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• Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
  • Remote water-cooled magnetron head,
  • Circulator with integrated directional coupler, and
  • Water-cooled dummy load.
• The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
• Testing of the goods can be expedited upon request.
• Photos are also available upon request.

• Compact, water-cooled waveguide-to-coax adaptor.
• Rectangular WR284 waveguide connection.
• 7/16" DIN Coax connection.
• SMA connection for integral reflected power measurement.
• Component is painted black and the waveguide appears to be machined from stainless steel.

• Cline Innovations has inventory of hardware related to the Astex AX2040 microwave generator. 
• Please don't hesitate to contact Cline Innovations if you are in need of components, magnetron tubes, or are seeking a complete generator set.

• WR284 waveguide elbow with one elongated side.
• One of two flanges has threaded holes (Helicoil inserts).

• Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
• This tuner design is intended for use with 2.45GHz microwaves. Astex sold tuners of this type for use on Astex generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale based on your application details.
• The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
• Refurbished as needed to ensure mechanical and electromagnetic functionality.
• These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment.  Other sellers may not.

• Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
• System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
• Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
• This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
• 1.5kW to 5kW microwave power input.
• 3 stage options: Cooled, Heated, or Thermally Floating.
• Integration with computer controls is strongly recommended.
• Chamber designs vary by vintage, but can be confirmed at the time of quotation.
• Please note that the chamber shown in the attached image is a new chamber.  The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.

• Pre-owned dual directional coupler with integrated flange interlock.
• WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
• Both couplers are factory rated for 60dB.
• Mechanical flange interlock can be removed if not needed.
• Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
• This directional coupler proved to be functional during past use on Cline Innovations' test bench.

• Aluminum rectangular waveguide component.
• Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
• Commonly used with higher power Astex microwave delivery systems & plasma sources.  
• Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
• The waveguide length is nominally 5.5 inches.  
• 10 through holes on each flange.
• Photos available upon request. 

• Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
• Intended for use on Astex generators with up to 1.5kW output such as S-1500i and S-1000i.

• Uses modified YJ1600 6kW magnetron tube.
• Includes N-type connector below the waveguide launch.
• Goods have not been tested due to lack of a compatible power supply. 
• Preliminary measurements on the magnetron tube suggest that it should be functional.
• Very good physical condition. 

Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.

• Astex WR340 black-painted aluminum waveguide component with 2 integrated directional couplers.  
• Each coupler is equipped with an N-type connection for power measurement.  The couplers are oriented in opposite directions so that one can measure forward power and the other can measure reflected power.
• This part was last calibrated on 1-6-14 and likely needs recalibration.  Cline Innovations may be in a position to coordinate recalibration at the time of sale.
• The lower right side of photo 1of3 shows that some paint scuffing has taken place on the outside of the waveguide.  This is a superficial blemish and the item is in Very Good physical condition.

• Cline Innovations has inventory of Astex HV Cables of various types and lengths. 
• Current inventory includes cables which fit AX2115, S-1500, S-1500i, A5000, and AX2040 microwave generators rated for as much as 10,000 Watts.
• Please don't hesitate to contact us if you are in need of a cable.  Please consider sharing photos and length information for your existing cable (if you have one) in addition to images of the back panel of your power supply.

• Used microwave goods.  At least one microwave-tested unit on hand as of 11/10/2025.
• WR340 2.45GHz microwave waveguide component designed for use with Astex A-5000 and AX2040 2.45GHz 5kW microwave delivery subsystems.
• Water-cooled with 3/8" Swagelok connections.
• Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
• Photos available upon request.

Magnetron Head

• Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
• Also available at Cline Innovations:
  • Associated microwave delivery hardware and power subsystems.
  • Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.

Conveyor ASYS BC0 02

SMIF LOAD PORT--300MM

Wafer Loader, Elevator

Cut-Off Saw

Air Shower

Atmos-Tech Industries MAT A/S

Cryogenic Compressor

Jacketed Autoclave with 2.0L Teflon Insert.

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605