ALL CATEGORIES

Entegris (Fluoroware) Galtek male elbow, PFA, 1/4" integral ferrule tube fitting (Galtek) x 1/8" MNPT

Plasma Trap Electrode

Burn In Oven System

Turbomolecular Vacuum Pump Control Unit. 

BOC Edwards Part Number: PT59-Z0-Z00

Turbo Pump Controller Cable 

Edwards is a Seiko Seiki Distributor

Turbo Pump with Controller and Cables

Pump will be in good working condition, not rebuilt.

Angle Vacuum Valve

Edwards Part Number: C41415000

Gate Vacuum Valve

Manual Operation Isolation In-Line Vacuum Valve

Part number C41421000

External Oil Filtering System

Designed for use with the following pumps:
E1M18/E2M18, E1M40/E2M40, E1M80/E2M80,
E1M175/E2M175, and E1M275/E2M275.

Control and Enclosure for QDP80/QMB500 Vacuum Pumping System.

--Large capacity BOC Edwards GV600F Drystar dry mechanical pump.
--Aerzen GLB.15.11 HV-07 roots blower.
--Please see attached documentation.

From Edwardsvacuum.com:

The design of the Edwards GV dry pumps is based on the well-proven claw technology for dry pumps. Two pairs of claw shaped rotors on two shafts rotate in opposite directions to trap and compress the pro­cess gas which flows along the axis of the shafts between the claw pairs.

During each complete rotation of the claws, first the inlet port of each claw pair is exposed (to admit gas to the pump), then both the inlet and outlet are isolated (to trap and compress the gas), and then the outlet is exposed (to expel the compressed gas). The claw mechanism offers the following features:

•Dry operation, non contact mechanism
•Self valving - the pump can deliver to atmospheric pressure
•Short gas path - better particulate handling
•Staged compression - efficient power use
•High process temperature - excellent water vapor handling


Reliability
Low vacuum bearings (at the exhaust stage of the pump) are protected from the process stream by a unique gas-purged shaft-seal. Compressed air is fed to the shaft seals which prevents the ingress of process contaminants, including gases, vapors and particulates.

Low cost of ownership
GV pumps can offer real cost of ownership savings. The GV pumps are robust and reliable, delivering a reduction in process downtime which would lead to lost production. In addition, the minimized cost of routine maintenance (such as oil and filter replacement, spares inventory holding and oil disposal) all adds to the savings using GV dry pumps. With service intervals of 18 months for re-greased bearings and 3 years for bearing changes, the GV pumps offer a highly reliable and cost effective alternative to piston pumps.

Mechanical Vacuum Pumping System

NB: To be rebuilt at the time of sale.

NB: System is on hold pending sale.

Vacuum Rectangular Gate Valve

2005 SmartView® Semi-Automated Wafer-to-Wafer Bond Aligner
 
The EV Group (EVG) Smartview® Bond aligner and EV Group (EVG) 540 Wafer Bonder are used in the production of MEMs and in the emerging fields of 3D IC Packaging and Through-Silicon Via (TSV) interconnects.

A 3D integrated circuit (3D IC) is a single integrated circuit built by stacking silicon wafers and/or dies and interconnecting them vertically. This is achieved by persisly aligning devices on two silicon wafers and subsequently bonding them together. The result is they behave as a single device. By using TSV technology, 3D ICs can pack a great deal of functionality into a small “footprint.” This technology is not olny used in the production of MEMS, but also in the fabrication of CMOS image sensors, and memory devices.

Wafer Transfer Robot and Aligner