Processing Equipment
Astex AX3153 or equivalent Dummy Load:- WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
|
1
|
|
|
|
Sterling, Massachusetts |
|
 |
165750
|
Astex
|
Astex |
CS2 |
in Plasma Processing Equipment
Astex CS2 Circulator with Directional Coupler:- Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
- Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
|
1
|
|
|
|
Sterling, MA |
|
 |
63666
|
Astex
|
Astex |
AX 7610 |
in Plasma Processing Equipment
ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE:Chemical Downstream Plasma Source
Applied Materials part number: 3750-0112
|
2
|
|
|
 |
Scotia, New York |
|
 |
184611
|
Astex
|
Astex |
LS340 |
in Plasma Processing Equipment
Astex WR340 Water-Cooled Dummy Load:- Heat exchanger designed for use with 2.45GHz 5kW AX2040 & A-5000 microwave delivery subsystems used in applications with well-controlled reflected power levels.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
190257
|
Astex
|
Astex |
CPR340 or equivalent |
in Plasma Processing Equipment
Astex WR284 to WR340 Waveguide Adaptor:- Aluminum rectangular waveguide component.
- Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
- Commonly used with higher power Astex microwave delivery systems & plasma sources.
- Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
- Approximate length is 5 to 6 inches.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
190326
|
Astex
|
Astex |
CS340 or equivalent |
in Plasma Processing Equipment
Astex CS340 3-way Circulator :- Painted aluminum, air-cooled microwave circulator commonly used with Astex 5000W microwave generators.
- Equipped with a reflected power coupler at Port 3 (dummy load location).
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
209065
|
Astex
|
Astex |
FI20131 Fl20131 3750-01139 |
in Plasma Processing Equipment
Astex 90-degree Waveguide Elbow:- Used goods.
- Aluminum waveguide with black orange-peel painted exterior.
- Threaded holes on both flanges (Helicoil inserts).
|
2
|
|
|
|
Leominster, Massachusetts |
|
 |
85963
|
Astex
|
Astex |
AX3041 |
in Plasma Processing Equipment
ASTEX THREE STUB TUNER:Three Stub Tuner
|
1
|
|
1,200.32 |
 |
Scotia, New York |
|
 |
213180
|
Astex
|
Astex |
AX2518 |
in Power Supplies
ASTeX AX2518 SmartPower Microwave Power Supply:- Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
- Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods. Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
- Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
- Goods can be sold with a limited warranty.
|
2
|
|
|
|
Leominster, Massachusetts |
|
 |
225956
|
Astex
|
Astex |
2.5kW |
in Power Supplies
Astex 2.5kW switching microwave generator set:- The complete tested, refurbished 2.5kw microwave generator set includes:
- 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
- Water-cooled 2.5kW magnetron head with variable output.
- Water-cooled 3-way circulator.
- All interconnecting cables for the above components.
- Operational and ready to ship with relatively short lead-time.
- Limited warranty can be considered depending on the application.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
206579
|
Astex
|
Astex |
SXRHA |
in Power Supplies
ASTEX MAGNETRON HEAD:Magnetron Head
|
2
|
|
|
 |
Scotia, New York |
|
 |
168802
|
Astex
|
Astex |
HS |
in Power Supplies
Astex HS Air-Cooled Magnetron Head:- For use with compatible Astex switching microwave power supplies.
|
1
|
|
|
|
Leominster, Massachusetts |
|
 |
168803
|
Astex
|
Astex |
HS-1500, HS1500 |
in Power Supplies
Astex HS-1500 Air-Cooled Magnetron Head:- For use with compatible Astex switching microwave power supplies.
|
1
|
|
|
|
Leominster, MA |
|
 |
168804
|
Astex
|
Astex |
HS-1000, HS1000 |
in Power Supplies
Astex HS-1000 Air-Cooled Magnetron Head:- For use with compatible Astex switching microwave power supplies.
|
1
|
|
|
|
Leominster, MA |
|
 |
184607
|
Astex
|
Astex |
AX5000, AX6000, AX6350 or similar |
in Production Tools
Astex AX5000 Microwave Plasma Diamond Growth System:- Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
- System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
- Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
- This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
- 1.5kW to 5kW microwave power input.
- 3 stage options: Cooled, Heated, or Thermally Floating.
- Integration with computer controls is strongly recommended.
- Chamber designs vary by vintage, but can be confirmed at the time of quotation.
- Please note that the chamber shown in the attached image is a new chamber. The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
|
1
|
|
|
F* |
Leominster, Massachusetts |
|
 |
137483
|
Astex
|
Astex |
ECR-MOCVD-PECVD |
in Production Tools
ASTeX Large Volume Plasma Processing System (ECR-PECVD-MPCVD-MOCVD):High density plasma system activated by ECR-enhanced, 2.45GHz microwave input offers PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures. Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.
Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching. This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.
|
1
|
|
|
 |
Leominster, Massachusetts |
|
 |
189843
|
Astex
|
Astex |
AX6500 "Clamshell" MPCVD |
in Production Tools
Astex AX6500 Bottom-launch Diamond Growth System:- This in-stock equipment is offered for domestic sale within the USA only.
- Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
- Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
- System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
- Chamber cleaning,
- Computer control updates,
- Higher throughput water cooling subsystem,
- Replacement of selected o-ring components with metal seals, and
- Enhanced process control/monitoring devices.
- The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
- Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
- Photo Note: System photo shown include a similar quality, similar vintage system sold in the past. Actual photos or inspection available to qualified customers only.
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1
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|
 |
Leominster, Massachusetts |
|