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• Used goods.
• Aluminum waveguide with black orange-peel painted exterior.
• Threaded holes on both flanges (Helicoil inserts).

• Aluminum rectangular waveguide component.
• Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
• Commonly used with higher power Astex microwave delivery systems & plasma sources.  
• Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
• Approximate length is 5 to 6 inches.

• This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.  
• The integrated coupler measures reflected power using a diode senor.  The reflected power signal is processed using an integral circuit-board designed into the coupler.  Output is provided using a 9-pin male D-subminature connector.
• These goods may also be compatible with Astex subsystems for non-OEM applications. 
• Goods are most typically integrated with 2.5kW microwave delivery systems.
• Photos included in this listing are for reference only.  The actual circulator shown in this listing has been sold, but depicts the general design.
• Please contact Cline Innovations for more information.

• Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
• Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
• New, surplus goods may be available.

• WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.

• Pre-owned dual directional coupler with integrated flange interlock.
• WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
• Both couplers are factory rated for 60dB.
• Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
• Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
• Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past. 
• Photos and further information can be provided upon request.

Three Stub Tuner

• Cline Innovations has a used AX2107 rack-mounted switching power supply which was previously used on a microwave plasma system in a clean-room setting.  
• Goods available as a power supply only or as a complete 700W microwave generator set including cables as well as WR284 waveguide components including: remote magnetron head, circulator with integrated directional coupler, and dummy load.
• This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  
• This specific generator set came from a working system used in an R&D setting.  Testing of the goods can be expedited upon request.
• Photos are also available upon request.

• For use with compatible Astex switching microwave power supplies.

• Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
  • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
  • Water-cooled 2.5kW magnetron head with variable output.
  • Water-cooled 3-way circulator with integrated directional coupler.
  • All interconnecting cables for the above components.
• Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
• This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
• This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
• A limited warranty can be considered depending on the application.
• Photos available upon request.

• This in-stock equipment is offered for domestic sale within the USA only. 
• Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
• Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
• System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
  • Chamber cleaning,
  • Computer control updates,
  • Higher throughput water cooling subsystem,
  • Replacement of selected o-ring components with metal seals, and
  • Enhanced process control/monitoring devices.
• The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
• Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
• Photo Note: System photo shown include a similar quality, similar vintage system sold in the past.  Actual photos or inspection available to qualified customers only.

• Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
• System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
• Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
• This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
• 1.5kW to 5kW microwave power input.
• 3 stage options: Cooled, Heated, or Thermally Floating.
• Integration with computer controls is strongly recommended.
• Chamber designs vary by vintage, but can be confirmed at the time of quotation.
• Please note that the chamber shown in the attached image is a new chamber.  The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.