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in Standalone Sputterers
Deal directly with Owner:  Capovani Brothers Inc. of Scotia, New York
Item ID: 93627

Offered 1 Offered at Best Price


Sputtering System

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Location: Scotia, New York
Unit Price Unstated
Number of Units 1
Manufacturer Sharon Vacuum
Model Sputtering System
Description Sputtering System
Vacuum System Cryo Pumped
Vacuum System 

Leybold D40B Mechanical Pump
CTI Cryotorr 8 with CTI 8200 Compressor
MKS Series 600 Pressure Controller
(3) MKS MFC's: N2 200 SCCM, O2 200 SCCM, Ar 200 SCCM
Meivac Model VQ6ASAUSM Throttle Valve
MKS 627B 1 Torr range capacitance manometer

Load Lock Included No
Number of Cathodes Three
Target Size 6"
Quantity of DC Cathodes 2
Quantity of RF Cathodes 1
Number of RF Etch Cathodes 0
Gas Inputs Three
Gas Input Control Mass Flow Controllers
Substrate Heaters No
Residual Gas Analyzer No
RF Generator 
  Manufacturer Advanced Energy
  Model RFXII 1250
  Rated Power Output 1250 Watts
  Matching Network Yes

All sputtering sources are magnetrons.

Other Information 

Manual/Automatic pump down control
Commonwealth Scientific 8cm gridded ion source.
Sycon Model STM-100/MF thickness/rate monitor
Lake Shore Modle 818 Cryopump Monitor
Advanced Energy MDX 5K Magnetron Drive
Advanced Energy RFXII-1250 13.56 MHz generator
Advanced Energy AZX 90 Tuner
Rotary substrate holder(holds up to 8" substrate)
Interior Chamber Dimensions: 21.5" x 21.5" x 21.5"

Power Requirements 240 V     80.0 A     60 Hz     3 Phase

(click name below to visit its website directly)
Capovani Brothers Inc.
Scotia , New York
Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions


Deal directly with Owner:  Capovani Brothers Inc. of Scotia, New York