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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
168803
MKS instruments  

MKS instruments  

Astex FI20047 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

FI20047 Water-Cooled Magnetron Head:
  • Mag Head for use with compatible MKS Astex series switching microwave power supplies.
  • This mag head design includes an orange colored Caton HV connector.
  • Goods in inventory may already have test history.  Testing may be possible at Cline Innovations.
  • Photos can be provided upon request.  
1   Leominster, Massachusetts
254253
Fusion Systems Inc.  

Fusion Systems Inc.  

200AC/ACU 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Burlington, Vermont
249550
Gerling  

Gerling  

GA2001 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

GAE GA2001 WR284 Waveguide to N Coax Transition:
  • Model GAE GA2001
  • Tag reads "Waveguide Trans CPR284 to N"
  • This is a WR284 rectangular waveguide microwave power transition to N-type coax.
1   Sterling, Massachusetts
254155
Gasonics  

Gasonics  

PEP3510A/A(L) 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

GASONICS PEP3510A/A(L), 200mm, s/n: M981940:

PHOTORESIST STRIPPING

1   Singapore
254156
Gasonics  

Gasonics  

PEP3510A/A(L) 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

GASONICS PEP3510A/A(L), 200mm, s/n: M982690:

PHOTORESIST STRIPPING

1   Singapore
215261
Gerling  

Gerling  

p/n 910677 c/n 403081 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Gerling GAE WR430 Dual Directional Microwave Coupler:
  • Used, in great condition.
  • Intended for use at 55.0 dB coupling factor (forward and reflected).
  • Waveguide length is nominally 5 inches port-to-port.
  • Images can be provided upon request.
1   Leominster, Massachusetts
197421
Gerling  

Gerling  

GL401A 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Gerling Laboratories 3-Port Circulator:
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Ceramic magnets look fine.
  • Round-flange connections.
  • Photos provided upon request.
1   Leominster, Massachusetts
214772
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):
  • Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
  • Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
  • If you need to connect to other waveguide types like WR284, adaptors may be available. 
  • An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  The assembly example in the image is available for sale as of 5/7/2020.
  • Please contact Cline Innovations to discuss your needs.
1   Leominster, Massachusetts
257454
Muegge  

Muegge  

 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

High Power Microwave Dummy Load for 10,000 Watts:
  • Suitable for at least 10kW continuous microwave input at 2.45GHz.
  • 1/4" BSPP female water connections.
  • Flange type: UDR
  • Waveguide Size: WR430 Rectangular (R22)
  • New Condition
1   N* Sterling, Massachusetts
142856
Japan Radio Co.  

Japan Radio Co.  

NAH-1030-2A/NFC-30-2A 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

JAPAN RADIO CO. RF GENERATOR/MATCHING NETWORK:

RF Generator/Matching Network

2   Scotia, New York
255099
LAM Research Corp.  

LAM Research Corp.  

2300 Exelan Flex 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

LAM 2300 Exelan Flex, 300mm, s/n: 93180:

Oxide ETCH

1   Singapore
249968
LAM Research Corp.  

LAM Research Corp.  

Dual Speed 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   East Fishkill, New York
256750
LAM Research Corp.  

LAM Research Corp.  

Alliance 9400 PTX 

List all items of this typeCluster Plasma Tools - Poly/Nitride

in Cluster Plasma Tools

LAM Alliance 9400 PTX:

Mainframe with 3 Plasmachambers

C-Upgrade in 2024

Mainframe and 2 Plasmachambers fully usable

1 Plasmachamber Hardware incomplete

1   N* Regensburg, Bavaria
255827
LAM Research Corp.  

LAM Research Corp.  

2300 Kiyo 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

Lam Kiyo Chamber L2301-B:

Semiconductor ETC Chamber with RF Cart

Incl. Gasbox and Rocker Valve

in production until January 2023
1   Villach, Carinthia
254145
LAM Research Corp.  

LAM Research Corp.  

Novellus Speed 

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in Plasma Processing Equipment

1   Singapore
254144
LAM Research Corp.  

LAM Research Corp.  

Novellus Speed 

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in Plasma Processing Equipment

1   Singapore
252330
LAM Research Corp.  

LAM Research Corp.  

9600SE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

Lam Research 9600SE Rainbow Metal Etch Tool:

Lam Research 9600SE Rainbow Metal Etch Tool

  • Rainbow Configuration Includes Post-Etch PR Strip Chamber
  • Envision Software
  • Configured for 200mm Wafers
  • Currently Running in Fab – 9/16/2024
1   Plano, Texas
34890
LAM Research Co  

LAM Research Co  

490 AUTO ETCH 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

LAM RESEARCH SIX INCH NITRIDE ETCHER:

Six Inch Nitride Etcher

Automated Cassette to Cassette single wafer etching.

1   F* Scotia, New York
219677
LAM Research Corp.  

LAM Research Corp.  

INOVA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

LAM, INOVA, 300mm, S/N 007823-0389:

LAM, INOVA, 300mm, S/N 007823-0389

1   Malta, New York
108528
March Instruments  

March Instruments  

PM-600 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT:

Barrel Plasma Etcher with Vacuum Pump
March Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH.

1   F* Scotia, New York
51482
March Instruments  

March Instruments  

SUPERPLASMOD 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

MARCH INSTRUMENTS PLASMA CLEANER:

Plasma Cleaner with 300W Power Supply

2   F* Scotia, New York
177136
March Instruments  

March Instruments  

PX-2400 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz:
Box Plasma Etcher

Applications
"Gas plasma treatment provides a fast, efficient method for
surface treatment and cleaning prior to wire bonding, die
attach, encapsulation, conformal coating and other processes.
Plasma processing enhances lamination bondstrength, improves
wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson.

1   Scotia, New York
257351
March Instruments  

March Instruments  

PX-500 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

MARCH NORDSON BOX PLASMA ETCHER 600 WATT 13.56 MHZ:

Box Plasma Etcher

1   N* Scotia, New York
199963
March Instruments  

March Instruments  

PX-500 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

MARCH NORDSON BOX PLASMA ETCHER 600 WATT 13.56 MHZ:

Box Plasma Etcher

1   Scotia, New York
254142
Mattson Technology  

Mattson Technology  

ASPEN 2 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

1   Singapore
254143
Mattson Technology  

Mattson Technology  

ASPEN 2 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

1   Singapore
254140
Mattson Technology  

Mattson Technology  

ASPEN 2 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

1   Singapore
254141
Mattson Technology  

Mattson Technology  

ASPEN 2 

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in Plasma Resist Strippers

1   Singapore
241157
Mattison  

Mattison  

MILLIOS HVM 

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in Plasma Processing Equipment

Mattson, MILLIOS HVM, 300mm, s/n: 11043001, 09130001, 09250001:

Mattson, MILLIOS HVM, 300mm, s/n: 11043001, 09130001, 09250001

1   Malta, New York
59142
Metroline  

Metroline  

M4L 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

METROLINE BOX PLASMA ETCHER:

Box Plasma Etcher

1   F* Scotia, New York
214758
Applied Materials  

Applied Materials  

FI20064  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Microwave Phase Mag Detector :
  • One unit in inventory. 
  • Please inquire for details, photos, etc.
1   Leominster, Massachusetts
220461
MKS instruments  

MKS instruments  

Astex FI20161-1 Fl20161-1 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

1   Leominster, Massachusetts
220462
MKS instruments  

MKS instruments  

Astex FI20161 Fl20161 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

1   Leominster, Massachusetts
213290
MKS instruments  

MKS instruments  

SM445.0 SM-445 SM445 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

MKS Alter SM 445 Switch Mode Microwave Power Supply:
  • Air-cooled, rack-mounted microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
  • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
  • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.

 

1   F* Leominster, Massachusetts
184616
MKS Instruments  

MKS Instruments  

AX2530PPD or equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

MKS Astex 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
1   Leominster, Massachusetts
237494
MKS instruments  

MKS instruments  

AX2560PPD or equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

MKS Astex 6kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
1   Leominster, Massachusetts
223137
MKS instruments  

MKS instruments  

FI20164 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

MKS Astex FI20164 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
  • Physical aesthetic condition is excellent.
1   Leominster, Massachusetts
236650
Muegge  

Muegge  

MW1003A-210EC 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Muegge 3kW Water-Cooled Microwave Isolator:
  • Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • All necessary 6mm metric fasteners.
  • Dummy load includes a microwave coupler with an N-type power measurement connection.
  • This isolator is used, but Dummy Load and Circulator sections are still factory-sealed with gray-paint applied to 6mm hex bolts.
  • Additional photos are available upon request.
1   Leominster, Massachusetts
203376
National Electronics  

National Electronics  

WR340TUNERA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

National Electronics WR340TunerA:
  • One used unit available in inventory.  Unit is functional, but one or more precision dials need to be replaced before shipment.
  • Actual unit may vary from one shown in photos.  We had 2 of these unit in stock, but only one is left in inventory.
  • From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator.  The sum of the two impedances is then seen by the power source as a matched load."
  • At 2450MHz:
    • VSWR:  from 1 to 5
    • Power:  3kW
    • Waveguide type:  WR340
1   Leominster, Massachusetts
196788
National Electronics  

National Electronics  

YJ 1600, YJ-1600 NL 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

National Electronics YJ1600 6kW magnetron tube:
  • Cline Innovations has inventory of YJ1600 magnetron tubes. 
  • Both NEW and USED tubes may be available.  Tube ages and conditions vary. 
  • Most tubes are the conventional YJ1600 design, but some tubes may be available in special water cooling or high-voltage flying-lead configurations.
  • A Limited Warranty may apply depending on factors including customer's intended application & microwave delivery configuration.
  • In general, Cline Innovations coordinates testing of tubes prior to sale unless negotiated otherwise. 
  • Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage. 
  • Cline Innovations double-boxes tubes when shipped to customers.
1   Leominster, Massachusetts
143041
National Electronic  

National Electronic  

MH3.OW-SL 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

NATIONAL ELECTRONICS/RICHARDSON MICROWAVE MAGNETRON HEAD:

Microwave Magnetron Head

2   Scotia, New York
249043
Nexx Systems  

Nexx Systems  

STRATUS S300 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

NEXX STRATUS S300, 300mm, s/n: S00000131:

PLT03 NEXX STRATUS S300-FX ELECTROPLATING TOOL with ANCOSYS AUTOMATED ANALYSIS AND DOSING Unit

1   East Fishkill, New York
249044
Nexx Systems  

Nexx Systems  

APOLLO HP 

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in Plasma Processing Equipment

NEXX APOLLO HP, 300mm, s/n: 379:

TEL NEXX APOLLO HP PVD SYSTEM SPT03

1   East Fishkill, New York
239647
Novellus Systems  

Novellus Systems  

INOVA NEXT 

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in Plasma Processing Equipment

NOVELLUS, INOVA NEXT, s/n M23321A, 300mm:

NOVELLUS, INOVA NEXT, s/n M23321A, 300mm

1   Malta, New York
254376
Oerlikon  

Oerlikon  

Clusterline 300 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Dresden, Saxony
244285
Oxford Instruments  

Oxford Instruments  

OPAL 

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in Plasma Processing Equipment

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool:

OXFORD INSTRUMENTS, OPAL, sn: 94-220255, RF/Plasma oxide deposition tool

1   Malta, New York
208462
Plasma-finish  

Plasma-finish  

V15G 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT:

Plasma Box Etcher System

PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish

1   Scotia, New York
225948
Plasma-Therm  

Plasma-Therm  

790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:

PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F

  • Manually Loaded Process Chamber with 8” (dia.) Cathode
  • Gas Distribution Panel with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 Auto Matching Network
  • RFPP AMNPS-2A Auto Matching Network Controller
  • Leybold TMP 361 Turbomolecular Pump
  • Leybold NT 150/360 Turbomolecular Pump Controller
  • EquipmentWorks 2.6 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
  • All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 21” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP40 Dry Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 Ph
  • System Fully Refurbished & Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price……$ 80,000.00 USD
1 80,021.44 Plano, Texas
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:

Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

 

1   Scotia, New York
4054
Plasma-Therm  

Plasma-Therm  

73/74 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:

Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems

1   Scotia, New York
251431
Plasma-Therm  

Plasma-Therm  

SLR-770 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMA-THERM SLR 770 ICP Plasma Etcher:

PLASMA-THERM SLR 770 Inductively Coupled Plasma Etcher

  • Single Process Chamber with SLR (Shuttle Lock Transfer) Load Lock
  • Manual Load with Load Lock Handling Currently Configured for 4” Wafers
  • Ceramic Wafer Clamp with Helium Backside Cooling System
  • Gas Distribution Box with 5ea Gas Channels
  • ENI ACG-6 RF Generator: 600W @ 13.56MHz
  • ENI Automatic Matching Network
  • RFPP RF20M RF Generator: 2000W @ 2.0MHz
  • RFPP Automatic Matching Network
  • Six Zone Chamber Heater with Temperature Controller
  • LEYBOLD 900 Turbo Pump with Mag 1000 Controller
  • MKS ITR Ion Gauge Controller
  • VAT Gate Valve with PM-5 Controller
  • Mechanical Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 phase
1   Plano, Texas
165893
PlasmaQuest  

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

PlasmaQuest Microwave-ECR Plasma system:
  • This 6-inch Load-Lock PlasmaQuest high density plasma tool was built for for plasma etching, but also offers potential as a unique PECVD deposition tool.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
  • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
  • Originally equipped with a 1000W, but higher input power may be viable.
  • Both "as is" sale as well as full refurbishment for etch and/or PECVD processing can be considered.
  • Configured with 2 modules including power & controls rack and vacuum module.
1   Leominster, Massachusetts
206582
Plasma-Therm  

Plasma-Therm  

BT 6" RIE MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":

Reactive Ion Etch System

BatchTop VII

1   Scotia, New York
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

PLASMATHERM ICP PLASMA ETCHER:

Inductively Coupled Plasma Etcher with 9.5 Inch Electrode

1   F* Scotia, New York
201152
Plasma-Therm  

Plasma-Therm  

790 RIE PECVD 11" 

List all items of this typeEtchers - Other

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PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.


1   Scotia, New York
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:

Shuttle Load Lock System

1   Scotia, New York
230353
Advanced Energy  

Advanced Energy  

B0111-DPXX-105-XX 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Profibus communication board for Advanced Energy CESAR generators:

Profibus communication board for Advanced Energy CESAR generators

5   Scotia, New York
197844
Sairem  

Sairem  

6kW  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Sairem 6kW Water-Cooled Microwave Isolator:
  • 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
  • Circulator and Dummy Load sections are still factory-sealed together. 
2   Leominster, Massachusetts
253449
SEMIgear  

SEMIgear  

Geneva STP300 

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SEMIgear Geneva STP300, 300mm, s/n: S16100110:

Solder Reflow + Tin Shell Bake

1   Dresden, Saxony
249042
SEMIgear  

SEMIgear  

Geneva 

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SEMIgear Geneva, 300mm, s/n: S16100101:

RFL02 SemiGEAR Reflow Tool

1   East Fishkill, New York
179021
Seren  

Seren  

CEX-6 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

SEREN IPS COMMON EXCITER:

Common Exciter - Part number 9500170000

2   Scotia, New York
126554
Seren  

Seren  

IPS-R300 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

SEREN RF GENERATOR POWER SUPPLY 300W 13.56 MHz:

RF Generator

1 3,100.83 Scotia, New York
179019
Seren  

Seren  

R601 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

SEREN RF GENERATOR, 600 WATTS:

RF Generator
Part number 9600610028.

6   Scotia, New York
240477
SOLVISION  

SOLVISION  

PRECIS 3D 

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in Plasma Processing Equipment

SOLVISION, PRECIS 3D, s/n: C1W010150609:

SOLVISION, PRECIS 3D, s/n: C1W010150609

1   F* Dresden, Saxony
231656
SPI Supplies  

SPI Supplies  

Plasma Prep III 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

SPI BENCHTOP PLASMA ETCHER 100 WATT:

Solid State Plasma Etcher/Asher

1 6,501.74 Scotia, New York
84296
Surface Tech Sys  

Surface Tech Sys  

308 PC 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

STS SURFACE TECHNOLOGY SYSTEMS BARREL PLASA ETCHER 600 WATT:
Barrel Plasma Etcher
1   Scotia, NY
147500
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP HR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:

Chlorine Etcher - Year 2003

1   Scotia, New York
102178
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP ASE HR 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:

Silicon Etcher - Year 2003

1   Scotia, New York
184779
Technics  

Technics  

Micro Stripper -- Series 200 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:

Technics Micro Stripper Series 200 Plasma System

1   F* Scotia, New York
251748
Tel  

Tel  

Alpha 303i 

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in Plasma Processing Equipment

1   Dresden, Saxony
250977
Tel  

Tel  

ALPHA 8S 

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in Plasma Processing Equipment

1   Singapore
250978
Tel  

Tel  

ALPHA 8S 

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in Plasma Processing Equipment

1   Singapore
251093
Tel  

Tel  

Alpha-303i 

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in Plasma Processing Equipment

1   Singapore
251094
Tel  

Tel  

Alpha-303i 

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in Plasma Processing Equipment

1   Singapore
254125
Tel  

Tel  

ALPHA-808S 

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in Plasma Processing Equipment

1   Singapore
254133
Tel  

Tel  

ALPHA-808S 

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in Plasma Processing Equipment

1   Singapore
254128
Tel  

Tel  

ALPHA-808S 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Singapore
254129
Tel  

Tel  

ALPHA-808S 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Singapore
254130
Tel  

Tel  

ALPHA-808S 

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in Plasma Processing Equipment

1   Singapore
251089
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Tel  

ALPHA-808S 

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in Plasma Processing Equipment

1   Singapore
254135
Tel  

Tel  

ALPHA-808SC 

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in Plasma Processing Equipment

1   Singapore
254127
Tel  

Tel  

ALPHA-808SC 

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in Plasma Processing Equipment

1   Singapore
254136
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Tel  

ALPHA-808SC 

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in Plasma Processing Equipment

1   Singapore
254131
Tel  

Tel  

ALPHA-8S-D 

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1   Singapore
254132
Tel  

Tel  

ALPHA-8S-Z 

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in Plasma Processing Equipment

1   Singapore
254134
Tel  

Tel  

ALPHA-8S-Z 

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in Plasma Processing Equipment

1   Singapore
254126
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Tel  

ALPHA-8S-Z 

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in Plasma Processing Equipment

1   Singapore
251090
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Tel  

ALPHA-8S-Z 

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in Plasma Processing Equipment

1   Singapore
250314
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Tel  

ALPHA-8S-Z 

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in Plasma Processing Equipment

1   Singapore
257154
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Tel  

FORMULA-1S-H 

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1   Singapore
257155
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Tel  

FORMULA-1S-H 

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1   Singapore
257156
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Tel  

FORMULA-1S-H 

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in Plasma Processing Equipment

1   Singapore
249576
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Tel  

SYNAPSE V BONDER 

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1   East Fishkill, New York
250592
Tel  

Tel  

TELIUS 

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1   East Fishkill, New York
254120
Tel  

Tel  

U2E-855DD 

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TEL U2E-855DD, 200mm, U00769:

UNITY 2E OXIDE ETCHER

1   Singapore
181401
Tepla  

Tepla  

4011 

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TEPLA PLASMA ETCHER 4000 WATT:

Planar Plasma Etcher

1   F* Scotia, New York
119294
Trion Technology  

Trion Technology  

Oracle 

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TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:

Dielectric Cluster Tool


Trion Technology Oracle

1   F* Scotia, New York
126704
Ulvac  

Ulvac  

NE 7800 Ferroelectric Etcher 

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ULVAC FERROELECTRIC ETCHER:

Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.

 

1   F* Scotia, New York
214757
Applied Materials  

Applied Materials  

FI20132 0040-36436 

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Waveguide Elbow with mounting bolts / springs:
  • WR284 90-degree, Waveguide Elbow with Mounts.
  • Only one unit on-hand.  Please inquire for details, photos, etc
1   Leominster, Massachusetts
202813
HNL Inc.  

HNL Inc.  

AMAT 0190-00362 

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WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
  • Microwave waveguide elbow with black painted orange peel finish.
  • WR284 rectangular waveguide with rectangular flanges.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
1   Leominster, Massachusetts
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*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Plasma Processing Equipment:
Advanced Energy, Advanced Plasma System, Inc., AMAT, Applied Materials, Inc., ASM, Astex, Axcelis Technologies, Inc., Axcelis/Eaton, Axcelis/Fusion, Balzers, Branson/IPC, Cober, Comdel, Connecticut Microwave, Daihen, ENI Power Systems, Fusion Systems Inc., Gasonics, Gerling, HNL Inc., Japan Radio Co., LAM Research Corp., March Instruments, Mattison, Mattson Technology, Metroline, MKS Instruments, Inc., Muegge, National Electronic, National Electronics, Nexx Systems, Novellus Systems, Oerlikon, Oxford Instruments, Plasma-finish Enterprise, Plasma-Therm, PlasmaQuest, Sairem, SEMIgear, Seren, SOLVISION, SPI Supplies, Surface Technology Systems, Technics, Tel, Tepla, Trion Technology, Ulvac, Waveline, Yield Engineering Systems