How to post on WWX
Latest Listings!
  more... 
in  ALL  ONLY Plasma Processing Eq
About Us Contact Us Terms & Conditions
Serving  Our Guest Log in    RegisterHow to post your own listings   View prices in  or ...    
ALL CATEGORIES   Semiconductor Mfg   Wafer Fabrication Eq   View   Search-by-Specs    Input    Edit    
View All Offers Under

Plasma Processing Equipment


» Switch Major Category
Click an item's ID# below for its full specifications and source, or:

Group Offers into sub-categories under Plasma Processing EquipmentGroup Offers into sub-categories under Plasma Processing Equipment

List all 19 product types under Plasma Processing EquipmentList all 19 product types under Plasma Processing Equipment


  • To sort on a column, click the column head; click it again to reverse the sort.
  • Click the links under the Product Type column head to see other like items of that type.
Displaying 1-100 of 202  Page  No Previous Page  Show Next Page Show Last Page
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
49690
Advanced Energy  

Advanced Energy  

ATX-600 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY IMPEDANCE MATCHING NETWORK CONTROLLER:

Controller for Impedance Matching Network

Controller for the Advanced Energy Impedance Matching Network.
Matching network is not available.

1   F* Scotia, New York
140340
Advanced Energy  

Advanced Energy  

Apex 3013 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ:

Radio Frequency Generator

The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

2   F* Scotia, New York
139488
Advanced Energy  

Advanced Energy  

PEII-10K 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ:

Radio Frequency Generator

Representative photo

10   F* Scotia, New York
208186
Advanced Energy  

Advanced Energy  

PEII-10K 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ:

Representative photo

1   F* Scotia, New York
175885
Advanced Energy  

Advanced Energy  

3152522-001B / RAS Split Inductor 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RAS SPLIT INDUCTOR:

The RAS Split Inductor is designed for use with Advanced Energy PE
or PEII 10 kW (or lower) power supply systems

1   F* Scotia, New York
225628
Advanced Energy  

Advanced Energy  

PE 10K 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY REMOTE MINI-PANEL :

PE 10K Remote Mini-Panel

1   Scotia, New York
1007
Advanced Energy  

Advanced Energy  

LF5 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY :

RF Generator w/Matching Network

Formerly RF Power Products

3   Scotia, New York
190763
Advanced Energy  

Advanced Energy  

RF10S 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1000 WATT 13.56 MHZ:

Radio Frequency (RF) Generator 

Power Supply Part No:  3150014-000 G4 SE

 

1   Scotia, New York
207153
Advanced Energy  

Advanced Energy  

Apex 1500/13 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1500 W 13.56 HZ:

Radio Frequency Generator

1   F* Scotia, New York
42967
Advanced Energy  

Advanced Energy  

Apex 3513 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 3.5KW:

Radio Frequency Generator

The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

1   F* Scotia, New York
3464
Advanced Energy  

Advanced Energy  

PDX9002V 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ADVANCED ENERGY RF PLASMA GENERATOR POWER SUPPLY 900W, 350 KHZ:

RF Plasma Generator

2 2,600.70 F* Scotia, New York
87228
Alcan Tech/Canon MAS-8000 
Alcan Tech/Canon MAS-8000 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

Alcan Tech/Canon MAS-8000:
Plasma Photoresist Stripper

Microwave Ashing System
1   F* Plano, TX
87656
Alcan Tech/Canon MAS-8000 
Alcan Tech/Canon MAS-8000 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

Alcan Tech/Canon MAS-8000:
Plasma Photoresist Stripper

Microwave Ashing System
1   Plano, TX
256502
LAM Research Corp.  

LAM Research Corp.  

Allian 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1   N* Villach, Carinthia
252024
Applied Materials  

Applied Materials  

200mm Centura II 

List all items of this typeCluster Plasma Tools - Other

in Cluster Plasma Tools

AMAT 200mm Centura II DXZx:

Centura MF II

Software: Vita Controller

Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage

Robot: HP+

Chamber:

A -> DPS+

B -> DPS+

C -> IPS

D -> ASP+

E -> Single Cooldown

F -> Orienter

1   Regensburg, Bavaria
180513
Applied Materials  

Applied Materials  

3750-01129 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT 3750-01129:
  • This is a brand new microwave waveguide component.
1   Leominster, Massachusetts
255103
AMAT  

AMAT  

5200 Centura 1 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Burlington, Vermont
254177
AMAT  

AMAT  

CENTURA 5200 WXZ 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Singapore
254176
AMAT  

AMAT  

CENTURA 5200 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Singapore
254385
AMAT  

AMAT  

CENTURA MCVD SYS5200T 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Singapore
251071
Applied Materials  

Applied Materials  

Centura TPCC XE+ RP 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT Centura TPCC XE+ RP, 200 mm, sn: 331590:

AMAT Centura TPCC XE+ RP AB: Gate-ox (DPN+RTO);C:Singen Spacer

1   Singapore
254386
AMAT  

AMAT  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT CENTURA, 200mm, s/n: 326235:

DPS POLY ETCH

1   Singapore
255105
AMAT  

AMAT  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT CENTURA, 200mm, s/n: 9398:

Centura IPS Etch Tool

1   Burlington, Vermont
255106
AMAT  

AMAT  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT CENTURA, 200mm, s/n: 9497:

Centura IPS Etch

1   Burlington, Vermont
255104
AMAT  

AMAT  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT CENTURA, 200mm, s/n: 9804:

Centura IPS Etch Tool

1   Burlington, Vermont
255107
AMAT  

AMAT  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT CENTURA, 200mm, s/n: AMAT18-01:

Centura II IPS Etch Tool

1   Burlington, Vermont
255108
AMAT  

AMAT  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT CENTURA, 200mm, s/n: ED22:

Centura IPS Etch Tool

1   Burlington, Vermont
250578
Applied Materials  

Applied Materials  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   East Fishkill, New York
250579
Applied Materials  

Applied Materials  

CENTURA 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   East Fishkill, New York
254174
AMAT  

AMAT  

ENDURA P5500 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Singapore
254173
AMAT  

AMAT  

ENDURA P5500 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Singapore
257151
AMAT  

AMAT  

Endura 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT Endura, 300mm, s/n: 425649:

ALD TiAl / TiN

1   Malta, New York
184652
Applied Materials  

Applied Materials  

FI20104 (3750-01111) 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Leominster, Massachusetts
257157
AMAT  

AMAT  

FRONTIER 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT FRONTIER, 300mm, 435695-ZG-ACHA:

CHA-SiCoNi, CHC-Frontier

1   Malta, New York
252766
Applied Materials  

Applied Materials  

Producer GT 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT Producer GT, 300mm, s/n: 430632-ZG-ACHA:

FRONTIER - Etch for Junctions

CHA-SiCoNi, CHB-Frontier, CHCFrontier

1   Malta, New York
199844
Applied Materials  

Applied Materials  

FI20099 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT Water-Cooled Dummy Load:
  • This is a brand new water-cooled dummy load with WR284 rectangular waveguide connection.
1   Leominster, Massachusetts
215272
HNL Inc.  

HNL Inc.  

AMAT 0190-02099 / 001 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:
  • Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
  • Only 1 in inventory.  Photos provided upon request.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
1 475.13 Leominster, Massachusetts
248647
Applied Materials  

Applied Materials  

Centura 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AMAT, Centura, 200mm, S/N 302958:

AMAT, Centura, 200mm, S/N 302958

Metal Etch. No loadports included.

1   Singapore
87949
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

APPLIED MATERIALS SYSTEM ELECTRONICS RACK:

System Electronics Rack

1   Scotia, New York
114961
Advanced Plasma Syst  

Advanced Plasma Syst  

B Series-4 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM. :

Plasma Treatment System
Desmear/Etchback


Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson.
Both companies merged and are an entity of Nordson - now called Nordson MARCH.

1   F* Scotia, New York
249547
ASM  

ASM  

Epsilon 3000 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASM Epsilon 3000, s/n: 033160, 300mm, CMD2:

300MM ASM Epsilon 3000 EPI HEX CMD2

1   East Fishkill, New York
249546
ASM  

ASM  

Epsilon 3000 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASM Epsilon 3000, s/n: 033240, 300mm, CMD1:

300MM ASME 3000 EPI HEX CMD1

1   East Fishkill, New York
165746
MKS instruments  

MKS instruments  

FI20166 (3750-01147) 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex (AMAT) 3kW SmartMatch Tuner:
  • 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
  • Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
  • Coordination of this repair may be possible in conjunction with the sale. 
1   Leominster, Massachusetts
183180
MKS Instruments  

MKS Instruments  

FI20634 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex (MKS) SmartMatch Tuner with Integrated PPD:
  • This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
  • This item seemed to function normally and progressed to a "Ready" status during initial tests of SmartMatch unit. 
  • Detailed photos can be provided upon request.
1   Leominster, Massachusetts
213304
MKS instruments  

MKS instruments  

Astex 1.0kW AX3060 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 1.0kW AX3060 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex 1.0kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
1   Leominster, Massachusetts
211656
MKS instruments  

MKS instruments  

AX3060-1 for AX2115 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 1.5kW AX3060-1 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex AX2115 1.5kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
  • Unit will be removed from plasma system and physical condition looks great.
1   Leominster, Massachusetts
190326
Astex  

Astex  

Astex WR340 Circulator 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 3-way Circulator or Equivalent:
  • Offered as used, microwave-tested goods.
  • Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
  • Equipped with a reflected power coupler & associated SMA connector at Port 3.
  • This component design was commonly used on 1990s-vintage Astex high power microwave generators.  It also offers potential utility for non-Astex microwave delivery systems.
  • Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
  • Photos available upon request.
1   Leominster, Massachusetts
203295
MKS instruments  

MKS instruments  

FI20608, Fl20608 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX 90-degree Waveguide Elbow:
  • Waveguide elbow with 90-degree bend.
  • Aluminum component with black orange-peel paint commonly used on ASTEX goods.
  • 1 of 2 flanges has threaded holes which accept 1/4-20 bolts.
  • 4 images attached show the condition of one of used parts.
  • On-site microwave testing may be possible upon request.
3   F* Leominster, Massachusetts
209065
Astex  

Astex  

FI20131 Fl20131 3750-01139 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex 90-degree Waveguide Elbow:
  • Used goods.
  • Aluminum waveguide with black orange-peel painted exterior.
  • Threaded holes on both flanges (Helicoil inserts).
2   Leominster, Massachusetts
255066
Astex  

Astex  

Astex A 5000 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex A 5000 5kW Industrial Microwave Generator Set:
  • Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
    • Remote water-cooled magnetron head,
    • Circulator with integrated directional coupler, and
    • Water-cooled dummy load.
  • The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
  • Testing of the goods can be expedited upon request.
  • Photos are also available upon request.
1   Sterling, Massachusetts
225956
Astex  

Astex  

Astex AX2050 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex AX2050 Microwave Generator Set:
  • Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator with integrated directional coupler.
    • All interconnecting cables for the above components.
  • Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
  • This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
  • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
  • A limited warranty can be considered depending on the application.
  • Photos available upon request.
1   Leominster, Massachusetts
255065
Astex  

Astex  

Astex AX2107 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex AX2107 700W Microwave Generator:
  • Cline Innovations has a used AX2107 rack-mounted switching power supply which was previously used on a microwave plasma system in a clean-room setting.  
  • Goods available as a power supply only or as a complete 700W microwave generator set including cables as well as WR284 waveguide components including: remote magnetron head, circulator with integrated directional coupler, and dummy load.
  • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  
  • This specific generator set came from a working system used in an R&D setting.  Testing of the goods can be expedited upon request.
  • Photos are also available upon request.
1   Sterling, Massachusetts
213180
Astex  

Astex  

Astex AX2518 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ASTeX AX2518 SmartPower 1.8kW Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
2   Leominster, Massachusetts
165747
Astex  

Astex  

AX3032 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex AX3032 (or equivalent) Water-Cooled Circulator & Coupler:
  • Water-cooled, 3-way circulator with integrated directional coupler, signal processing board.
  • DSubminiature 9-pin connection (for reflected power signal).
  • WR284 waveguide component intended for use with Astex 2.5kW microwave generators including AX2050.
1   Sterling, Massachusetts
254281
MKS instruments  

MKS instruments  

AX3120 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex AX3120 Air-Cooled Microwave Circulator:
  • Cline Innovations has an air-cooled Astex circulator intended for use on AX2100 series microwave generators including the AX2115 generator with 1.5kW max 2.45GHz output.
  • Goods to be pulled from a waveguide assembly removed from a plasma processing tool.  Careful inspection of the ceramic magnet will be performed at the time of disassembly.
  • This disassembly can be expedited & photos can be provided upon request.
1   Sterling, Massachusetts
165749
Astex  

Astex  

AX3153 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex AX3153 or equivalent Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
1   Sterling, Massachusetts
63666
Astex  

Astex  

AX 7610 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE:

Chemical Downstream Plasma Source

Applied Materials part number: 3750-0112

2   Scotia, New York
165750
Astex  

Astex  

CS2 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex CS2 Circulator with Directional Coupler:
  • Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
  • Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
1   Sterling, MA
184653
Astex  

Astex  

FI20170 (0760-01028) AMAT Ulvac 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex FI20170 Water-Cooled Circulator (or Equivalent):
  • This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.  
  • The integrated coupler measures reflected power using a diode senor.  The reflected power signal is processed using an integral circuit-board designed into the coupler.  Output is provided using a 9-pin male D-subminature connector.
  • These goods may also be compatible with Astex subsystems for non-OEM applications. 
  • Goods are most typically integrated with 2.5kW microwave delivery systems.
  • Photos included in this listing are for reference only.  The actual circulator shown in this listing has been sold, but depicts the general design.
  • Please contact Cline Innovations for more information.
1   Sterling, Massachusetts
168802
Astex  

Astex  

Astex Model HS 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, Massachusetts
168804
Astex  

Astex  

Astex HS-1000 or HS1000 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex HS-1000 Air-Cooled 1000W Magnetron Head:
  • For use with compatible Astex 1kW switching microwave power supplies.
1   Leominster, Massachusetts
206579
Astex  

Astex  

SXRHA 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ASTEX MAGNETRON HEAD:

Magnetron Head

2   Scotia, New York
254280
MKS instruments  

MKS instruments  

Astex ASO2555-55 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

Astex MKS Microwave 55-foot HV Cable for AX2115:
  • Long Hight Voltage Cable for OEM Semiconductor Tools including AMAT.
  • This cable interconnects cetain Astex rack-mounted power supplies to remote magnetron heads.  It is being offered is in excellent, possibly new, condition.
  • This 4-pin heavy-duty cable has Cannon military connectors on each end and is marked/rated for 10,000 DC Max voltage & 105 degrees Celsius Max.
  • Photos can be provided upon request.
1   Sterling, Massachusetts
254384
Astex  

Astex  

(AGL) Astex B13171  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex Model B13171 Microwave Dual Directional Coupler:
  • Pre-owned dual directional coupler with integrated flange interlock.
  • WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
  • Both couplers are factory rated for 60dB.
  • Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
  • Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
  • Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past. 
  • Photos and further information can be provided upon request.
1   Leominster, Massachusetts
202814
Astex  

Astex  

Model TS or Equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX Three Stub Manual Microwave Impedance Tuner:
  • Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
  • This tuner design is intended for use with 2.45GHz microwaves. 
  • Astex sold goods of this general design for use on generators rated for outputs of up to 5kW.  Actual rating can be clarified at the time of sale in relation to your application details.
  • The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
  • Refurbished as needed to ensure mechanical and electromagnetic functionality.
  • These dials can age or get jammed due to impact.  Cline Innovations replaces dials and components as needed during refurbishment.
1   Leominster, Massachusetts
85963
Astex  

Astex  

AX3041 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

ASTEX THREE STUB TUNER:

Three Stub Tuner

1 1,200.32 Scotia, New York
165710
Astex  

Astex  

Model LS or Equivalent/Substitute 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex Water-Cooled Dummy Load for use with 1.5kW systems:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
  • Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
  • New, surplus goods may be available.
1   Sterling, Massachusetts
248913
Astex  

Astex  

AX3030 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok adaptors.
  • Design intended for up to 500W continuous reflected power. 
  • Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
  • Photos available upon request.
1   Leominster, Massachusetts
190257
Astex  

Astex  

CPR340 or equivalent 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex WR284 to WR340 Waveguide Adaptor:
  • Aluminum rectangular waveguide component.
  • Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
  • Commonly used with higher power Astex microwave delivery systems & plasma sources.  
  • Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
  • Approximate length is 5 to 6 inches.
1   Leominster, Massachusetts
184611
Astex  

Astex  

Astex WR340 Dummy Load 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Astex WR340 Water-Cooled Dummy Load:
  • Offered as used, microwave-tested goods.
  • WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
  • Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
  • Photos available upon request.
2   Leominster, Massachusetts
254254
Axcelis/Fusion  

Axcelis/Fusion  

200ACU 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Burlington, Vermont
254377
Axcelis Technologies  

Axcelis Technologies  

INTEGRA ES 3CH / INT340 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

AXCELIS INT340, 300mm, s/n: INT340029:

AXCELIS INTEGRA ES 3CH / INT340

NH3 Plasmastrip

1   Dresden, Saxony
427
Balzers  

Balzers  

RFS 302 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

BALZERS RF POWER SUPPLY:

RF Power Supply

1   Scotia, New York
139078
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson / IPC 4055/2:
Plasma Surface Treatment Tool
1   Plano, TX
154299
Branson/IPC  

Branson/IPC  

3000C 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

1   Plano, TX
126550
Branson/IPC  

Branson/IPC  

P3075/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON BARREL RESIST STRIPPER:

Barrel Resist Stripper

Branson P3075/2

1   F* Scotia, New York
189210
Branson/IPC  

Branson/IPC  

4155/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON PLASMA ASHER/ETCHER:

Plasma Asher/Etcher

1   Scotia, New York
223494
Branson/IPC  

Branson/IPC  

P2100 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

BRANSON PLASMA STRIPPER 1250 WATT:

Plasma Resist Stripper 

Quartz Barrel - Solid State RF Generator

1   Scotia, New York
189241
Branson/IPC  

Branson/IPC  

7102 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

BRANSON TEPLA PVA PLASMA ETCHER 1000 WATT:

Plasma Etcher

1   F* Scotia, New York
152146
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Surface Treatment Tool
1   F* Plano, TX
152147
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Treatment Surface Tool
1   F* Plano, TX
49911
Branson/IPC  

Branson/IPC  

S-3100 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC S-3100:
Plasma Barrell Stripper, 12" x 20" Quartz
1   Plano, TX
251432
Branson/IPC  

Branson/IPC  

Series 2000 

List all items of this typeBarrel/Box Plasma Etchers

in Plasma Etch Equipment

Branson/IPC Series 2000 Plasma Barrel Stripper:

BRANSON/IPC Series 2000 Plasma Barrel Photoresist

  • BRANSON/IPC S2005-11020Reactor Center with 10” (i.d.) X 20” (h) Quartz Chamber
  • S2000C Controller with 2ea Rotometer Controlled Gas Channels
  • ENI OEM-12 1000 Watt RF Generator
1   Plano, Texas
152145
Branson/IPC  

Branson/IPC  

Series 4000 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC Series 4000:

Plasma Barrel Stripper

Plasma Asher / Cleaner System

1   Plano, Texas
196069
Cober  

Cober  

6kW microwave tuner 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Cober Manual 3-Stub Tuner:
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1   Leominster, Massachusetts
168904
Cober  

Cober  

ST89 microwave  

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Cober ST89-1019 High Power Dummy Load:
  • 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1   Leominster, Massachusetts
43020
Comdel  

Comdel  

CPS-5000/13.56 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

COMDEL RADIO FREQUENCY GENERATOR POWER SUPPLY:

Radio Frequency Generator

1 9,502.55 Scotia, New York
248648
Gasonics  

Gasonics  

PEP-4800DL 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Concept Part Solutions, Inc., PEP-4800DL, 200mm, S/N M860260:

Concept Part Solutions, Inc., PEP-4800DL, 200mm, S/N M860260

No loadports included.

1   Singapore
197423
Connecticut Microwav  

Connecticut Microwav  

366004 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

Connecticut Microwave Dual-Directional Coupler:
  • 60 dB ports
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Round-flange connections [likely UG53/U  specification]
  • Photos provided upon request.
1   Leominster, Massachusetts
231089
Daihen  

Daihen  

FGA-50B, DMU-01G 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

DAIHEN AMAT Water Cooled RF Generator 5000W 40.68MHz 50/60Hz:

RF Generator New Surplus

Applied Materials P/N 0191-71542

2   Scotia, New York
230846
Daihen  

Daihen  

RGA-50J3, DMU-01G 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

DAIHEN WATER COOLED RF GENERATOR 5000W 13.56MHZ:

RF Generator New Surplus

 

12   Scotia, New York
223580
Advanced Energy  

Advanced Energy  

Cesar 4020 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

DRESSLER ADVANCED ENERGY 2000W 40.68 MHz RF GENERATOR:

RF Generator

 

1   Scotia, New York
78779
ENI  

ENI  

ACG-3 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ENI ACG-3 Radio Frequency Generator:

ENI ACG-3 Radio Frequency Generator

1   Scotia, New York
1001
ENI  

ENI  

PL3 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ENI POWER SYSTEMS PLASMALOC 3 RF GENERATOR POWER SUPPLY:
Plasmaloc 3 RF Generator
1   Scotia, New York
151365
ENI  

ENI  

OEM 12A 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ENI POWER SYSTEMS RF GENERATOR 1250W, 13.56 MHZ:

Radio Frequency Generator

2   Scotia, New York
102336
ENI  

ENI  

OEM 12B 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ENI POWER SYSTEMS RF GENERATOR 1250W, 13.56 MHZ:

Radio Frequency Generator

Acquired by MKS Instruments

Representative photo

1   Scotia, New York
185506
ENI Power Systems  

ENI Power Systems  

OEM-6AM-1B-21251 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ENI POWER SYSTEMS RF POWER SUPPLY 13.56 MHz:

RF Generator

3   Scotia, New York
993
ENI  

ENI  

LPG12A-21051-50 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

ENI POWER SYSTEMS SOLID STATE RF GENERATOR POWER SUPPLY:

Solid State RF Generator

4 2,500.67 F* Scotia, New York
168803
MKS instruments  

MKS instruments  

Astex FI20047 

List all items of this typeRadio Frequency (RF) Generators

in Power Supplies

FI20047 Water-Cooled Magnetron Head:
  • Mag Head for use with compatible MKS Astex series switching microwave power supplies.
  • This mag head design includes an orange colored Caton HV connector.
  • Goods in inventory may already have test history.  Testing may be possible at Cline Innovations.
  • Photos can be provided upon request.  
1   Leominster, Massachusetts
254253
Fusion Systems Inc.  

Fusion Systems Inc.  

200AC/ACU 

List all items of this typePlasma Processing Equipment and Tools - Other

in Plasma Processing Equipment

1   Burlington, Vermont
Displaying 1-100 of 202  Page  No Previous Page  Show Next Page Show Last Page


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Plasma Processing Equipment:
Advanced Energy, Advanced Plasma System, Inc., AMAT, Applied Materials, Inc., ASM, Astex, Axcelis Technologies, Inc., Axcelis/Eaton, Axcelis/Fusion, Balzers, Branson/IPC, Cober, Comdel, Connecticut Microwave, Daihen, ENI Power Systems, Fusion Systems Inc., Gasonics, Gerling, HNL Inc., Japan Radio Co., LAM Research Corp., March Instruments, Mattison, Mattson Technology, Metroline, MKS Instruments, Inc., Muegge, National Electronic, National Electronics, Nexx Systems, Novellus Systems, Oerlikon, Oxford Instruments, Plasma-finish Enterprise, Plasma-Therm, PlasmaQuest, Sairem, SEMIgear, Seren, SOLVISION, SPI Supplies, Surface Technology Systems, Technics, Tel, Tepla, Trion Technology, Ulvac, Waveline, Yield Engineering Systems