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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
225959
Applied Materials  

Applied Materials  

 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1   Scotia, New York
87949
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

APPLIED MATERIALS SYSTEM ELECTRONICS RACK:

System Electronics Rack

1   Scotia, New York
114961
Advanced Plasma Syst  

Advanced Plasma Syst  

B Series-4 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM. :

Plasma Treatment System
Desmear/Etchback


Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson.
Both companies merged and are an entity of Nordson - now called Nordson MARCH.

1   F* Scotia, New York
249547
ASM  

ASM  

Epsilon 3000 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASM Epsilon 3000, s/n: 033160, 300mm, CMD2:

300MM ASM Epsilon 3000 EPI HEX CMD2

1   East Fishkill, New York
249546
ASM  

ASM  

Epsilon 3000 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASM Epsilon 3000, s/n: 033240, 300mm, CMD1:

300MM ASME 3000 EPI HEX CMD1

1   East Fishkill, New York
255502
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Advance - OFENV06C:

ASM Furnace Vertical - Advance 400

2 Reactors atmospheric

 

1   Villach, Carinthia
255500
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV01D:

OFENV01D
Furnace with 2 Tubes

1x Reactor Dot. Poly Low Pressure

1x Reactor Atmosphere WET-OXID

1   Villach, Carinthia
255501
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV05C:

ASM Furnace Vertical - Advance 400

2 Reactor atmospheric

Robot defect and need service 

1   Villach, Carinthia
255503
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV06D:

ASM Furnace Vertical - Advance 400

2x Reactor Dot. Poly Low Pressure

1   Villach, Carinthia
255504
ASM  

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV07C:

ASM Furnace Vertical 

2 Reactor atmospheric

Reactor 1 is missing heater cassette, Motor driver, Board and loader arm

 

1   Villach, Carinthia
254474
ASML  

ASML  

AT400C 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Singapore
254366
ASML  

ASML  

AT850C 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Singapore
254365
ASML  

ASML  

AT850C 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Singapore
254257
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254256
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254107
ASML  

ASML  

NXT1950i 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Malta, New York
254111
ASML  

ASML  

XT1400E 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Singapore
254110
ASML  

ASML  

XT1900Gi 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

ASML XT1900Gi, 300mm, s/n: 5884:

Immersion scanner

1   Singapore
254199
ASML  

ASML  

Yieldstar S-200B 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Dresden, Saxony
165746
MKS instruments  

MKS instruments  

FI20166 (3750-01147) 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex (AMAT) 3kW SmartMatch Tuner:
  • 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
  • Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
  • Coordination of this repair may be possible in conjunction with the sale. 
1   Leominster, Massachusetts
183180
MKS Instruments  

MKS Instruments  

FI20634 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex (MKS) SmartMatch Tuner with Integrated PPD:
  • This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
  • This item seemed to function normally and progressed to a "Ready" status during initial tests of SmartMatch unit. 
  • Detailed photos can be provided upon request.
1   Leominster, Massachusetts
213304
MKS instruments  

MKS instruments  

Astex 1.0kW AX3060 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 1.0kW AX3060 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex 1.0kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
1   Leominster, Massachusetts
211656
MKS instruments  

MKS instruments  

AX3060-1 for AX2115 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 1.5kW AX3060-1 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex AX2115 1.5kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
  • Unit will be removed from plasma system and physical condition looks great.
1   Leominster, Massachusetts
190326
Astex  

Astex  

Astex WR340 Circulator 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 3-way Circulator or Equivalent:
  • Offered as used, microwave-tested goods.
  • Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
  • Equipped with a reflected power coupler & associated SMA connector at Port 3.
  • This component design was commonly used on 1990s-vintage Astex high power microwave generators.  It also offers potential utility for non-Astex microwave delivery systems.
  • Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
  • Photos available upon request.
1   Leominster, Massachusetts
209065
Astex  

Astex  

FI20131 Fl20131 3750-01139 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 90-degree Waveguide Elbow:
  • Used goods.
  • Aluminum waveguide with black orange-peel painted exterior.
  • Threaded holes on both flanges (Helicoil inserts).
2   Leominster, Massachusetts
203295
MKS instruments  

MKS instruments  

FI20608, Fl20608 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX 90-degree Waveguide Elbow:
  • Waveguide elbow with 90-degree bend.
  • Aluminum component with black orange-peel paint commonly used on ASTEX goods.
  • 1 of 2 flanges has threaded holes which accept 1/4-20 bolts.
  • 4 images attached show the condition of one of used parts.
  • On-site microwave testing may be possible upon request.
3   F* Leominster, Massachusetts
255066
Astex  

Astex  

A 5000 A5000 A-5000 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex A5000 5kW Industrial Microwave Generator Set:
  • Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
    • Remote water-cooled magnetron head,
    • Circulator with integrated directional coupler, and
    • Water-cooled dummy load.
  • The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
  • Testing of the goods can be expedited upon request.
  • Photos are also available upon request.
1   Sterling, Massachusetts
225956
Astex  

Astex  

Astex AX2050 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex AX2050 Microwave Generator Set:
  • Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator with integrated directional coupler.
    • All interconnecting cables for the above components.
  • Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
  • This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
  • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
  • A limited warranty can be considered depending on the application.
  • Photos available upon request.
1   Leominster, Massachusetts
255065
Astex  

Astex  

Astex AX2107 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex AX2107 700W Microwave Generator:
  • Cline Innovations has a used AX2107 rack-mounted switching power supply which was previously used on a microwave plasma system in a clean-room setting.  
  • Goods available as a power supply only or as a complete 700W microwave generator set including cables as well as WR284 waveguide components including: remote magnetron head, circulator with integrated directional coupler, and dummy load.
  • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  
  • This specific generator set came from a working system used in an R&D setting.  Testing of the goods can be expedited upon request.
  • Photos are also available upon request.
1   Sterling, Massachusetts
213180
Astex  

Astex  

Astex AX2518 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ASTeX AX2518 SmartPower 1.8kW Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
2   Leominster, Massachusetts
165747
Astex  

Astex  

AX3032 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex AX3032 (or equivalent) Water-Cooled Circulator & Coupler:
  • Water-cooled, 3-way circulator with integrated directional coupler, signal processing board.
  • DSubminiature 9-pin connection (for reflected power signal).
  • WR284 waveguide component intended for use with Astex 2.5kW microwave generators including AX2050.
1   Sterling, Massachusetts
254281
MKS instruments  

MKS instruments  

AX3120 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex AX3120 Air-Cooled Microwave Circulator:
  • Cline Innovations has an air-cooled Astex circulator intended for use on AX2100 series microwave generators including the AX2115 generator with 1.5kW max 2.45GHz output.
  • Goods to be pulled from a waveguide assembly removed from a plasma processing tool.  Careful inspection of the ceramic magnet will be performed at the time of disassembly.
  • This disassembly can be expedited & photos can be provided upon request.
1   Sterling, Massachusetts
165749
Astex  

Astex  

AX3153 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex AX3153 or equivalent Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
1   Sterling, Massachusetts
184607
Astex  

Astex  

AX5000, AX6000, AX6350 or similar 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

Astex AX5000 Microwave Plasma Diamond Growth System:
  • Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
  • System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
  • Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
  • This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
  • 1.5kW to 5kW microwave power input.
  • 3 stage options: Cooled, Heated, or Thermally Floating.
  • Integration with computer controls is strongly recommended.
  • Chamber designs vary by vintage, but can be confirmed at the time of quotation.
  • Please note that the chamber shown in the attached image is a new chamber.  The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
1   F* Leominster, Massachusetts
189843
Astex  

Astex  

AX6500 "Clamshell" MPCVD 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

Astex AX6500 Bottom-launch Diamond Growth System:
  • This in-stock equipment is offered for domestic sale within the USA only. 
  • Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
  • Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
  • System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
    • Chamber cleaning,
    • Computer control updates,
    • Higher throughput water cooling subsystem,
    • Replacement of selected o-ring components with metal seals, and
    • Enhanced process control/monitoring devices.
  • The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
  • Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
  • Photo Note: System photo shown include a similar quality, similar vintage system sold in the past.  Actual photos or inspection available to qualified customers only.
1   Leominster, Massachusetts
63666
Astex  

Astex  

AX 7610 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE:

Chemical Downstream Plasma Source

Applied Materials part number: 3750-0112

2   Scotia, New York
165750
Astex  

Astex  

CS2 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex CS2 Circulator with Directional Coupler:
  • Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
  • Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
1   Sterling, MA
184653
Astex  

Astex  

FI20170 (0760-01028) AMAT Ulvac 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex FI20170 Water-Cooled Circulator (or Equivalent):
  • This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.  
  • The integrated coupler measures reflected power using a diode senor.  The reflected power signal is processed using an integral circuit-board designed into the coupler.  Output is provided using a 9-pin male D-subminature connector.
  • These goods may also be compatible with Astex subsystems for non-OEM applications. 
  • Goods are most typically integrated with 2.5kW microwave delivery systems.
  • Photos included in this listing are for reference only.  The actual circulator shown in this listing has been sold, but depicts the general design.
  • Please contact Cline Innovations for more information.
1   Sterling, Massachusetts
137483
Astex  

Astex  

ECR-Microwave Plasma 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

ASTeX High Power, Low Pressure Microwave Plasma System :

Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.

1   Leominster, Massachusetts
168802
Astex  

Astex  

Astex Model HS 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, Massachusetts
168804
Astex  

Astex  

Astex HS-1000 or HS1000 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex HS-1000 Air-Cooled 1000W Magnetron Head:
  • For use with compatible Astex 1kW switching microwave power supplies.
1   Leominster, Massachusetts
257457
Astex HS5000 5kW magnetron head or equivalent 
Astex HS5000 5kW magnetron head or equivalent 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex HS5000 5kW magnetron head or equivalent:
  • Water-cooled and air-cooled remote magnetron head.
  • Equipped with waveguide arc detector.
  • WR340 output waveguide.
1   N* Sterling, Massachusetts
206579
Astex  

Astex  

SXRHA 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ASTEX MAGNETRON HEAD:

Magnetron Head

2   Scotia, New York
254280
MKS instruments  

MKS instruments  

Astex ASO2555-55 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex MKS Microwave 55-foot HV Cable for AX2115:
  • Long Hight Voltage Cable for OEM Semiconductor Tools including AMAT.
  • This cable interconnects cetain Astex rack-mounted power supplies to remote magnetron heads.  It is being offered is in excellent, possibly new, condition.
  • This 4-pin heavy-duty cable has Cannon military connectors on each end and is marked/rated for 10,000 DC Max voltage & 105 degrees Celsius Max.
  • Photos can be provided upon request.
1   Sterling, Massachusetts
254384
Astex  

Astex  

(AGL) Astex B13171  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex Model B13171 Microwave Dual Directional Coupler:
  • Pre-owned dual directional coupler with integrated flange interlock.
  • WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
  • Both couplers are factory rated for 60dB.
  • Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
  • Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
  • Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past. 
  • Photos and further information can be provided upon request.
1   Leominster, Massachusetts
202814
Astex  

Astex  

Model TS or Equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX Three Stub Manual Microwave Impedance Tuner:
  • Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
  • This tuner design is intended for use with 2.45GHz microwaves. 
  • Astex sold goods of this general design for use on generators rated for outputs of up to 5kW.  Actual rating can be clarified at the time of sale in relation to your application details.
  • The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
  • Refurbished as needed to ensure mechanical and electromagnetic functionality.
  • These dials can age or get jammed due to impact.  Cline Innovations replaces dials and components as needed during refurbishment.
1   Leominster, Massachusetts
85963
Astex  

Astex  

AX3041 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX THREE STUB TUNER:

Three Stub Tuner

1 1,200.32 Scotia, New York
165710
Astex  

Astex  

Model LS or Equivalent/Substitute 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex Water-Cooled Dummy Load for use with 1.5kW systems:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
  • Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
  • New, surplus goods may be available.
1   Sterling, Massachusetts
248913
Astex  

Astex  

AX3030 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok adaptors.
  • Design intended for up to 500W continuous reflected power. 
  • Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
  • Photos available upon request.
1   Leominster, Massachusetts
190257
Astex  

Astex  

CPR340 or equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex WR284 to WR340 Waveguide Adaptor:
  • Aluminum rectangular waveguide component.
  • Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
  • Commonly used with higher power Astex microwave delivery systems & plasma sources.  
  • Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
  • Approximate length is 5 to 6 inches.
1   Leominster, Massachusetts
184611
Astex  

Astex  

Astex WR340 Dummy Load 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex WR340 Water-Cooled Dummy Load:
  • Offered as used, microwave-tested goods.
  • WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
  • Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
  • Photos available upon request.
2   Leominster, Massachusetts
244884
Asyst Technologies  

Asyst Technologies  

9700-5640-01 

List all items of this typeWafer Transfer Units

in Robotics

ASYST BROOKS AUTOMATION 300MM LOAD PORT :

New Never Used

2   Scotia, New York
178844
Asyst Technologies  

Asyst Technologies  

300FL,S3,25WFR 

List all items of this typeWafer Transfer Units

in Robotics

ASYST TECHNOLOGIES LOAD PORT:

SMIF LOAD PORT--300MM

2   Scotia, New York
97997
Asyst Technologies  

Asyst Technologies  

ELEVATOR 

List all items of this typeWafer Transfer Units

in Robotics

ASYST TECHNOLOGIES WAFER LOADER:

Wafer Loader, Elevator

1 2,425.65 F* Scotia, New York
254254
Axcelis/Fusion  

Axcelis/Fusion  

200ACU 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Burlington, Vermont
254377
Axcelis Technologies  

Axcelis Technologies  

INTEGRA ES 3CH / INT340 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AXCELIS INT340, 300mm, s/n: INT340029:

AXCELIS INTEGRA ES 3CH / INT340

NH3 Plasmastrip

1   Dresden, Saxony
254162
Axcelis Technologies  

Axcelis Technologies  

NV-GSD/HE 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

1   Singapore
252684
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605

1   Kulim, Kedah
252685
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

MCINV8202

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100001850

1   Kulim, Kedah
256469
Axcelis/Eaton  

Axcelis/Eaton  

NV8250HT 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis NV8250HT:
Equipment Konfiguration: 
Type:NV8250HT
Energy Config:0 - 250Kv Midcurrent
Serialnumber:908
Build Year:2002
Date of first usage:buyed new from vendor
Current Condition: Good
CE-Conformity:Yes
Location:greyroom
Voltage:208V
Cryo-Pumps:3x CTI/Edwards Onboard: OB-8
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003C
Rough-Pumps:Edwards: without QDP40, not included
Endstation Rough-Pump:not included
Wafersize:8inch(200mm)
Clamp-Type:E-Chuck green with Non-µC Controller
Wafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)
Gasbox:Modular 5-String, 4x 2,0L Size
String1:Argon Carriergas; MFC Unit-1662 2sccm BF3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3
String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3
String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
Beam-Profiler Type:Belt-Drive
Gear-Type's:Scan: Planetary  Tilt: Planetary
Source-Type:ELS4 IHC-Source without Vaporizer
HV-Transformer:Silicon-Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSolaris SUN AXI 3HE (Special case)
Second-WorkstationSolaris SUN Sparc5
Software-Version:5.1.4.1
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:177 Type
Notes:Upper-Rack Panel missing
 Clean-Room Table missing on frontside
 all 4 wheels on oil-isolation transformer are broken
 Minor modifications on tool
 No Manual-Set/ no Spares include
 tool was used 24/7 full in production between 15 and 230kv Energy
 If required, tool can be inspected on site, but no Power
1   N* Regensburg, Bavaria
254167
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
254164
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
254163
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

AXCELIS PCU 200, 200mm, s/n: PU6C289X:

PHOTOSTABILIZER

1   Singapore
254165
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
254166
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

1   Singapore
243574
Axcelis Technologies  

Axcelis Technologies  

Optima MD 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis, Optima MD, 300mm, s/n: 083011, IMP203:

Axcelis, Optima MD, 300mm, s/n: 083011

Medium Current Implant

1   Dresden, Saxony
243575
Axcelis Technologies  

Axcelis Technologies  

Optima MD 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis, Optima MD, 300mm, s/n: 083015, IMP205:

Axcelis, Optima MD, 300mm, s/n: 083015

Medium Current Implant

1   Dresden, Saxony
250598
Axcelis Technologies  

Axcelis Technologies  

OPTIMA_HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

1   Dresden, Saxony
427
Balzers  

Balzers  

RFS 302 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

BALZERS RF POWER SUPPLY:

RF Power Supply

1   Scotia, New York
44185
Suss MicroTec  

Suss MicroTec  

RESPECT 600 

List all items of this typeManual Photoresist Coaters

in Photoresist Coaters

BLE RESPECT AUTOMATIC PHOTORESIST COATER:

Automatic Photoresist Coater
 


System is designed exclusively to coat and bake substrates
using spinning and heating techniques.

BLE was acquired by Suss Microtec

1   F* Scotia, New York
44184
Suss MicroTec  

Suss MicroTec  

Respect 600 

List all items of this typeManual Photoresist Developers

in Photoresist Developers

BLE RESPECT AUTOMATIC PHOTORESIST DEVELOPER:


System is designed exclusively to develop and bake substrates
using spinning and heating techniques

BLE was acquired by Suss Microtec

1   F* Scotia, New York
3882
Bold Technologies  

Bold Technologies  

N/A 

List all items of this typeAcid Wet Stations

in Wet Processing Equipment

BOLD TECHNOLOGIES SEMI-AUTOMATED ACID WET BENCH SYSTEM:

Semi-Automated Acid Wet Bench System

1   F* Scotia, New York
139078
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson / IPC 4055/2:
Plasma Surface Treatment Tool
1   Plano, TX
154299
Branson/IPC  

Branson/IPC  

3000C 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

1   Plano, TX
126550
Branson/IPC  

Branson/IPC  

P3075/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON BARREL RESIST STRIPPER:

Barrel Resist Stripper

Branson P3075/2

1   F* Scotia, New York
189210
Branson/IPC  

Branson/IPC  

4155/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON PLASMA ASHER/ETCHER:

Plasma Asher/Etcher

1   Scotia, New York
223494
Branson/IPC  

Branson/IPC  

P2100 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON PLASMA STRIPPER 1250 WATT:

Plasma Resist Stripper 

Quartz Barrel - Solid State RF Generator

1   Scotia, New York
189241
Branson/IPC  

Branson/IPC  

7102 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

BRANSON TEPLA PVA PLASMA ETCHER 1000 WATT:

Plasma Etcher

1   F* Scotia, New York
152146
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Surface Treatment Tool
1   F* Plano, TX
152147
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Treatment Surface Tool
1   F* Plano, TX
49911
Branson/IPC  

Branson/IPC  

S-3100 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC S-3100:
Plasma Barrell Stripper, 12" x 20" Quartz
1   Plano, TX
251432
Branson/IPC  

Branson/IPC  

Series 2000 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

Branson/IPC Series 2000 Plasma Barrel Stripper:

BRANSON/IPC Series 2000 Plasma Barrel Photoresist

  • BRANSON/IPC S2005-11020Reactor Center with 10” (i.d.) X 20” (h) Quartz Chamber
  • S2000C Controller with 2ea Rotometer Controlled Gas Channels
  • ENI OEM-12 1000 Watt RF Generator
1   Plano, Texas
152145
Branson/IPC  

Branson/IPC  

Series 4000 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC Series 4000:

Plasma Barrel Stripper

Plasma Asher / Cleaner System

1   Plano, Texas
77000
Brewer Science  

Brewer Science  

CEE 4000 

List all items of this typeRobotic PR Coater Tracks

in Photoresist Coater Tracks

BREWER SCIENCE INC. PROGRAMMABLE AUTOMATED COAT/BAKE TRACK SYSTEM:
Programmable Automated Coat/Bake Track System
2   F* Scotia, NY
42388
Brooks Automation  

Brooks Automation  

001-1570-87 

List all items of this typeWafer Transfer Units

in Robotics

BROOKS AUTOMATION 001-1570-87:

Robot Vacuum Arm

2   Scotia, New York
41592
Brooks Automation  

Brooks Automation  

VCE2 

List all items of this typeWafer Transfer Units

in Robotics

BROOKS AUTOMATION CASSETTE ELEVATOR:

Cassette Elevator

8   Scotia, New York
136491
Brooks Automation  

Brooks Automation  

Fix Load25 

List all items of this typeWafer Loaders

in Robotics

Brooks Automation Fix Load25 Foup Loader :
Brooks Automation Fix Load25 Foup Loader

Foup Loader Wafer Handling Sub Assembly for 300mm
1   Plano, TX
237970
Brooks Automation  

Brooks Automation  

Fixload 6 V6M 013096-057-20 

List all items of this typeWafer Transfer Units

in Robotics

BROOKS AUTOMATION FIXLOAD 6 WAFER LOAD PORT 300MM:

New Surplus --  In original crate

1   F* Scotia, New York
129680
Brooks Automation  

Brooks Automation  

MagnaTran 7F 

List all items of this typeWafer Transfer Units

in Robotics

BROOKS AUTOMATION VACUUM WAFER TRANSFER ROBOT:

Vacuum Wafer Transfer Robot

Brooks Automation MagnaTran 7 Frogleg (MAG 7 F)

1   F* Scotia, New York
41744
Brooks Automation  

Brooks Automation  

VCE2  

List all items of this typeWafer Transfer Units

in Robotics

BROOKS AUTOMATION WAFER ELEVATOR/ALIGNER :

Wafer Elevator/Aligner

3   Scotia, New York
43406
Brooks Automation  

Brooks Automation  

VTR5 

List all items of this typeWafer Transfer Units

in Robotics

BROOKS AUTOMATION WAFER ROBOT:

Wafer Robot

1   Scotia, New York
43267
Brooks Automation  

Brooks Automation  

ACUTRAN 7 

List all items of this typeWafer Transfer Units

in Robotics

BROOKS AUTOMATION WAFER TRANSFER ROBOT AND ALIGNER:

Wafer Transfer Robot and Aligner

1   Scotia, New York
115714
Bruce (BTI) OEM* 

Bruce (BTI) OEM* 

8013469 

List all items of this typePower Supplies - Other

in Power Supplies

Bruce (BTI) Part Number 8013469:
Power Supply +5 VDC 40W
2   Hudson, NY
115715
Bruce (BTI) OEM* 

Bruce (BTI) OEM* 

8013470 

List all items of this typePower Supplies - Other

in Power Supplies

Bruce (BTI) Part Number 8013470:
Power Supply +-15 VDC 40W
2   Hudson, NY
57077
Bruce (BTI) OEM* 

Bruce (BTI) OEM* 

8196115 

List all items of this typeDC Power Supplies

in Power Supplies

Bruce (BTI) Part Number 8196115:
DC Power Supplies in Power Supplies

Supply 12 VDC Power (SWE30-12F)
2   Hudson, NY
43474
Bruker  

Bruker  

B-MN65/260 

List all items of this typeDC Power Supplies

in Power Supplies

BRUKER DC POWER SUPPLY 65V, 260A:

Direct Current Power Supply

1   Scotia, New York
250700
Canon  

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Only for sale for an competetive price!

 

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
250701
Canon  

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
98056
Carbone  

Carbone  

G-III 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

CARBONE SILICON CARBIDE 200mm DISC SUSCEPTOR:

Silicon Carbide 200 mm Disc Susceptor

Carbone of America Part number 017893-001

5   F* Scotia, New York
254198
CFM Technologies  

CFM Technologies  

FullFlow 1/99 8100 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

CFM FullFlow 1/99 8100, 200mm, s/n: Cont 1 1188:

HP & Sulfuric Ozone

1   Burlington, Vermont
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*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Fabrication Equipment:
Absopulse Electronics Ltd., Acopian, Advanced Energy, AG Associates, Airco Temescal, Akrion, AMAT, AP&S Customized Solutions, Applied Materials AKT, Applied Materials, Inc., ASM, ASML, Astex, Asyst Technologies, Axcelis Technologies GmbH, Axcelis/Eaton, Branson/IPC, Brooks Automation, Bruce (BTI), Canon, CFM Technologies, CHA Industries, Cober, Condor, Daihen, Dainippon Screen Mfg. Co., Ltd., DNS, Dockweiler Chemicals, E&R Engineering, Electronic Measurements Inc, ENI Power Systems, EVG, FSI, Gasonics, GCA/Precision Scientific, Gerling, Hamatech, Headway, Hewlett Packard, Hitachi Kokusai Elec, HNL Inc., Imtec Acculine, Inficon, InnerSense, ITEC Powertron, KLA-Tencor, LAM Research Corp., Lambda, Leatherwood Plastics, Leybold, Mactronix, March Instruments, Materials Research Corp, Mattson Technology, MKS Instruments, Inc., Muegge, National Electronics, Nexx Systems, Nikon, Nikon, Oxford Instruments, Plasma-finish Enterprise, Plasma-Therm, PlasmaQuest, Power Ten Inc, Power-One Inc, Quintel, RECIF, Reynoldstech, Sairem, Semi-Tool, SEMIgear, Semitool, Seren, SEZ, Silicon Valley Group, SMC, Solitec, Sorensen, Specialty Coating Systems, Spectra Gases, Stackpole, Surface Technology Systems, Suss MicroTec, Takatori, Tamarack Scientific, TDK-Lambda, Technics, Tel, Telemark, Temescal, Tepla, Terra Universal Inc., Tokyo Electron Limited, Tokyo Electronics Limited, Ulvac, Unknown, Varian, Verteq, Yield Engineering Systems