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Axcelis Optima HDxT, Ion Implanter, 300mm,
300mm ion implanter, spare beam tunnel, SRA, PFG, source, manipulator, bushing source flange adapter, source turbo exhaust line, and . chamber liners.
Axcelis Optima HDxT Roughing Pumps: Edwards IGX100L Edwards iGX100M Edwards iGX600M Cryo Pumps: Qty (2) Brooks: 320FE Qty (1) Brooks: 250FE Turbo Pump TP1: Edwards STP-XA2703CV TP2: Edwards STP-A1303CV Chillers: Affinity J Chiller Model: GWN-ZRMK-BE55CBS6 Affinity F-Series Model: FWA-032K-DD19CBD4 Cryo Compressors: Qty (2) Brooks: IS-1000
Tool ID: IMP2150
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