Unit Price |
Unstated |
Number of Units |
1 |
Manufacturer | MRC |
Model | 643P |
Description | In-Line Sputtering System -- Refurbished by KDF |
Vacuum System | Cryo Pumped |
Vacuum System | CTI Onboard 8F Loadlock Pump -- P/N: 8116015G001 CTI Onboard 8 High Vacuum Pump -- P/N: 81160114G001 CTI 9600 Compressor -- P/N: 8135900G00-1 Alcatel 2033 Mechanical Pump |
Load Lock Included | Yes |
Number of Cathodes | Two |
Quantity of DC Cathodes | 2 |
Gas Inputs | Three |
Substrate Heaters | Yes |
DC Power Supply |  |
Manufacturer | Advanced Energy |
Model | MDX 10K 2194 013 |
Output Power | 10.00 kW DC |
RF Generator |  |
Manufacturer | MRC |
Rated Power Output | 1250 Watts |
Frequency | 13.56 MHz |
Matching Network | Yes |
Accessories | CTI Network Interface Terminal P/N: 8113022G001
|
Other Information | 13" x 13" Substrate Pallet Load Lock Heating Process Heating DC Bias RF Bias
Three Cathode System -- Two DC Magnetron Cathodes Installed |
Power Requirements | 208 V
100.0 A
50/60 Hz
3 Phase
|